... Canada 1 Focused Ion Beam Based Three-Dimensional Nano-Machining Gunasekaran Venugopal 1, 2, Shrikant Saini 1 and Sang-Jae Kim 1, 3 1 Jeju National University, Department of Mechanical Engineering, ... nano-structured materials, nano devices, and hierarchical nano-sized patterns with a 10 0 nm distance using a focused ion beam (FIB). Fabrication of graphene nanoribbons and graphene -based ultracapacitors ... Microfabrication 13 1 Mohammad Yeakub Ali, Reyad Mehfuz, Ahsan Ali Khan and Ahmad Faris Ismail Chapter 8 Mechanical Micromachining by Drilling, Milling and Slotting 15 9 T. Gietzelt and L. Eichhorn Chapter...