... applications, 79 hysteresis, 12 6 magnetron, 11 6, 11 8, 12 5 reactive, 11 8, 12 6 RF, 10 3, 11 8, 12 1 stoichiometry, 11 4 table, 13 2 targets, 11 8 targets (table), 11 9 -12 0 YBa,Cu,O,, 644 zone ... sputter yield, 11 3 Sputter yield, 11 1 -11 2, 11 3 Sputter-ion pump, 70 Sputtered films, stress, 427 Sputtering, 10 9, 13 1 metals, 11 3 schematic, 71 alloys, 11 3 bias, 12 9 dc, 10 2 early applications, ... oxidation, 15 0 poly-Si, 17 6 pyrolysis, 14 9 rapid thermal, 335 reactor, 17 8, 555 reduction, 14 9 safety, 18 8 Sic, 16 1 silicon nitride, 18 2 superlattice, 663 surface reaction contro1, 17 2 thermodynamics,...