DESIGN, CONTROL, AND APPLICATION OF PIEZOELECTRIC ACTUATOR External-Sensing and Self-Sensing Actuator ANDI SUDJANA PUTRA NATIONAL UNIVERSITY OF SINGAPORE 2008 DESIGN, CONTROL, AND APPLICATION OF PIEZOELECTRIC ACTUATOR External-Sensing and Self-Sensing Actuator ANDI SUDJANA PUTRA (B.Eng., Brawijaya University, M.T.D., National University of Singapore) A THESIS SUBMITTED FOR THE DEGREE OF DOCTOR OF PHILOSOPHY DEPARTMENT OF ELECTRICAL AND COMPUTER ENGINEERING NATIONAL UNIVERSITY OF SINGAPORE 2008 Acknowledgements I would like to express my sincere appreciation to all who have helped me during my candidature; without whom my study here would have been very much different First and foremost, I thank my supervisors: Associate Professor Tan Kok Kiong and Associate Professor Sanjib Kumar Panda, who have provided invaluable guidance and suggestion, as well as inspiring discussions With their enthusiasm and efforts in explaining things clearly, they have made research a fun and fruitful activity I would have been lost without their direction I would also like to thank the National University of Singapore for providing me with scholarship and research support; without which it would have been impossible to finish my study here It is difficult to overstate my gratitude to the officers and students in Mechatronics and Automation Laboratory, who have also become my friends Dr Huang Sunan, Dr Tang Kok Zuea, Dr Zhao Shao, Dr Teo Chek Sing, and Mr Tan Chee Siong have always been very supportive and encouraging through the easy and difficult time during my research I am indebted to many more colleagues in Faculty of Engineering and Faculty of Medicine, whose names, regrettably, I cannot mention all here Finally, my deepest gratitude goes to my family and close friends I dedicate this thesis to you i Contents Acknowledgements i Summary viii List of Tables ix List of Figures xiii Introduction 1.1 Motivation 1.2 Research Objectives 1.3 Scope of the Thesis 1.4 Outline Literature Review and Background 10 2.1 Piezoelectricity 10 2.2 Nonlinearity in Piezoelectric Actuator 15 2.3 Design of Piezoelectric Actuator with Mechatronic Approach 20 2.4 Control Issues in Relation to Piezoelectricity 24 2.5 Mechanical Link for High-Precision Actuators 27 2.6 Adaptive Control 33 Design, Modeling, and Control of External-Sensing Piezoelectric Actuator 36 ii 3.1 Introduction 37 3.2 Target Application: Intra-Cytoplasmic Sperm Injection (ICSI) 42 3.2.1 General Procedure 43 3.2.2 Difficulties with Conventional/Manual ICSI 46 3.2.3 Current Design of Piezo-Assisted ICSI 48 3.3 Piezoelectric Actuator for ICSI 50 3.3.1 Linear-Reciprocating Piezoelectric Actuator 51 3.3.2 Partially-Rotating Piezoelectric Actuator 52 3.4 System Models 56 3.4.1 Linear-Reciprocating Piezoelectric Actuator 57 3.4.2 Partially-Rotating Piezoelectric Actuator 60 3.4.3 Dynamics of the Injection Needle 65 3.5 Controller Design 66 3.6 Results 71 3.6.1 Linear-Reciprocating Piezoelectric Actuator 71 3.6.2 Partially-Rotating Piezoelectric Actuator 75 3.6.3 Comparison between Linear-Reciprocating and Partially-Rotating Piezoelectric Actuator 78 ICSI Experiments and Cell Development 81 3.7 Future Application with Iterative Learning Control 83 3.6.4 3.7.1 Modeling of the Actuator 84 3.7.2 Compensation with a Regulated Chatter 88 3.7.3 Approximate Error Convergence Analysis 92 3.7.4 Simulation Study 95 3.7.5 Experimental Results 96 3.8 Conclusion 98 Design, Modeling, and Control of Self-Sensing Piezoelectric Actuator 107 iii 4.1 Introduction 108 4.2 Target Application Microdispensing System 111 4.2.1 Working Principle of Microdispensing System 112 4.2.2 Microdispensing System with X-Y Table 114 4.2.3 Design Consideration 114 4.3 Self-Sensing Actuation 116 4.3.1 SSA Measurement 4.3.2 Error Analysis 120 4.4 Adaptive Control Scheme 117 123 4.4.1 System Model 123 4.4.2 Design of Controller 124 4.5 Experiment, Results, and Discussions 125 4.5.1 Experiment 126 4.5.2 Comparison between SSA and ESA 127 4.5.3 Comparison between PID with Adaptive Control and PID-Only Control 129 4.5.4 Results with Microdispensing System 129 4.6 Future Application 129 4.6.1 Working Principle 132 4.6.2 Device Description 135 4.6.3 Design of the Device 137 4.7 Conclusion 139 Conclusions 141 5.1 Contribution 141 5.2 Recommendation for Future Work 143 Bibliography 145 Author’s Publications 160 iv Summary This thesis discusses the design, modeling, and control of piezoelectric actuator Two major contributions are reported in the thesis: design of external-sensing actuator and design of self-sensing actuator The major contribution of this thesis is that it offers a mechatronic approach in designing piezoelectric actuators With the emergence of nanotechnology and along with the trend of product miniaturization, piezoelectric actuators are gaining increasing attention in the industry as well as in research community; and this emphasizes the importance of discussing this type of actuators in the field of research Piezoelectric actuator exhibits nonlinear characteristics and, therefore, control of piezoelectric actuators constitute an integral part of it and is therefore an important subject, especially in the face of the high nonlinearity of piezoelectric actuators The first major portions of this thesis are the design, modeling, and control of external-sensing actuator, with application in intra-cytoplasmic sperm injection (ICSI) The technique of external-sensing actuation (ESA) is the usual, ubiquitous technique used in closed-loop control systems, where a separate, independent sensor is used to provide information about the sensing variables to allow the implementation of feedback control The main discussion issues are the design steps of the proposed actuator and the control algorithm used to control the proposed actuator The application area considered here, ICSI, is a biomedical application to perform an artificial fertilization In this application, the sperm is to be injected into an oocyte (egg cell) so as to result in fertilization A partially-rotating piezoelectric actuator is proposed in this application to provide an injection of the sperm into an oocyte v with minimum damage inflicted to the oocyte A linear-reciprocating piezoelectric actuator is also presented as an alternative approach to accomplish the same task As far as the application is concerned, the aim is to achieve blastocyst level of cell development with high survival rate The second major contribution of this thesis are the design, modeling, and control of self-sensing actuator, with application in a microdispensing system The technique of self-sensing actuation (SSA) is the implementation of a single component to function as both an actuator and a sensor This technique is not novel; in fact it has been around since 1990s and has been employed in several structures for vibration suppression This thesis proposes a discussion in the comparison between ESA and SSA technique, especially in which condition one technique is better than the other, with detailed study for a system whose reference signal is a switching trajectory Microdispensing system, the application area considered here, is a type of manufacturing process that dispenses liquid in a minute volume and in a precise manner, typically of the order of microliter In this thesis, a contacting and a non-contacting method of liquid dispensing are discussed; one is based on adhesive force principle and the other one is based on mass inertia principle The aim is to produce patterns of droplets with uniform dimension In addition to focusing on the comparison between ESA and SSA, the control system and design of the microdispensing system are also discussed In the two systems discussed in both cases, adaptive controllers are employed to overcome the adverse effect of nonlinearity inherited by the piezoelectric actuator The control system proposed in this thesis follows a scenario of combining a simple, linear controller to perform major task of trajectory tracking with a more complicated, non-linear controller to overcome the nonlinearity of the piezoelectric actuator Adaptive controller is chosen because of its ability to overcome nonlinearity without high computational requirements and also because it does not require repetitive reference signal, among other things Adaptive controller is mainly used here to overcome the hysteresis of the actuator, although it will also overcome other vi types of nonlinearity to a certain degree As an additional note, the linear controller used in this thesis is a proportional-integral-differential (PID) controller In applying the principle of mechatronic approach, especially in designing, the application area of the actuator has been considered since the initial stage of the design, along with the general structure of the actuator and the overall control system The aim is to arrive at a synergistic system in executing the prescribed tasks The synergy between different parts of the system is an important feature in the design of the proposed devices presented in this thesis because of the high-precision requirement of the applications of the said devices The modeling of the actuator is aimed at helping to design a satisfactory controller; especially the adaptive controller The focus is, therefore, not so much on achieving an accurate model, but in achieving a viable model that is sufficiently accurate, with low computational requirements This thesis does not aim to propose a novel model of piezoelectric actuator or its nonlinearity Rather, this thesis presents the use of the existing models with necessary modifications to suit the applications at hand Experiments have been conducted with satisfactory test results obtained The proposed devices have been developed and then implemented in the applications In the ESA contribution, the piezoelectric actuators for ICSI application have been able to increase the survival rates from 58 % to 76 % Furthermore, the self-designed partially-rotating actuator has reduced the vibration of the oocyte from 1.1943 µm to 0.5154 µm In the SSA contribution, SSA technique has reduced the RMS error from 53.47 µm to 24.26 µm Although this thesis is submitted for the field of electrical engineering, and more specifically in control engineering, the discussions throughout this thesis are not limited to the traditional topics of control system It also includes mechanical design, which is an integral part in any mechatronic system as the ones designed in this thesis Furthermore, a rather in-depth description of the application areas is also presented, i.e intra-cytoplasmic sperm injection (ICSI) and microdispensing technology The vii description is presented in relation to designing the proposed devices; from mechanical, electrical, and control perspective, as well as system integration of these three components A separate chapter is dedicated to compile the various aspects required in designing 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vol 13, pp 741-757, 1987 159 Author’s Publications Journal Publications A.S Putra, S Huang, K.K Tan, S.K Panda, and T.H Lee, “Self-sensing actuation with adaptive control in applications with switching trajectory”, IEEE/ASME Transactions on Mechatronics, vol 13(1), pp 104-111, February 2008 A.S Putra, S Huang, K.K Tan, S.K Panda, and T.H Lee, “Design, modeling, and control of piezoelectric actuators for intracytoplasmic sperm injection”, IEEE Transactions on Control Systems Technology, vol 15(5), pp 879-890, September 2007 A.S Putra, S Huang, K.K Tan, S.K Panda, and T.H Lee, “Piezoelectric actuator for intra-cytoplasmic sperm injection”, Recent Patents on Engineering, vol 1(2), pp 147-152, June 2007 S Zhao, A.S Putra, K.K Tan, S.K Panda, and T.H Lee, “Intelligent compensation of friction, ripple, and hysteresis via a regulated chatter”, ISA Transactions, vol 45(3), pp 419-433, July 2006 160 Conference Publications A.S Putra, S Huang, K.K Tan, S.C Ng, S.K Panda, T.H Lee, and A Tay, “Piezo-assisted intra-cytoplasmic sperm injection: A comparative study of two penetration techniques”, IEEE International Conference on Control Applications, pp 13-17, October 2007 A.S Putra, S Huang, K.K Tan, S.K Panda, and T.H Lee, “Partially-rotating piezoelectric actuator to assist cell penetration in intra-cytoplasmic sperm injection”, IEEE 32nd Annual Conference on Industrial Electronics, pp 2985-2990, November 2006 K.K Tan and A.S Putra, “Microdispensing system for industrial applications”, IEEE International Conference on Industrial Technology, pp 1186-1191, December 2005 A.S Putra, K.K Tan, S.K Panda, S Huang, and S Zhao, “Development of partially-rotating piezoelectric actuators in an intra-cytoplasmic sperm injection installation”, BioNano: The Next Frontier, pp 67-68, December 2005 K.K Tan, S Huang, T.H Lee, A.S Putra, C.S Teo, and C.W de Silva, “Collaborative research in fault detection and diagnosis”, International Symposium on Collaborative Research in Applied Science, pp 142-148, October 2005 A.S Putra and K.K Tan, “Development of a low cost microdispensing system based on mass inertia principle”, Collaborative Workshop in Energy, Environment, and the New Trend in Mechanical Engineering, pp 193-205, 2004 161 Book Chapter C.W de Silva (editor), “Mechatronic Systems: Devices, Design, Control, Operation, and Monitoring”, K.K Tan, S Huang, T.H Lee, A.S Putra, C.S Teo, and C.W de Silva, “Chapter 25: Fault Detection and Diagnosis in Mechatronic System”, CRC Press, Taylor & Francis Group, Boca Raton, Fl., 2008 162 .. .DESIGN, CONTROL, AND APPLICATION OF PIEZOELECTRIC ACTUATOR External- Sensing and Self -Sensing Actuator ANDI SUDJANA PUTRA (B.Eng., Brawijaya University, M.T.D., National University of Singapore)... discusses the design, modeling, and control of piezoelectric actuator Two major contributions are reported in the thesis: design of external- sensing actuator and design of self -sensing actuator The... especially in the face of the high nonlinearity of piezoelectric actuators The first major portions of this thesis are the design, modeling, and control of external- sensing actuator, with application in