[...]... microelectromechanical systems (MEMS) : nanoscience and technology, carbon nanotubes, microstereolithography smart materials and structures; sonar, radar, microwave, and optically absorbing composite media; EMI, RFI, EMP, and EMF shielding materials; piezoelectric, chiral, ferrite, and polymer composites and conducting polymers; and UV conformal coatings, tunable ceramics materials and substrates, and electronically... Interaction and the Editor-in-Chief of the Journal of Smart Materials and Structures published by the Institute of Physics, UK He has authored more than 400 technical papers and six books He has eight patents pertinent to conducting polymers, smart structures and smart antennas, and phase shifters Osama O Awadelkarim is a Professor of Engineering Science and Mechanics at the Pennsylvania State University Dr Awadelkarim. .. topic of interdigitated transducers (IDTs) and their use in microsensors and MEMS devices The present MEMS market is relatively staid and mainly consists of some simple optical switches for the communications industry, pressure sensors, and inertia! sensors for the automotive industry, as shown in Figure 1.9 This current staidness contrasts with the potential for MEMS, which is enormous Table 1.1 is taken... perhaps, more accurately described as devices rather than as MEMS The reason Figure 1.7 Overview of microsystems technology and the elements of a MEMS chip From Fatikow and Rembold (1997) INTRODUCTION Figure 1.8 Some of the many fundamental techniques required to make MEMS devices From Fatikow and Rembold (1997) for the relatively slow emergence of a complete MEMS has been the complexity of the manufacturing... communication link and the size of its 'battery pack!' The road to practicable micromachines appears to be long and hard but the first steps toward microsensors and MEMS devices have been taken, and this book provides an overview of these initial steps REFERENCES Campbell, S A (1996) Science and Engineering of Microelectronic Fabrication, Oxford University Press, Oxford, p 536 Fatikow, S and Rembold, U... physicists, and materials scientists We have provided more than 10 appendices to aid the reader and serve as a source of reference material These appendices explain the key abbreviations and terms used in the book, provide suggestions for further reading, give tables of the properties of materials important in microsensors and MEMS, and finally provide a list of the web sites of major journals and active... Wireless Readout 14.6 Hybrid Accelerometers and Gyroscopes 14.7 Concluding Remarks References 397 397 398 399 401 402 402 403 404 405 406 408 412 414 416 416 15 Smart Sensors and MEMS 15.1 Introduction 15.2 Smart Sensors 15.3 MEMS Devices 15.4 Concluding Remarks References 417 417 421 434 442 443 XI Appendices A List of Abbreviations 445 B List of Symbols and Prefixes 449 C List of Some Important Terms... System Planning Corporation Market Survey (1999) Devices and applications 1996 Ink-jet printers, mass-flow sensors, biolab chips: microfluidics 400-500 Pressure sensors: automotive, medical, and industrial 390-760 350-540 Accelerometers and gyroscopes: automotive and aerospace 25-40 Optical switches and displays: photonics and communications 510-1050 Other devices such as microrelays, sensors, disk heads... glasses and plastics, and we are now seeing the emergence of chips in biotechnology that include microfluidic systems (Chapter 15), which can truly be regarded as MEMS devices 1.4 EMERGENCE OF MICROMACHINES Natural evolution will then lead to MEMS devices that move around by themselves Such chips are commonly referred to as micromachines and the concepts of microplanes, microrobots, microcars, and microsubmarines... certain acoustic microsensors, and INTRODUCTION -10 -9 -8 Dimension of object – 7 - 6 - 5 - 4 -3 -2 A Urn IR Visible -1 0 mm cm m Radio waves • H Ultrasound H Sensors Nano- Micromachines k Inm k, 1mm 1m Figure 1.10 Dimensions of microsensors, MEMS, and micromachines; they are compared with some everyday objects The horizontal axis has a logarithmic scale Modified from Gardner (1994) MEMS devices are described . Cataloguing-in-Publication Data Gardner, J. W. (Julian W.), 1958- Microsensors, MEMS, and smart devices / Julian W. Gardner, Vijay K. Varadan. p. cm. Includes bibliographical references and index. ISBN . Accelerometers and Gyroscopes 414 14.7 Concluding Remarks 416 References 416 15 Smart Sensors and MEMS 417 15.1 Introduction 417 15.2 Smart Sensors 421 15.3 MEMS Devices 434 15.4. conducting polymers, smart structures and smart antennas, and phase shifters. Osama O. Awadelkarim is a Professor of Engineering Science and Mechanics at the Pennsylvania State University. Dr. Awadelkarim