... Symp. onCircuits and Systems, pp. 618-21, 1986.[11] Vandemeer, J., Kranz M. Fedder G.K., “Hierachical representation and simulation of micromachinedinertial sensors,” Modeling and Simulation ... accelerometer withintegrated CMOS detection circuitry,” IEEE Solid-State Sensor and Actuator Workshop, Hilton HeadIsland, SC, June, 1992, pp21-25.[10] K. Nagaraj et. al., “SC circuits with reduced ... simulation results for CMOS- MEMS and pol-ysilicon comb fingers with the same beam cross-sections, and compared with a simple parallel-plateapproximation.2.4.2 Capacitive bridge model:For simulation...