... (additive)RF MEMS and Their Applications16MEMS AND RF MEMS and much progress has been made (Cohen et al., 1999; Ikuta and Hirowatari, 1993; Jiang,Sun and Zhang, 1999; Takagi and Nakajima, 1993; ... thank many of our colleagues and students, Taeksoo Ji, Yanan Sha, Roopa Tellakula,Hargsoon Yoon, and Bei Zhu, at the Center for Electronic and Acoustic Materials and Devices for their contributions ... circuit and hasboth the actuation and RF-circuit function. In this class, one could consider traditionalcantilever and diaphragm type MEMS which can be used as electrostatic microswitch and comb-type...