... 60, 62, 67 Oxide surface layer, 84, 89, 93, 95 Parylene, 48 , 49 Pa-n, 48 , 49 dielectric, 48 , 49 reliability issues, 549 phase change, 50 Polyimides, 2, 548 Recoil energy, 8 Refractory ... Lett. 45 , 157(2000). [17] D. Adams, T. L. Alford, Materials Science and Engineering R 40 , 207(2003). Index Adhesion analysis, 54 tape test, 55 scratch test, 54 Ag on ... (e.g. grain size and texture); (2) contamination control (C, O and CI); (3) oxidation and corrosion control; (4) prevention of Ag diffusion in metals and dielectric materials; and (5) mechanical...