fabrication of mems accelerometer
Simulation and Fabrication of Piezoelectric mems Inkjet Print head
Ngày tải lên :
10/04/2013, 13:48
... evaluate performance, fabrication and testing. Reviews of the
modeling and test results enable optimization of the performance of the MEMS device.
Fig. 1-6. A typical approach to MEMS application ... complexity of the design, it’s
often difficult to predict the performance of MEMS devices intuitively. In these cases
computer simulations may provide a means to study the performance of MEMS devices ...
piezoelectric MEMS inkjet has the advantages of lower power consumption, lower
voltage operation and relatively larger driving force.
Based on the primary design and fabrication of piezoelectric MEMS...
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Design and Simulation of A CMOS-MEMS Accelerometer
Ngày tải lên :
27/10/2013, 23:15
... is one of the major sources of offset. The sensor outputs have an
offset of about 25mV, which saturates the preamplifier. In experiments, the offset is cancelled by applying
a DC voltage of about ... gradient in the
beam. In accelerometer design, lateral bending of beams can cause offset.
Figure 2.5 shows finite element analysis results of the resonant modes of a lateral accelerometer. The
simulation ... response of the sensor
orientation with respect to gravity.
due to self-test exitation of ~4g
amplitude.
Figure 5.8: Spectrum of amplitude-modulated signal.
peak of driving force
peak of the offset...
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Tài liệu Design And Simulation Of A Cmos-Mems Accelerometer doc
Ngày tải lên :
22/12/2013, 08:16
... diagram of accelerometer
digital
output
6
2. SENSING ELEMENT DESIGN
2.1 Overview
A simplified schematic of a capacitive microaccelerometer is shown in Figure 2.1. The central part
of the accelerometer ... response of the sensor
orientation with respect to gravity.
due to self-test exitation of ~4g
amplitude.
Figure 5.8: Spectrum of amplitude-modulated signal.
peak of driving force
peak of the offset ... cross-section of comb fingers
Figure 2.10: Gap capacitance of composite comb fingers
+ polysilicon
parallel plate gap
o CMOS -MEMS
Figure 2.11: Finite element analysis results of different types of gap...
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Feedback Control of MEMS to Atoms potx
Ngày tải lên :
05/03/2014, 11:20
... agglomeration (merging of two particles into
one), breakage (division of one particle to two) as well as nucleation of particles of
size r ≥0 and particle feed and removal. The rate of change of the continuous-phase
variables ... (e.g., a MEMS accelerometer) . Other examples of micro-
and nanosystems include nanomechanical resonators, cell micromanipulators, and
nanofabrication tools. Clearly this is a diverse group of systems, ... is
the subject of Chaps. 7 through 9. Position control of MEMS actuators is presented
in Chap. 7, closed-loop operation of precision MEMS gyroscopes is covered in
Chap. 8, and the control of particle...
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Báo cáo "FABRICATION OF HIGH-ASPECT-RATIO MICRO STRUCTURES USING UV-LIGA TECHNOLOGY " docx
Ngày tải lên :
05/03/2014, 14:20
... work.
Reference
1. Marc Madou, Fundamentals of Microfabrication. CRC Press, 1997.
2. Chien-Hung Ho and Wensyang Hsu. Experimental Investigation of an
Embedded Root Method for Stripping SU-8 ...
SU8-50
ldNi
nickel sulfamate electrolyte. The value of applied current density was in the range
of 1-10ASD. Temperature of 52
o
C and pressure of 4Kg/cm
2
would help to make a
better interface ... removal of SU8 after electroplating, the root technique and the
selection of right ratio between SU8 mold and nickel structure thicknesses have
been implemented.
The evaluated temperature of 52
o
C...
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Báo cáo khoa học: Use of biomolecular templates for the fabrication of metal nanowires ppt
Ngày tải lên :
16/03/2014, 12:20
... application of these wires was recently
demonstrated for the fabrication of electrodes for thin
lithium-ion batteries [38]. The binding of gold to the
viruses followed by reduction of the cobalt ... formation
of ordered metallic assemblies at the nano-scale have
involved the strepavidin protein array of a 2D array of
biotinylated DNA, followed by metallization of the
array [17].
Use of the ... D (2005) Structure of the cross-
beta spine of amyloid-like fibrils. Nature 435, 773–778.
25 Inouye H, Sharma D, Goux WJ & Kirschner DA
(2006) Structure of core domain of fibril-forming
PHF...
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Fabrication of a porous polyimide membrane using a silicon nanowire array as a template
Ngày tải lên :
16/03/2014, 15:10
... Fabrication of a porous polyimide membrane using a silicon nanowire array
as a template
Woong Kim
⁎
, Myung-Ki Lee
Department of Materials Science and Engineering, ... polyimide membr ane intact,
XeF
2
etching was c arried out over 5 0–200 cy cles of exposure t o 4 Torr of
XeF
2
and 2 Torr of N
2
for 60 s . Polyimide membr anes were e ither
detached from silicon ... be adjusted by simply altering the amount of solution
applied. About 5–10 μl of polyimide solution was found to
be appropriate for a silicon substrate of 0.5 by 0.5 cm. Substrates
treated with...
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fabrication of free standing anodic titanium
Ngày tải lên :
19/03/2014, 16:48
... Publishers
All rights reserved
Printed in the United States of America
Journal of
Nanoscience and Nanotechnology
Vol. 10, 4259–4265, 2010
Fabrication of Free Standing Anodic Titanium
Oxide Membranes with ... morphology of the top-
surface TiO
2
membrane. The image clearly reveals that the
entire surface of the ATO layer is covered with a layer
of nanowires, which is attributed to the long time split of
the ... (anodization
∗
Author to whom correspondence should be addressed.
of a Ti sheet). Typically, the template-directed synthesis
method involves the fabrication of a nanoporous template,
backfilling with the TiO
2
precursors,...
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fabrication of nanowires of multicomponent oxides review of recent advances
Ngày tải lên :
19/03/2014, 16:48
... the preparation of ordered array of multicomponent
nanowires.
The basis of sol–gel processing is the hydrolysis of a
solution of precursor molecules to obtain first a suspension
of colloidal particles ... few highlights of vapor phase
synthesis. A detailed discussion on this topic is not within
the scope of this paper.
The demonstration of growth of single crystalline
nanowires of numerous semiconducting ... the growth of Bi
2
S
3
nanorods by
microwave irradiation of formaldehyde solution of bismuth
nitrate and thiorea through the formation of bismuth thiorea
complexes [91]. Nanostructures of CuS including...
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fabrication of nanomaterials using porous alumina templates
Ngày tải lên :
19/03/2014, 16:48
... oxidation of aluminum by means of such
a self-organization method, yielding highly ordered arrays of nanoholes several hundreds down to several tens
of nanometers in size. This paper is an overview of ... Tempera-
ture and size dependence of magnetic properties show
no indication of superparamagnetic effects down to a
wire diameter of 9 nm. For a nanomagnet array density
of above 1 terabit/in
2
, a ... redeposition of nonvolatile mate-
rials on the sidewall of nanoholes. For instance, the
initial porous alumina hole size of 45 nm was reduced
to 13 nm Si holes when a higher aspect ratio of porous
alumina...
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novel fabrication of nanoporous alumina membrane microtubes
Ngày tải lên :
20/03/2014, 13:05
... the
thickness of the porous nanochannels from a hundred of
nanometers to a hundred of micrometers.
1,4
Such easy
control ability of the pore diameter and the thickness makes
the PAA one of the interesting ... anodization of the aluminum templates
of
v
arious shapes and dimensions, (b) etching of the initially produc
ed
a
lumina layer, (c) second anodization of the aluminum template
s,
a
nd (d) formation of ... nanochannel
array with an average pore diameter of 60 nm and a pore
density of ~1 ì 10
10
/cm
2
in all directions.
Anodization of the aluminum wire with a diameter of 1
mm also produced the transparent...
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one - step fabrication of a polyaniline nanofiber vapor sensor
Ngày tải lên :
20/03/2014, 13:05
... type of vapor and sensor used. Shown
in Fig. 3 are the responses of the sensors to chloroform vapor, plot-
ted in terms of the normalized current (I
norm
(t), current/current at
the beginning of ... vapor of interest (i.e., I
∞
= I
norm
(t) when t= ∞). The results
of the fitting to the model are also shown in the curves. In the
case of chloroform, the I
∞
is rather high. The results of the ... the presence of chloroform. The sensitivity of PANI to chloroform
was similar to that previously reported for bulk PANI [19].
The response to toluene was greater than that for chloroform.
Toluene,...
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wet process-based fabrication of wo3 thin film for no2 detection
Ngày tải lên :
20/03/2014, 13:11
... 107–111
Wet process-based fabrication of WO
3
thin film for NO
2
detection
Yong-Gyu Choi, Go Sakai, Kengo Shimanoe, Noboru Yamazoe
∗
Department of Materials Science, Faculty of Engineering Sciences, ... obtained was 450 nm in mean thickness. The film was a slim pack of square
plates, each of which was a stack of thin lamellar crystals of WO
3
. The device was sensitive enough to detect 50 ppb NO
2
in ... of crystalline WO
3
·2H
2
O of about 30 nm in size.
The content of WO
3
·2H
2
O in the sol was set to be 5mass%
on the WO
3
basis unless otherwise noted. PEG with aver-
age molecular weight of...
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Báo cáo " Research, design and fabrication of a high-power combiner using Wilkinson bridge of L-band " pptx
Ngày tải lên :
22/03/2014, 11:20
...
200W
200W
VNU Journal of Science, Mathematics - Physics 25 (2009) 185-189
185
Research, design and fabrication of a high-power combiner
using Wilkinson bridge of L-band
Dang Thi Thanh ... Duong
2
1
Faculty of Physics, College of Science, Vietnam National University Hanoi
2
Research Center Electronics and Telecommunication, College of Technology, VNU
3
Department of Science and ... Journal of Science, Mathematics - Physics 25 (2009) 185-189
186
Generally, Wilkinson power divider can have any number of output ports. A basic three port
Wilkinson power divider of port...
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fabrication of znscupva nanocomposite electroluminescence devices for flat panel displays
Ngày tải lên :
28/04/2014, 10:50
... most of the samples are cubic in nature. The
broadening of peaks is indicative of small particle size.
The sizes have been computed busing Dubey-Scherrer
formula and obtained in the range of ... variation of EL
brightness by increasing the loading in the nanocomposite
(ZnS:Cu/PVA). It can be seen that at higher voltages,
saturation of EL intensity occurs for lower concentrations
of nanocrystalline ...
Fabrication of ZnS:Cu/PVA nanocomposite
electroluminescence devices for flat panel
displays
Sakshi Sahare
1
, S. J. Dhoble
2*
, Pranav Singh
1
, Meera Ramrakhiani
1
1
Department of...
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