... Sensors and Actuators B 109 (2005) 128–134New technology of metal oxide thin filmpreparation for chemical sensor applicationViacheslav Khatkoa,∗, ... direction includes the technologies via with thin films of nanometer grain size can be deposited. As a rule,these technologies are used to obtain thin film gas sensors.For example, active layers with ... mi-cromachined gas sensors, in: Proceedings of the 16th European Con-ference on Solid State Transducers EUROSENSORS XVI, Prague,2002, pp. 257–258.[10] S.R. Morrison, Semiconductor gas sensors, Sens....