... effect on sputter yield, 113 Sputter yield, 111-112, 113 Sputter-ion pump, 70 Sputtered films, stress, 427 Sputtering, 109, 131 metals, 113 schematic, 71 alloys, 113 bias, 129 dc, 102 ... spectrometer. c. What are the energies (in eV) of these transitions? REFERENCES 1. 2.* 3. 4.* 5. 6. 7. 8. 9. 10 11. 12.* 13. * 14. D. W. Hess, in Microelectronic Materials and Processes, ... change? c. Is the tunneling probability enhanced more by decreasing V or increas- ing E by the same amount of energy. 11. predict values of A E, and AE, for the following rectangular...