... been developed (Fatikow and Rembold, 1997; Rai-Choudhury, 1997),including chemical sensors, gas sensors, optical sensors, biosensors, thermal sensors and mechanical sensors. Some of the major ... developed using standard thin-film deposition techniques suchas sputtering, and physical or chemical vapor deposition. Their use in sensors and actuatorsis inherently limited by the quality and repeatability ... capacitance and resistance, and mechanical mass and friction, the constitutive relations for this device can be derived forthe current (i) and force (F ), in terms of displacement (x) and flux linkage...