... Lelt 1994, 64.10. Henning AK, Hochwitz T, Slinkman J, Never J, Hoffman S, Kaszuba P,Daghlin C: Two-dimensional surface dopant profiling in silicon usingscanning Kelvin probe microscopy. J ... of discriminating structural and material proper-ties on a nanometer scale. Since atomic force micro-scopy (AFM) was invented by Binning and Rohrer in IBM, 1982 (Nobel Prize awards in 1986), ... such as scanning capaci-tance microscopy (SCM) [6,7], electrostatic forcemicroscopy (EFM) [8], scanning resistance microscopy[9] and Kelvin probe force microscopy [10]. In amount of these techniques,...