... devices, micro heat exchangers, micro valves and pumps, and lab-on-chips, more studies have been Heat Transfer - Theoretical Analysis, Experimental Investigations and Industrial Systems 104 ... the material. lR and wR are the length and the width of the resistor, respectively. Heat Transfer - Theoretical Analysis, Experimental Investigations and Industrial Systems 80 dedicated ... removal of sacrificial layer and (c) direct use of the fusion bonding by SU-8. Heat Transfer - Theoretical Analysis, Experimental Investigations and Industrial Systems 106 6.1.3 Fabrication...