modeling and simulation of the capacitive acceleration sensor

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Từ khóa liên quan

Mục lục

1.3 MEMS Modeling and Simulation

2.2.1 Position Measurement with Capacitance

3.1 Overview o f SUGAR

3.2.1 A simple example of the MEMS structure

3.2.5 Gap Model with Contact Forces

3.3 Simulation Program based on SUGAR

3.4.2 Differential Capacitive Accelerometer with a Single Beam

3.4.3 Differential Capacitive Accelerometer with Two Symmetric Beams

3.4.4 Two Parallel Beams Accelerometer

3.4.5 Four Symmetric Beams Accelerometer

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