... review of macro- and micro/ nanotribological studies of single-crystal silicon and polysilicon, oxidized and implanted silicon, doped and undoped polysilicon films and SiC films. Asummary of limited ... Disks,” J. Appl. Phys. 79 , 8 071 –8 075 .Koinkar, V.N. and Bhushan, B. (1996b), “Microtribological Studies of Unlubricated and LubricatedSurfaces Using Atomic Force/Friction Force Microscopy,” J. Vac. ... Technol. A14, 2 378 –2391.Koinkar, V.N. and Bhushan, B. (19 97) , “Scanning and Transmission Electron Microscopies of Single-CrystalSilicon Microworn/Micromachined Using Atomic Force Microscopy,”...