... Bio-MEMS: Technologies and Applications is divided into three sections:1. Basic Bio-MEMS Fabrication Technologies 2. Microfluidic Devices and Components for Bio-MEMS3. Sensing Technologies and ... fabrication technologies of MEMS devices and systems. Mostof these books have focused on silicon-based technologies, such as surfacemicromachining, and wet and dry etching technologies (RIE and DRIE ... 1.1.3 Sensing Technologies and Bio-MEMS Applications (Chapters 10, 11, 12, 13, 14, 15, and 16) Because of the enormous variations in biological and biomedical samples,the processing and detection...