... engineering. However, in the measurement
of such small-sized objects, errors in fixing the object often strongly influence the
result of the measurement.
This leads to the requirement for on-the-machine
... (sensors by MKS)
4.8.2.3
Temperature Control
Vacuum coating process efficiency and quality are strongly temperature depen-
dent. The physical, mechanical, and technological coating properties
... the presence of intense radiofrequency and mi-
crowave fields as well as very high voltages and strong magnetic fields. In the range
from –200 to 450 8C, an accuracy of ± 0.1 8C can be reached
... synthesiz-
ing super-hard materials such as diamond, diamond coatings, and cubic boron ni-
tride gave strong impulses from the process side for higher cutting speeds.
Important preconditions had to be
... grinding parameters, the grinding wheel used,
and the cooling lubricant all exert a particularly strong influence on the AE fre-
quency spectrum. Since the geometry, the material, and, of course,