... Laboratory, FANLJC Ltd.,Oshino, Yamanashi 40 1-0 5 97, JAPAN4 Materials Fabrication Laboratory,The Institute of Physical and Chemical Research (RTKEN), 2-1 Hirosawa, Wako, Saitama 35 1-0 198, JAPANABSTRACTThe ... Tai2'Systems Mangement Engineering, Kansai University 3-3 -3 5, Yamate-cho, Suita, Osaka 56 4-8 680, JapanCalifornia Institute of Technology13 6-9 3, Pasadena, CA9112, USAABSTRACTPolymer material of Parylene ... Page 1 47 Thursday, July 27, 2006 7: 17 AM1 47 1* 1 C Odt - = C&apos ;A, (5)As mentioned above, six components of acceleration and angular acceleration can be calculated frommeasured accelerations...