... of sacrificial layer and (c) direct use of the fusion bonding by SU-8. Heat Transfer - Theoretical Analysis, Experimental Investigations and Industrial Systems 1 06 6. 1.3 Fabrication processes ... devices, micro heat exchangers, micro valves and pumps, and lab-on-chips, more studies have been Heat Transfer - Theoretical Analysis, Experimental Investigations and Industrial Systems 104 ... polysilicon sensors or heaters integrated with the microchannel system. Heat Transfer - Theoretical Analysis, Experimental Investigations and Industrial Systems 76 Grujicic, M.; Zhao,...