... the area of variable capacitors,as a replacement for varactor diodes as tuners (Wu et al., 1998). Here, either a lateral or a parallel plate capacitance variation can be obtained with suitable ... stereolithography on UV-curable backbone-type polymers(Ikuta and Hirowatari, 1993; Takagi and Nakajima, 1993; Tani and Esashi, 1995; Varadan,1995; Varadan and Varadan, 1995, 1996). In the integrated MEMS ... and Hirowatari, 1993; Takagi and Nakajima, 1993; Tani andEsashi, 1995; Varadan, 1995; Varadan and Varadan, 1995, 1996). The photoforming orphoto fabrication is an optical method such as the stereolithography,...