STUDY AND PERFORMANCE ENHANCEMENT OF FAST TOOL SERVO DIAMOND TURNING OF MICRO-STRUCTURED SURFACES YU DEPING (M. Tech, Sichuan University) A THESIS SUBMITTED FOR THE DEGREE OF DOCTOR OF PHILOSOPHY DEPARTMENT OF MECHANICAL ENGINNERING NATIONAL UNIVERSITY OF SINGAPORE 2011 Acknowledgements i Acknowledgements Firstly, I would like to express my deepest gratitude to my supervisors, Professor Wong Yoke San and Associate Professor Hong Geok Soon for their continuous supervision, wise and valuable guidance, constructive criticisms, immense supports and inspirations, and enthusiastic encouragement throughout the entire project. Secondly, I want to thank Mr. Tan Choon Huat, Mr. Neo Ken Soon, Mr. Nelson, Mr. Lim Soon Cheong, Mr. Wong Chian Loong, Mr. Ho Yan Chee and all other the technicians at Advanced Manufacturing Laboratory for their time, support and suggestions. Thanks to the technical staff of Control and Mechatronics Laboratory for their support and facilities provided during the period of my stay in NUS. Thirdly, I would also like to thank the seniors and colleagues for the discussions, encouragement and a pleasant journey of research, in particular Dr. Gan Sze Wei, Dr. Kommisetti V R S Manyam, Dr. Zhu Kunpeng, Dr. Tanveer Saleh, Dr. Liu Kui, Dr. Chandra Nath, Mr. Huang Sheng, Mr. Shaw Kah Chuan, Ms. Wu Yue, Ms. Wang Qing, Ms. Wu Jiayun, Ms. Zhong Xin, Ms. Wu Zimei, Mr. Yang Jianbo, Mr. Yang Tao, Mr. Feng Xiaobing, Mr. Zhang Xinquan and others in the Control and Mechatronics Lab. Fourthly, I also thank National University of Singapore (NUS) for providing me a research scholarship, excellent research facilities and abundant books and journals at the library. National University of Singapore NUS Acknowledgements ii Finally, I would like to show my deepest appreciation to my parents, my brother and sisters, my girlfriend and her parents. Without their deep love and support, I cannot smoothly complete the PhD study. National University of Singapore NUS Table of Contents iii Table of Contents Acknowledgements……………………………………………………………i Table of Contents………………………………………………………… . iii Summary……………………………………………………………………viii List of Tables…………………………………………………………………xi List of Figures………………………………………………………… .xii Nomenclature……………………………………………………………… xx Chapter 1Introduction……………………………………………………….1 1.1 Background . 1.2 Problem statement . 1.3 Research objectives and scope of work . 1.4 Thesis organization . Chapter Literature Review……………………………………………….12 2.1 Introduction . 12 2.2 Methods for fabricating micro-structured surfaces . 13 2.3 FTS diamond turning 15 2.4 Tool path generation and geometric simulation for FTS diamond turning 22 2.5 Tracking control for the FTS . 23 2.6 Machining mechanism of the FTS diamond turning . 26 2.7 Surface characterization of the micro-structured surfaces 29 2.8 Conclusions . 31 National University of Singapore NUS Table of Contents iv Chapter FTS Diamond Turning Machine………………………………32 3.1 Introduction . 32 3.2 Working principle . 32 3.3 Design of an FTS diamond turning machine 40 3.3.1 Controller configuration . 40 3.3.2 Design criteria 43 3.3.3 Designed system description 48 3.4 Experiments . 49 3.4.1 Machining of MLA 49 3.4.2 Machining of SWX 49 3.5 Conclusions . 52 Chapter Tool Path Generation and Optimization for FTS Diamond Turning of Micro-structured Surfaces…………………………………….53 4.1 Introduction . 53 4.2 Tool path generation for FTS diamond turning 53 4.3 Tool path optimization 59 4.3.1 Prediction of the machined surface quality 59 4.3.2 Tool nose radius effect and methods for its compensation 64 4.3.3 Optimal selection of machining parameters 69 4.4 Experiments and discussion 77 4.4.1 Effect of the machining parameters . 77 4.4.2 Fabrication of a sample micro-structured surfaces 82 4.4.3 Fabrication of picture image 84 4.5 Conclusions . 86 National University of Singapore NUS Table of Contents v Chapter Profile Error Compensation in FTS Diamond Turning of Micro-structured Surfaces…………………………………………………88 5.1 Introduction . 88 5.2 Analysis of the component errors 88 5.2.1 Sliding error . 88 5.2.2 Dynamic error 89 5.3 Compensation of the sliding-induced profile error . 91 5.3.1 Indirect measurement of the sliding error 91 5.3.2 Tool path modification for compensating the sliding-induced profile error 94 5.4 Compensation of the dynamics-induced profile error . 94 5.4.1 Modeling of the FTS 95 5.4.2 Controller design and analysis . 98 5.4.3 Tool path modification for compensating the FTS dynamics- induced profile error 104 5.5 Machining experiments and discussions . 105 5.5.1 Compensation of the sliding error 105 5.5.2 FTS dynamics effect and its compensation . 107 5.5.3 FTS dynamics effect on machining micro-lens array 110 5.6 Conclusions . 113 Chapter Machining Mechanism of FTS Diamond Turning………….115 6.1 Introduction . 115 6.2 Surface formation 115 6.3 FTS diamond turning of micro-structured surfaces on brittle materials 120 National University of Singapore NUS Table of Contents vi 6.3.1 Machining model . 120 6.3.2 Determination of the critical depth of cut 122 6.3.3 Determination of the subsurface damage depth . 124 6.3.4 Determination of the maximum feedrate . 129 6.4 Experiments and discussion 130 6.4.1 Experimental settings . 130 6.4.2 Verification of DRAM . 132 6.4.3 Machining of sinusoidal wave along radial direction 136 6.4.4 Machining micro-lens array . 139 6.5 Conclusions . 142 Chapter An Automatic Form Error Evaluation Method for Characterizing Micro-structured Surfaces………………………………144 7.1 Introduction . 144 7.2 Automatic form error evaluation method 145 7.2.1 Data acquisition, conversion and pre-processing . 147 7.2.2 Coarse registration . 150 7.2.3 Fine registration . 160 7.2.4 Parameters for characterizing the form error . 161 7.3 Experimental verification and performance evaluation 163 7.3.1 Accuracy evaluation by computer simulation 163 7.3.2 Characterization of real micro-structured surfaces 167 7.4 Conclusions . 169 Chapter Conclusions and Recommendations………………………… 171 8.1 Conclusions . 171 National University of Singapore NUS Table of Contents 8.2 vii Recommendation for future work . 176 List of Publications……………………………………………………… .179 References………………………………………………………………….181 National University of Singapore NUS Summary viii Summary Ultraprecision micro-structured surfaces, such as micro-lens arrays, sinusoidal grid, Fresnel lenses, pyramids array, polygon mirrors, aspheric lenses, multi-focal lenses, have been increasingly used in a range of industries such as optics, semiconductor, precision die and mold, biomedical engineering, etc. Fast tool servo (FTS) diamond turning is a potential process for precision machining of complex micro-structured surfaces with wavelength above tens of microns, which is difficult to be achieved economically by other processes. However, most of the researches in this area have focused on the development of the FTS to obtain higher performance and rarely studied it as a process for ultra-precision machining. This thesis presents the study and performance enhancement of FTS diamond turning of micro-structured surfaces for the best machined surface quality, resulting in a system which is able to select optimal cutting conditions and tool geometry, select the FTS to satisfy the chosen performance indices, generate tool path commands for machining, modify the commands to achieve high tracking performance and characterize the machined surface when given a desired micro-structured surface and material. Firstly, quantitative indices are identified and chosen to indicate the ability of the FTS and the complexity of the surface, and are used to establish design criteria, with which a suitable FTS approach can be determined for a given micro-structured surface. Secondly, the tool path generation and optimization for FTS diamond turning are systematically studied with the aim to obtain high precision form and nanometric surface finish, resulting in the development of a simulation system which is able to predict the theoretical machined surface quality and National University of Singapore NUS Summary ix optimally select machining parameters and tool geometry. Experiments have been conducted to show the effect of the machining parameters and validate the simulation system. Thirdly, the component errors that cause profile error to the machined micro-structured surface are identified and methods for compensating their effects are proposed. Sliding error and dynamic error have been identified as two important causes of the profile errors in FTS diamond turning of microstructured surfaces. Experiments on facing, machining SWR, SWX, and MLA show that the profile errors could be greatly reduced. Fourthly, FTS diamond turning of micro-structured surfaces on brittle materials has been investigated. A machining model has been developed for it to ensure ductile regime machining of brittle materials, with which an iterative numerical method is proposed to determine the maximum feedrate (fm) for producing crack-free micro-structured surfaces. Experiments on machining of SWR and MLA have validated the machining model and the method for determining fm. Fifthly, an automatic form error evaluation method (AFEEM) is proposed to characterize the surface quality of the machined micro-structured surfaces. The AFEEM has been evaluated using simulated data and shown to possess sub-nanometer accuracy for surface characterization. The AFEEM has also been further verified using the measurement data of a micro-lens array. Comparing the areal error maps obtained by AFEEM and the method used in commercially available measurement instrumentation, it can be seen that the former reflects the actual form deviation of the machined surface and thus provides more information in characterizing the form error. National University of Singapore NUS List of publications 180 [8] D.P. Yu, S.W. Gan, Y.S. Wong, M. Rahman, G.S. Hong, Design of a Fast tool servo based Diamond Turning Machine for Fabricating Microstructured Surfaces, Key Engineering Materials, 443(2010) 669-674. [9] D.P. Yu, Y.S. Wong, G.S. Hong, Automatic Surface Characterization for Micro-Structured Surfaces Fabricated by Fast Tool Servo Diamond Turning, Key Engineering Materials, 447-448(2010) 534-538. Conference papers [1] X. Zhong, D.P. Yu, Y.S. Wong, H. Cheng, W.C. Foong, Towards Automated Pose Invariant 3D Dental Biometrics, International Joint Conference on Biometrics (IJCB), Washington, DC, 2011, 1-7. [2] D.P. Yu, S.W. Gan, Y.S. Wong, M. 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The machining mechanism of the FTS diamond turning of microstructured surfaces on ductile and brittle material needs to be better understood 4 There is a lack of a suitable surface characterization method for the micro- structured surfaces The overall aim of this research is to study and enhance the performance of FTS diamond turning process for fabricating micro- structured surfaces by building a system... capability and performance of FTS diamond turning for the fabrication of micro- structured surfaces Several researchers integrated the FTS developed into a diamond turning machine in order to fabricate the micro- structured surfaces [8, 14, 31] Dow et al [14] designed a controller architecture for integrating an FTS into a diamond turning machine, and achieved machining of non-rotationally symmetric surfaces. .. conventional diamond turning machine In addition, quantitative indices are established to indicate the ability of the FTS and the complexity of the surface A set of design criteria is established to determine suitable FTS for a given micro- structured surface Chapter 4 presents the tool path generation and optimization for FTS diamond turning micro- structured surfaces The tool path generation for microstructured... analysis of surface registration for micro- structured surfaces 166 National University of Singapore NUS List of Figures xii List of Figures Figure 1.1 Research framework and objectives 11 Figure 2.1 Methods for fabricating micro- structured surfaces 13 Figure 2.2 Conventional configuration of diamond turning with FTS 20 Figure 2.3 An interference microscope image of a portion of the... developing different types of FTS for higher performance; however, relatively few studies have focused on performance enhancement of the FTS diamond turning process for the best machined surface quality It is clear that: 1 There are few studies on geometric simulation and tool path generation for the FTS diamond turning of micro- structured surfaces 2 The influence of the FTS dynamics needs to be minimized... sub-micrometers However, it is not easy and cost effective for these methods to fabricate complex profiles with wavelength in the range of tens to hundreds of micrometers [3, 8] An alternative fabrication method for these micro- structured surfaces is ultra-precision machining, including diamond turning, diamond flycutting and single-flute contour milling [3] Among them, diamond turning is the focus of. .. because the diamond tool is maintained at an essentially constant position relative to the machined part within each revolution [9] To machine any micro- structured surfaces, an active tool servo is needed to move the diamond tool rapidly within each revolution of the workpiece This tool servo with rapid movement capability is called Fast Tool Servo (FTS), which was introduced by Patterson and Magrab... Overall, the study and the developed performance enhancement methods have demonstrated that a properly designed and developed FTS diamond turning can be a feasible and efficient method for producing precision and complex micro- structured surfaces In addition, a comprehensive computerbased approach has also been developed to best select the cutting conditions, tool geometry and type of FTS, and generate... Simulation of the micro- lens array; (b) Photo of the machined micro- lens array; (c) Response of the FTS for workpiece III; (d) Response of the FTS for workpiece IV; (e) Areal error map of a lens on workpiece III; (f) Areal error map of a lens on workpiece IV 112 Figure 6.1 Working principle for FTS diamond turning of MLA 116 Figure 6.2 Visualization for the surface formation of FTS diamond turning of. .. previous research studies on FTS and its application to produce micro- structured surfaces Literature on tool path generation and geometric simulation, profile error compensation, machining mechanism and surface characterization are reviewed in detail to highlight the problems to be solved Chapter 3 presents the working principle of FTS diamond turning of microstructured surfaces An incorporated controller . STUDY AND PERFORMANCE ENHANCEMENT OF FAST TOOL SERVO DIAMOND TURNING OF MICRO- STRUCTURED SURFACES YU DEPING (M. Tech, Sichuan University). of the FTS to obtain higher performance and rarely studied it as a process for ultra-precision machining. This thesis presents the study and performance enhancement of FTS diamond turning of. error and dynamic error have been identified as two important causes of the profile errors in FTS diamond turning of micro- structured surfaces. Experiments on facing, machining SWR, SWX, and