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uv lithography of ultrathick su 8 for microfabrication of high aspect ratio microstructures and applications in microfluidic and optical components

Báo cáo

Báo cáo "FABRICATION OF HIGH-ASPECT-RATIO MICRO STRUCTURES USING UV-LIGA TECHNOLOGY " docx

Báo cáo khoa học

... features inside SU8 50 patterns SU8 -50 Ni ldNi Figure Nickel comb structure before (a) and after (b) stripping SU8 -50 Fabrication of high- aspect- ratio micro structures using… 25 The SU8 mold was ... ensure the uniformity and hardness of the SU8 -50 layer for exposure step Post exposure bake was necessary to make SU8 pattern strong for the next developing and electroplating steps For thick PR ... Fabrication of high- aspect- ratio micro structures using… 21 (HARM) for a variety of MEMS applications Modifications and/ or improvements of the UV lithography system and processing techniques...
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Fabrication of high aspect ratio metallic micro structures by reverse exposure method

Fabrication of high aspect ratio metallic micro structures by reverse exposure method

Tổng hợp

... high- aspect- ratio applications This is due to the low optical absorption of SU- 8 near UV range which results in vertical sidewalls and uniform exposure UV sensitive characteristics, high viscosity, and high ... micromachining, surface micromachining and high- aspect- ratio machining are the three major ones for MEMS [13,14] in which photolithography, chemical and plasma etching, thin-film deposition and other ... These include pre-baking and post-exposure-baking time and temperature, exposure time, and relaxation time after pre-baking and before development For UV exposure, a preliminary investigation is...
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Research for Agricultural Sciences:

Research for Agricultural Sciences:" Effect of high temperature fluidized drying and tempering on head rice yield and mechanical strength of Vietnamese rice varieties " doc

Báo cáo khoa học

... Effect of tempering time on HRY at drying temperature of 80 0C and 900C for 2.5 and 3.0 Reference HRYs of A10 and OM2717 were 54.5% and 43.26%, respectively (triangular dot) 84 Table Main effects and ... 0.213 Interaction factor(s) A10 DryingTemp DryingTime TemperingTime DryingTemp*DryingTime DryingTemp*TemperingTime DryingTime*TemperingTime DryingTempt*DryingTime*TemperingTime OM2717 DryingTemp ... DryingTemp DryingTime TemperingTime DryingTemp*DryingTime DryingTempt*TemperingTime DryingTime*TemperingTime DryingTemp*DryingTime*TemepringTime BF Fissured kernels: Drying temperature and time effect:...
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guide for the use of high-range water-reducing admixtures (superplasticizers) in concrete

guide for the use of high-range water-reducing admixtures (superplasticizers) in concrete

Cơ sở dữ liệu

... usually be solved by increasing the fine-tocoarse-aggregate ratio Increasing the entrained air content within specification limits, or including or increasing the amount of an appropriate mineral ... tolerances, high compressive strength and abrasion resistance of the top surface, and a minimum of cracking and curling A highrange water-reducing admixture is very helpful in producing concrete ... will hold fast under high form pressures Failure to take precautions against the high pressures will result in form-leakage lines and sand streaks 5.5-Parking structures Parking structures require...
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Development of high hydrogen capacity complex and chemical hydrides for hydrogen storage

Development of high hydrogen capacity complex and chemical hydrides for hydrogen storage

Thạc sĩ - Cao học

... electron cloud of the hydrogen molecule and of the substrate The combination of these two forces results in a small adsorption enthalpy of 1-10 kJ/mol As the force involved in the interaction between ... molecules The H2-substract surface interaction potential has an attractive interaction originating from long-range forces, and a repulsive force originating from short-range interaction The former is ... state MAS NMR measurements of the mixture of Mg(NH2)2-AB in the molar ratio of 1/2 before and after being treated at different temperatures 11B NMR spectra of AB was included for comparison 114...
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báo cáo hóa học:

báo cáo hóa học:" Research Article Systems of Generalized Quasivariational Inclusion Problems with Applications in LΓ-Spaces" doc

Hóa học - Dầu khí

... no 6, pp 180 9– 181 8, 2006 14 L Deng and M G Yang, “Weakly R-KKM mappings-intersection theorems and minimax inequalities in topological spaces,” Applied Mathematics and Mechanics, vol 28, no 1, ... ∈ X if and only if for any y ∈ T x and for any net {xα } in X converging to x, there exists a net {yα } in Y such that yα ∈ T xα for each α and yα converges to y Lemma 2.2 see 23 Let X and Y ... the proof of 26, Theorem 2.2 Fixed Point Theory and Applications Existence Theorems of Solutions for Systems of Generalized Quasivariational Inclusion Problems Let I be any index set For each...
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Báo cáo khoa học:

Báo cáo khoa học: "Silviculture of high-quality oaks: questions and future research needs" docx

Báo cáo khoa học

... uncertain origins of stands, seed sources and, in the United States, to repeated high- grading of stands Assessment of genetic status of stands and techniques for genetic improvement of stands being regenerated ... growth and these parameters are known for some species, but effective practices for establishment, tending and thinning stands are inadequately known for most species and thinning of stands in Central ... past treatment of these stands are often uncertain and increase the uncertainty of yield regeneration by planting and diseeding with a tendency towards wider spacing prevails in Central Europe...
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Báo cáo y học:

Báo cáo y học: " Legionella pneumophila infection induces programmed cell death, caspase activation, and release of high-mobility group box 1 protein in A549 alveolar epithelial cells: inhibition by methyl prednisolone" pot

Báo cáo khoa học

... involved in the design and coordination of the study and drafting the manuscript KH, MA, SH, SY, MK and MT were involved in the design and coordination of the study HT and NM were involved in western ... fragmentation is shown in green (FITC staining), and A549 cell nuclei in red (PI staining) cells infected with the virulent strain of L pneumophila (Fig 8) Inhibition of nuclear DNA fragmentation, ... factors for morbidity and mortality Arch Intern Med 1994, 154:2417-2422 Reingold AL: Role of legionellae in acute infections of the lower respiratory tract Rev Infect Dis 1 988 , 10:10 18- 10 28 Tkatch...
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Báo cáo y học:

Báo cáo y học: "Unraveling the role of high mobility group box protein 1 in severe traum" doc

Báo cáo khoa học

... capable of enhancing the clearance of HMGB1 and its bound proinflammatory co-factors or of inhibiting interactions of HMGB1 with macrophages and other cell populations that are involved in acute inflammatory ... clinical setting Antibodies to HMGB1 improve outcome in animal models of sepsis, clearly demonstrating a role for HMGB1 in contributing to mortality in severe infection [6,11] While initial studies ... characterizing the co-factors bound to HMGB1 in the setting of severe accidental injury would be extremely useful in delineating the mechanisms through which HMGB1 may contribute to outcome in this clinical...
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splice and development length of high relative rib area reinforcing bars in tension

splice and development length of high relative rib area reinforcing bars in tension

Cơ sở dữ liệu

... the reinforcement being developed, in. 2 = cmin + 0.5 db , in = cover of reinforcement being developed, measured to tension face of member, in = maximum value of cs or cb , in = minimum value of ... cb, in = minimum value of csi + 0.25 in or cso, in = one-half of average spacing between bars or splices in a single layer, in = side cover of reinforcing bars, in = relative rib factor as defined ... specified value for the reinforcement being used Table R4.2.1 indicates the size of the database used in developing the provisions in 4.2 for high relative rib area bars in normal- and high- strength...
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Identifying key signatures of high productivity from transcriptome and proteome profiles of CHO cells

Identifying key signatures of high productivity from transcriptome and proteome profiles of CHO cells

Tổng hợp

... serum concentration, while Wong et al (2006) monitored the global expression profile of hybridomas in insulin and zinc-supplemented cultures to determine the effect of zinc as an insulin replacement ... produced in CHO cells (Umana et el, 1999) 2.1.2 Generation of stable high producing cell lines 2.1.2.1 DNA delivery and integration The establishment of a recombinant cell line begins with the introduction ... process, involving rounds of selection and single cell cloning which is costly in both money and time In an effort to increase the throughput of clone selection, we identified key signatures of a high...
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Synthesis of high surface area zirconia and zirconia based catalysts

Synthesis of high surface area zirconia and zirconia based catalysts

Cao đẳng - Đại học

... 3473 [80 ] H Grisebach and J.B Mofftat, J Catal 80 (1 983 ) 350 [81 ] H Noller, J.A Lercher, H Vinek, Mater Chem Phys 18 (1 988 ) 577 [82 ] Sumitomo Chemical Co., Eur Pat Appl 0222 356, 1 986 [83 ] H Pines, ... with increasing hydrothermal period The resulting SiO2-ZrO2 had a specific surface area higher than 240 m2/g even after calcination at 500 °C Incorporation of yttrium, aluminium and nickel into ... zirconia increased with digestion time and with the water/alkoxide ratio A water/alkoxide ratio of 32 and a digestion time of 192 h appear to be optimal in attaining high surface area zirconia Inoue...
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Tribology of self lubricating SU 8 composites for micro electro mechanical systems (MEMS) applications

Tribology of self lubricating SU 8 composites for micro electro mechanical systems (MEMS) applications

Kỹ thuật - Công nghệ

... also given Before washing: (a) Pristine SU- 8 (b) SU- 8+ PFPE (c) SU- 8+ SN 150 (d) SU- 8+ MAC After washing: (e) SU- 8+ PFPE (f) SU- 8+ SN 150 (g) SU- 8+ MAC 82 Table 5.3 Initial coefficient of friction (µi), ... (a) pristine SU- 8, (b) SU- 8+ PFPE composite 66 Figure 4.3 Coefficient of friction versus number of cycles plot for SU- 8, SU8 +PFPE, SU- 8+ SiO2, SU- 8+ CNTs and SU- 8+ graphite composites obtained from ... surfaces (a) Pristine SU- 8 (b) SU- 8+ PFPE (c) SU- 8+ SN 150 (d) SU- 8+ MAC 86 Figure 5.3 Typical coefficient of friction versus number of cycles plot for pristine SU- 8 and SU- 8 composites obtained from the...
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High-intensity Low-pressure Electrodeless Mercury-Argon Lamp for UV Disinfection of Wastewater

High-intensity Low-pressure Electrodeless Mercury-Argon Lamp for UV Disinfection of Wastewater

Môi trường

... The disinfection system is a standard product incorporating a set of electrodeless UV lamps By combining and installing several UV modules, it is possible to implement a system suitable for any ... Use of electrodeless lamp eliminates the problem of absolute life resulting from the electrode life In this paper, in order to obtain high- intensity UV emission, we present the results obtained ... controlling the plasma condition of an electrodeless mercury-argon lamp with a RF (13.56MHz) power supply Lighting principal of electrodeless UV lamp Lighting principle of electrodeless UV lamp...
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Báo cáo y học:

Báo cáo y học: " G-CSF and IL-8 for early diagnosis of sepsis in neonates and critically ill children – safety and cost effectiveness of a new laboratory prediction model: study protocol of a randomized controlled trial [ISRCTN91123847]" pps

Báo cáo khoa học

... Figure Result form Results are presented in three ways: raw cytokine concentrations in pg/µl; cytokine concentration derived likelihood ratios for the presform ence of sepsis or pneumonia; and post-test ... morbidity and costs associated with hospital acquired infection Ascertaining relevant indicators of morbidity and costs in all patients Available online http://ccforum.com/content /8/ 6/R443 Figure Result ... including differential and plasma levels of C-reactive protein Routine surveillance for ventilator-associated pneumonia comprises microbiological examination of the tracheal aspirate, including...
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Positive photoresist as a sacrificial layer for MEMS micro component fabrication with SU 8 polymer

Positive photoresist as a sacrificial layer for MEMS micro component fabrication with SU 8 polymer

Cao đẳng - Đại học

... Surface energy obtained for AZ 4620 without UV exposure, AZ 4620 with UV exposure, SU- 8 without UV exposure and SU- 8 with UV exposure 62 POSITIVE PHOTORESIST AS A SACRIFICIAL LAYER FOR SU- 8 MICROSTRUCTURES ... LAYER FOR SU- 8 MICROSTRUCTURES USING IN MEMS APPLICATION -30- MICROFABRICATION AND RELEASE OF SU- 8 STRUCTURES CHAPTER – MICROFABRICATION AND RELEASE OF SU- 8 STRUCTURES 4.1 EQUIPMENT (SAMPLE PREPARATION) ... exposure baking (PEB) process and (b) Shrinkage effect due to overexposure with stress formation in within the SU- 8 film………… 58 Figure 5 .8 Photographs and micrographs of lift-off SU- 8 film and surface...
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Câu hỏi trắc nghiệm luật hình sự 8

Câu hỏi trắc nghiệm luật hình sự 8

Cao đẳng - Đại học

... tc ot sinh mng ca ngi xõm hi vi phm iu kin thuc v c s phỏt sinh quyn phũng v chớnh ỏng c Ti git ngi vt quỏ gii hn phũng v chớnh ỏng l hnh vi c ý tc ot sinh mng ca ngi xõm hi vi phm iu kin thuc ... hnh Cú ý kin khỏc v ti danh ca M v ng bn: M v ng bn phm ti quy nh ti iu 82 M v ng bn phm ti quy nh ti iu 79 M v ng bn phm ti quy nh ti iu 84 Anh/ch ng ý vi ý kin no, hóy gii thớch ý kin m mỡnh ... bỳa inh vi ý nh nu ỏnh bc b thua, Hựng s i trm cp ti sn v s dựng bỳa chng li nu b ui bt Khong 23 gi cựng ngy, b thua ht tin, Hựng mang theo bỳa inh n Cụng ty trỏch nhim hu hn Lờ Vi ti 181 ng...
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Giáo án lịch sử 8

Giáo án lịch sử 8

Trung học cơ sở - phổ thông

... công nhân từ năm - Giáo viên dẫn dắt học sinh nhớ lại 184 8- 187 0 Quốc tế thứ phong trào công nhân a Phong trào công nhân từ 184 8- 187 0 ? Tại năm 184 8 184 9, - Giai cấp công nhân trởng thành phong ... II - Yêu cầu học sinh thống kê tài Lê Nin việc thành lập đảng kiểu liệu đọc, su tầm Lê Nin nhà? Nga + Lê Nin: Sinh 4- 187 0 gia ? Em có hiểu biết Lê Nin đinh nhà nho tiến thông minh, sớm tham gia ... cho kinh đàn áp đẫm máu quân đội chống tế t chủ nghĩa phát triển quần chúng khởi nghĩa (2- 184 8 pari) - Mời năm sau cách mạng 184 8- 184 9 bão táp cách mạng lại bùng lên Châu Âu - Từ 185 9- 187 0: ?...
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PHƯƠNG PHÁP  HƯỚNG DẪN HỌC SINH  KHAI THÁC KÊNH HÌNH TRONG  SGK LỊCH SỬ 8

PHƯƠNG PHÁP HƯỚNG DẪN HỌC SINH KHAI THÁC KÊNH HÌNH TRONG SGK LỊCH SỬ 8

Trung học cơ sở - phổ thông

... s, l nhng phng tin dy hc rt c trng ca b mụn lch s, giỳp hc sinh tỏi hin li nhng s kin, nhõn vt, hin tng quỏ kh Theo xu hng hin l gim bt thuyt trỡnh ca giỏo viờn, to iu kin hc sinh hc tớch cc, ... cung cp kin thc giỳp cho hc sinh t tỡm tũi, phỏt hin nhng kin thc v rốn luyn k nng b mụn ch khụng ch minh cho li ging ca giỏo viờn Nh vy, kờnh hỡnh l i tng hc sinh ch ng, t lc khai thỏc kin thc ... by túm tt din bin sau ú chuyn qua Da vo lc , em hóy trỡnh by din bin v tip tc c hon thin thnh k nng lp 8, 9 Nh vy vic hng dn, t chc cho hc sinh lp da vo kờnh hỡnh t mỡnh khai thỏc kin thc l...
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