... 85 , No 11, November 1997, pp 183 3– 185 6 130 MEM Structures and Systems in Industrial and Automotive Applications [12] Muller, R S., and K Y Lau, “Surface-Micromachined Microoptical Elements and ... “Genetic Analysis Systems: Improvements and Methods,” Tech Digest Solid-State Sensor and Actuator Workshop, Hilton Head Island, SC, June 8 11, 19 98, pp 7–10 [43] U.S Patent 6,533,366, March 18, 2003 ... deposited and patterned to provide bias and address electrodes, landing pads, and electrical interconnects to the underlying electronics Photoresist is spin deposited, exposed, developed, and hardened...