... scattering of electrons that is more serious for thicker resist [13] Note that even thinner resist was used for most previous high resolution studies on HSQ and calixarene resists For 30-nm polystyrene, ... using electron beam lithography for bitpatterned media J Vac Sci Technol B 2007, 25(6):2202-2209 doi:10.1186/1556-276X-6-446 Cite this article as: Ma et al.: Polystyrene negative resist for highresolution ... resolution negative electron beam resists J Vac Sci Technol B 2006, 24(4):1776-1779 Hosaka S, Sano H, Itoh K, Sone H: Possibility to form an ultrahigh packed fine pit and dot arrays for future...