... the high- k material in consideration EOT is given by tox thigh k kSiO2 / khigh k , where thigh k and khigh k are the physical thickness and relative dielectric constant of high- k dielectric, ... density Jg Gate leakage current density k Dielectric constant (relative permittivity) kGe Dielectric constant of Ge (relative permittivity) khigh -k Dielectric constant of high permittivity dielectric ... passivation measured at 1MHz, 800kHz, 500kHz, 300kHz, 200kHz, 100kHz, 80kHz, 50kHz, 30kHz, 20kHz and 10kHz Fig 3.7 Gate leakage current densiy for samples with Si passivation and SN 55 passivation Smaller...