Đang tải... (xem toàn văn)
Đây là một bài báo khoa học về dây nano silic trong lĩnh vực nghiên cứu công nghệ nano dành cho những người nghiên cứu sâu về vật lý và khoa học vật liệu.Tài liệu có thể dùng tham khảo cho sinh viên các nghành vật lý và công nghệ có đam mê về khoa học
Effect of substrate temperature on spontaneous GaN nanowire growth and optoelectronic properties A.P. Vajpeyi a,b, Ã , A. Georgakilas a,b , G. Tsiakatouras a,b , K. Tsagaraki a,b , M. Androulidaki a,b , S.J. Chua c , S. Tripathy c a Microelectronics Research Group, Department of Physics, University of Crete, P.O. Box 2208, 71003 Herakilon-Crete, Greece b Institute of Electronic Structure and Laser (IESL), FORTH, P.O. Box 2208, 71110, Herakilon-Crete, Greece c Institute of Materials Research and Engineering, A*STAR (Agency for Science, Technology, and Research), 3 Research Link, Singapore 117602, Singapore article info Article history: Received 11 July 2008 Received in revised form 2 September 2008 Accepted 3 September 2008 Available online 10 October 2008 PACS: 78.67.Lt Keywords: Plasma-assisted molecular beam epitaxy (PAMBE) GaN nanowires (NWs) abstract The catalyst-free growth and the optoelectronic properties of GaN nanowires (NWs) grown on (111) Si substrates by plasma-assisted molecular beam epitaxy have been investigated. At constant N/Ga flux ratio, the NW morphology, density and growth rate are controlled by the substrate temperature, which affects the gallium adatom diffusion length before desorption. An increase in substrate temperature results in lower growth rate and smaller diameter of NWs with lower areal density NWs. Low- temperature photoluminescence spectra at 20 K revealed that PL intensity ratio of donor-bound exciton peak (D1X at 3.470 eV) with defect-related peak (Y 2 at 3.424 eV) increased with increase in substrate temperature. Micro-Raman spectra showed that the GaN NWs are completely stress free irrespective of the growth conditions. & 2008 Elsevier B.V. All rights reserved. III-nitrides are promising semiconductor materials because of their application in optoelectronics and high-power electronic devices. One of the major problems of III-nitride materials hetroepitaxial growth is high density of threading dislocations, of the order of 10 8 –10 10 cm À2 , which adversely affect the device performance. Nanodimensional nitrides such as nanowires (NWs)/nanopillars are attractive materials for the reduction of the dislocation density. The NWs could be free of threading dislocations as their small lateral length could allow initially formed threading dislocations to move out of the crystal. The free surface at the sidewalls also permits elastic relaxation of the strain [1]. In addition to the elimination of threading dislocations, the NW geometry also allows the device dimensions to be scaled down. Different techniques such as metal-organic vapor phase epitaxy [2,3], molecular beam epitaxy (MBE) [4,5], chemical beam epitaxy [6] and laser ablation [7,8] have been used to grow a variety of semiconductor NWs with high crystalline quality. Recently, Calarco et al. [9] studied the nucleation density of MBE grown GaN NWs and their evolution in terms of growth time for a fixed set of growth parameters. It has also been reported that the GaN NW morphology is affected by the N/Ga flux ratio and the substrate temperature [10–12]. However, it is desirable to independently control the rod-like morphology of NWs in order to optimize their crystalline quality. In this paper, we report on the effect of substrate temperature on the surface morphology, density, growth rate and optoelec- tronic properties of GaN NWs spontaneously grown on n-type (111) silicon, by nitrogen radio-frequency plasma source MBE (RFMBE). The results suggest that during growth, Ga adatoms are transferred from uncovered substrate areas to the GaN NWs and the amount of transferred Ga atoms is limited by the Ga adatom residence time on the surface, which decreases as the substrate temperature increases. Photoluminescence spectra at 20 K showed that PL intensity ratio of donor-bound exciton peak (D1X) with defect-related peaks increased in the smaller diameter NWs, grown at higher substrate temperatures. The GaN NWs were grown without any external catalyst on n- type (111) silicon substrates at a constant N/Ga flux ratio of 5, using RFMBE. [13] The Si wafers were chemically cleaned [14] and then loaded into the MBE system. The Si surface oxide was removed by heating in the growth chamber at 800 1C for 10 min. Then, the plasma was turned on at 300 W with a 1.35 standard cubic centimeter per minute (sccm) nitrogen flow rate. In order to study the effect of substrate temperature on GaN NW morphol- ogy, the growth was performed at (a) 700 1C (sample A), (b) 750 1C (sample B) and (c) 800 1C (sample C) for 3 h with a Ga-limited ARTICLE IN PRESS Contents lists available at ScienceDirect journal homepage: www.elsevier.com/locate/physe Physica E 1386-9477/$ - see front matter & 2008 Elsevier B.V. All rights reserved. doi:10.1016/j.physe.2008.09.016 Ã Corresponding author. E-mail addresses: agam@physics.uoc.gr (A.P. Vajpeyi), alexandr@physics.uoc.gr (A. Georgakilas). Physica E 41 (2009) 427–430 nominal GaN growth rate of 166 nm/h. The substrate temperature was monitored by a manipulator thermocouple and the un- certainty in the substrate temperature measurement is within 1 1C. The growth experiments were monitored by in situ reflection high-energy electron diffraction (RHEED). The sample surface morphology was characterized by field-emission high-resolution scanning electron microscopy (JEOL 6700FESEM). The optical properties of the GaN NWs were investigated by low-temperature photoluminescence at 20 K (20 K PL), and Raman spectroscopy. PL spectra were recorded using 325 nm line excitation wavelength from a He–Cd laser. Micro-Raman measurements were carried out using 514.5 nm line excitations, where the scattered light was dispersed through the JY-T64000 triple monochromatic system attached to a liquid nitrogen cooled charge coupled device detector. The spatial and spectral resolution of the Raman setup is about 1.0 m m and 0.2 cm À1 , respectively. During the initial stage of the growth, the RHEED shows a rings pattern, indicating the formation of polycrystalline GaN and silicon nitride on the major part of the Si surface. The formation of amorphous silicon nitride layer has been previously reported by Kim et al. and Grandal et al. [5–15] After MBE growth of 5–15 min, the ring-like RHEED pattern gradually changed into a spotty one, indicative for the formation of (0 0 0 1)-oriented GaN NWs. The transition from a ring-like RHEED pattern to a spotty one depended on the growth temperature and N/Ga flux ratio. In general, growth at higher temperature needed longer time for the appearance of the spotty RHEED pattern, because of reduced coverage of the substrate surface by the GaN NWs at higher temperature. Fig. 1 shows the plane and cross-sectional view of the SEM images of the GaN NWs samples A, B and C grown on (111) Si, with N/Ga flux ratio kept constant at 5. SEM images revealed that nanowires density decreased from 9 Â 10 9 to 2.6 Â 10 9 cm À2 , while the average diameter of the nanowires decreased from 90 to 70 nm, when the substrate temperature was increased from 700 and 800 1C. The GaN NWs grown at lower temperature (p750 1C) exhibited a tapering morphology effect. The tapering of a NW can be evaluated by the diameter difference between the top and bottom of the individual NW. In the case of sample B, the diameter of the GaN NW changes from 50 to 75 nm when measured from bottom to top part of the NW. The sample C did not show any tapering effect. Such a tapering effect for GaN NWs grown on silicon was also reported by Meijers et al. [10]. Our results suggest that the tapering effect can be controlled by growth conditions such as substrate temperature and N/Ga flux ratio. In our experiments, the growth rate of the NWs along the [0 0 01] axis was decreased with increasing growth tempera- ture. The growth rate of the NWs grown at 700 and 750 1C was found to be 20% higher than the nominal growth rate of compact film formation, which would correspond to a NW height of 498 nm. The higher growth rate of NWs compared to a compact film suggests that Ga has redistributed to form taller nanowires with a lower area fill factor relative to a compact film. This could occur either by a substrate diffusion mechanism (at low nanowire heights) or by Ga striking the sidewalls and then diffusing to the ends (for taller nanowires). The height of the GaN NWs grown at 800 1C (sample C) was slightly lower than the nominal value, but within a possible range of experimental inaccuracies of the thickness measurements. A slight NW height reduction cannot be explained by initiation of GaN decomposition at 800 1C, since GaN could be regrown under the high-excess flux of nitrogen species, as N/Ga flux ratio of 5 was used. We believe that the reduction of the GaN NW growth rate at 800 1C is due to a reduced residence time ( t ) of Ga adatoms on the substrate surface. The diffusion length of Ga adatoms before desorption is proportional to (D t ) 1/2 , where D is the diffusion coefficient and t the residence time on the surface. When growth temperature is increased, diffusion coefficient increases but residence time is decreased and the overall effect is a reduction in the Ga adatom diffusion length before desorption. Hence less ARTICLE IN PRESS Fig. 1. Plane and cross-sectional view of SEM images of GaN NWs grown at a fixed V/III flux ratio of 5 at (a, b) 700 1C, (c, d) at 750 1C and (e, f) at 800 1C. A.P. Vajpeyi et al. / Physica E 41 (2009) 427–430428 Ga is transferred from the uncovered substrate area to the NWs. The limited supply of Ga adatoms to the apex of the NWs limits the growth rate and also reduces the tapering effect at higher growth temperature. The reduction of the Ga adatom residence time on the surface with increasing growth temperature is also consistent with the observed temperature dependence of the density of the GaN NWs. Fig. 2 presents LT-PL spectra at 20 K where all the GaN NWs samples exhibited emission peaks at 3.470 and 3.424 eV while the reference GaN film showed an emission peak at 3.466 eV. Both the GaN NWs and film showed donor–acceptor pair (DAP) band at 3.260–3.333 eV. The PL emission at 3.470 eV is associated with free exciton bound to a neutral or shallow donor (D1X) and such a PL peak was also observed by Calleja et al. [17] The PL intensity of (D1X) peak increased with increase in growth temperature. The slight reduction in PL intensity of sample C may be due to the less amount of GaN NW material excited by the laser beam (reduced NW density). The PL emission peak at 3.424 eV, observed in all GaN NW samples, might arise from dislocations formed when nanowires coalesce. Cheng et al. [18] and Calleja et al. [19] reported that this peak was attributed to an exciton bound to structural defects at the GaN/Si interfaces. The PL intensity of DAP band was decreased significantly with increase in growth temperature of GaN NWs, which reflects that optical quality of the NWs increased with increase in growth temperature. Besides reduction of DAP emission intensity, PL intensity ratio of donor- bound exciton peak (D1X) with defect-related peak (Y 2 at 3.424 eV) was found to be increased with increase in growth temperature, and further confirms improvement in optical quality of NWs sample grown at higher substrate temperature. Finally, a blue shift of about 4.070.5 meV is observed for the D1X transition from the GaN NWs when compared to the GaN film and such a blue-shifted (D1X) emission is associated with relaxation of the tensile stress in the NW samples. Micro-Raman spectra further confirm that NWs are grown stress free compared to the reference GaN film. Fig. 3 presents the Raman spectra of the GaN NWs and the reference GaN film grown on Si(111). The spectra were recorded in the zðxxÞ ¯ z scattering geometry. The spectra are dominated by the strong E 2 (high) optical phonon peaks besides the strong silicon peaks at 520.5 cm À1 . The Raman spectrum of the GaN film shows strong E 2 (high) and A 1 (LO) modes at 566.4 and 734.0 cm À1 , respectively, which are in agreement with Raman selection rules for wurtzite GaN. The inset in Fig. 3 is an expansion of the Raman spectrum in the vicinity of the E 2 (high) phonon peak of GaN NWs and the GaN film. The E 2 (high) phonon line of the GaN film indicates that the film is under tensile stress of 0.2570.05 GPa when compared to strain-free, 400 m m thick, freestanding GaN grown by HVPE [16]. The amount of strain was evaluated using the proportionality factor of 4.3 cm À1 GPa À1 for hexagonal GaN. The E 2 (high) phonon line from the GaN NWs is centered at 567.5 cm À1 , which is the value reported for the freestanding GaN film. The E 2 (high) phonon frequency was the same for all the GaN NW samples grown from 700 to 800 1C. Therefore all these GaN NWs are grown stress free on the Si substrate. The GaN NWs samples showed very weak and broad A 1 (LO) phonon mode. Such a broad and weak A 1 (LO) phonon mode could be associated with residual n-type doping as high- temperature growth on the bare Si surface induces Si migration from the substrate and incorporate into GaN NWs [20].Itwas shown in Ref. [20] that doping level of 2.5 Â1018 cm À3 is sufficient to broaden the peak. Infact we have performed electrochemical CV measurements which confirmed that doping level in GaN NWs is of the order of 10 19 cm À3 . In conclusion, we have studied the effect of growth tempera- ture on GaN NW morphology. SEM results revealed that the density, diameter and growth rate of GaN NWs decrease with increase in growth temperature. This behavior is attributed to the reduction of Ga adatom residence time on the surface with increase in growth temperature which limits the lateral supply of Ga atoms to the NWs. Low-temperature photolumines- cence at 20 K showed that PL intensity ratio of D1X peak with defect-related peaks increased indicative of improvement in optical quality of GaN NWs with increase in growth temperature. PL and Raman spectra revealed that all the GaN NWs are stress free irrespective of the used growth temperature. Such GaN NWs are promising for the fabrication of nanostructure devices as well as for the overgrowth of low density and stress-free III-Nitrides films since the NWs form an air-bridge-like structure with a high aspect ratio. They may also be used as compliant buffer layer for the growth of compact III-Nitride films and device hetrostruc- tures. ARTICLE IN PRESS 3.1 3.2 3.3 3.4 3.5 3.6 3.7 20K PL Intensity (a.u) Emission Energy (eV) A B C GaN film Fig. 2. Low temperature PL spectra at 20 K of the GaN NWs grown at (A) 700 1C, (B) 750 1C, (C) 800 1C, and a reference GaN film grown on (111) Si. 450 500 550 600 650 700 750 800 A1(LO) E 2 (high) 550 560 570 580 E 2 (high) Intensity (a.u) Raman-shift (cm -1 ) A B C Film Intensity (a.u) Raman-shift (cm -1 ) A B C Film Fig. 3. Raman spectra of GaN NWs grown at (A) 70 0 1C, (B) 750 1C, (C) 800 1C, and a reference GaN film grown on (111) Si. The inset shows an expansion of the spectrum in the vicinity of the E 2 (high) phonon peak. A.P. Vajpeyi et al. / Physica E 41 (2009) 427–430 429 This research was carried out in the framework of the ‘‘PARSEM’’ Marie Curie Project (MRTN-CT-2004-005583) funded by European Union. References [1] F. Glas, Phys. Rev. B 74 (2006) 121302(R). [2] F. Qian, Y. Li, S. Gradecak, D.L. Wang, C.J. Barrelet, C.M. Lieber, Nano Lett. 4 (2004) 1975. [3] J. Su, et al., Appl. Phys. Lett. 86 (2005) 13105. [4] R. Calarco, M. Marso, T. Richter, A.I. Aykanat, R. Meijers, A.V. Hart, T. Stoica, H. Luth, Nano Lett. 5 (2005) 981. [5] Y.H. Kim, J.Y. Lee, S.H. Lee, J.E. Oh, H.S. Lee, Appl. Phys. A 80 (2005) 1635. [6] L.E. Jensen, M.T. Bjo ¨ rk, S. Jeppesen, A.I. Persson, B.J. Ohlsson, L. Samuelson, Nano Lett. 4 (2004) 1961. [7] A.M. Morales, C.M. Lieber, Science 279 (1998) 208. [8] X.F. Duan, C.M. Lieber, J. Am. Chem. Soc. 122 (2000) 188. [9] R. Calarco, R.J. Meijers, R.K. Debnath, T. Stoica, E. Sutter, H. Luth, Nano Lett. 7 (2007) 2248. [10] R. Meijers, T. Richter, R. Calarco, T. Stoica, H.P. Bochem, H. Marso, H. Luth, J. Cryst. Growth 289 (2006) 381. [11] K.A. Bertness, A. Roshko, N.A. Sanford, J.M. Barker, A.V. Davydov, J. Cryst. Growth 287 (2006) 522. [12] Y.S. Park, S.H. Lee, J.E. Ob, C.M. Park, T.W. Kang, J. Cryst. Growth 282 (2005) 313. [13] E. Iliopoulos, A. Adikimenakis, E. Dimakis, K. Tsagaraki, G. Konstantinidis, A. Georgakilas, J. Cryst. Growth 278 (2005) 426. [14] M. Kayambaki, R. Callec, G. Constantinidis, C. Papavassiliou, E. Loechtermann, H. Krasny, N. Papadakis, P. Panayotatos, A. Georgakilas, J. Cryst. Growth 157 (1995) 300. [15] J. Grandal, M.A. Sa ´ nchez-Garcı ´ a, E. Calleja, E. Luna, A. Trampert, Appl. Phys. Lett. 91 (2007) 021902. [16] L.S. Wang, K.Y. Zang, S. Tripathy, S.J. Chua, Appl. Phys. Lett. 85 (2004) 5881. [17] E. Calleja, M.A. Sanchez-Garcıa, F. Calle, F.B. Naranjo, E. Munoz, U. Jahn, K. Ploog, J. Sanchez, J.M. Calleja, K. Saarinen, P. Hautojarvi, Mater. Sci. Eng. B 82 (2001). [18] Hung-Ying Chen, Hon-Way Lin, Chang-Hong Shen, Shangjr Gwo, Appl. Phys. Lett. 89 (2006) 243105. [19] E. Calleja, M.A. Sa ´ nchez-Garcı ´ a, F.J. Sa ´ nchez, F. Calle, F.B. Naranjo, E. Munoz, U. Jahn, K. Ploog, Phys. Rev. B 62 (2000) 16826. [20] T. Kozawa, T. Kachi, Y. Taga, M. Hashimoto, N. Koide, K. Manabe, J. Appl. Phys. 75 (2) (1993). ARTICLE IN PRESS A.P. Vajpeyi et al. / Physica E 41 (2009) 427–430430 . on the effect of substrate temperature on the surface morphology, density, growth rate and optoelec- tronic properties of GaN NWs spontaneously grown on. Effect of substrate temperature on spontaneous GaN nanowire growth and optoelectronic properties A.P. Vajpeyi a,b, Ã ,