... Tai2'Systems Mangement Engineering, Kansai University 3-3 -3 5, Yamate-cho, Suita, Osaka 56 4-8 680, JapanCalifornia Institute of Technology 13 6-9 3, Pasadena, CA9112, USAABSTRACTPolymer material of Parylene ... Center,National Institute for Materials Science (NIMS), 1-2 -1 Sengen, Tsukuba, Ibaraki 30 5-0 047, JAPAN3 Robomachine Laboratory, FANLJC Ltd.,Oshino, Yamanashi 40 1-0 597, JAPAN4 Materials Fabrication ... The acceleration and angular acceleration could bemeasured by this method in translational and rotational motion respectively. In experimentalconfirmation, the amplitude of acceleration was about...