... general design rule for using bowtie apertures for nanolithography On the other hand, there are many process difficulties to overcome, such as accurate fabrication of bow- tie apertures and maintaining ... Toward nanometer-scale optical photolithography: utilizing the near-field of bowtie optical nanoantennas Nano Lett 6, 355–360 Wang, L., Uppuluri, S.M., Jin, E.X & Xu, X (2006) Nanolithography using ... Given the fact that the depth of nanolithography is normally less than 50 nm (Wang et al., 2006), the bow- tie apertures offer the advantage for nanolithography in terms of having a higher imaging...