... Representation of the Piezoresistance Coefficients in Silicon, IEEE Transactions on Electron Devices, Vol. ED-29, No. 1, pp. 64-70. Sensors, Focus on Tactile, Force and Stress Sensors 76 Fig. 3. ... scaling limits for high-density silicon tactile imagers, Sensors and Actuators A, Vol. 23, No. 1 /3, pp. 915-918. Sensors, Focus on Tactile, Force and Stress Sensors 56 strain-sensor pixel ... Sensor Array on Pneumatically Swollen Single Diaphragm Structure, IEEE Transactions on Electron Devices, Vol. 53, No. 5, pp. 1250-1259. Sensors, Focus on Tactile, Force and Stress Sensors 64...