... Mechanics and Reliability of Flexible Magnetic Media, Springer-Verlag, New York Bhushan, B (1995), Handbook of Micro/ Nanotribology, CRC, Boca Raton, FL Bhushan, B (1996a), Tribology and Mechanics of ... review of macro- and micro/ nanotribological studies of single-crystal silicon and polysilicon, oxidized and implanted silicon, doped and undoped polysilicon films and SiC films A summary of limited ... friction and wear data of virgin, coated, and © 1999 by CRC Press LLC TABLE 16.2 rms, Microfriction, Microscratching/Microwear and Nanoindentation Hardness Data for Various Virgin, Coated, and Treated...