... Plasma- enhanced chemical vapor deposition carbon nanotubes for ethanol gas sensors
Chia-Te Hu
a
, Chun-Kuo Liu
a
, Meng-Wen Huang
b
, Sen-Hong Syue
a
, Jyh-Ming Wu
c
, Yee-shyi Chang
a
,
Jien-W. ... 2008
Keywords:
Carbon nanotubes
Ethanol
Conductance
Gas sensor
Adsorption
Surface modification
Carbon nanotubes (CNTs) have been fabricated by microwave plasma-...
... using a hot ®lament chemical vapor deposition (HFCVD) method, deposition of carbon on Si nanowires (Si
NWs) has been studied. Multi-walled carbon nanotubes (CNTs) were found to form on the surfaces ... template eect for the formation
of tube-like carbon shell structure and a carbon-
ization eect for the transformation of Si NWs to
SiC nanowires. At a relatively low sub...
... substrate with a metal organic chemical vapor deposition (MOCVD)-grown undoped zinc
oxide (ZnO) film as a channel layer and plasma- enhanced chemical vapor deposition (PECVD)-grown silicon nitride as ... Enhancement-Mode Metal Organic Chemical Vapor Deposition- Grown
ZnO Thin-Film Transistors on Glass Substrates Using N
2
O Plasma Treatment
Kariyadan Remashan, Yong-Seok...
... non-doped ZnO films are grown by the plasma- assisted metal-organic chemical vapor deposition
(MOCVD) on sapphire. X-ray diffraction spectra show that they are both strongly c-oriented while the N-doped ... quality. The absorp-
tion measurement was performed by UV-3100
SHIMADZU UV-VIS-NIR Recording spectro-
photometer with Xe lamp as optical source.
Raman measurement was taken by RE-
NIS...
... whether
III-V or II-VI sources are being used. In-containing adducts and some
Group II-containing alkyls then decompose around room temperature to
form a low vapor pressure polymer of the form (-RM-ER -)
n
[27][29][41][42]
which ... 8.514–
2105/T
(Cont’d.)
164 Thin-Film Deposition Processes and Technologies
Chemical Abbrev- Formula Melt- Vapor Use
iation ing pressure
Temp (P in Tor...
... thermal evaporation deposition [8], chemical vapor
deposition (CVD) [9–11], and supercritical fluid–liquid–
solid (SFLS) synthesis [12]. The most popular growth
mechanism for SiNWs is vapor liquid–solid ... 2005; in final form 9 May 2005
Available online 29 June 2005
Abstract
Single-crystal silicon nanowires with the prism structures were synthesized by chemical vapor deposition...
... range
Chemical Physics Letters 374 (2003) 542–547
www.elsevier.com/locate/cplett
*
Corresponding author. Fax: +8 6-9 3 1-8 9 1-2 582.
E-mail address: lihl@lzu.edu.cn (H.L. Li).
000 9-2 614/03/$ - see ... in final form 1 May 2003
Abstract
Well-aligned arrays of silicon nanowires (SiNWs) have been synthesized by a chemical vapor deposition (CVD)
template method without cataly...
... by
Au–Si island-catalyzed chemical vapor deposition
D.W. Kwak, H.Y. Cho, W C. Yang
Ã
Department of Physics and Quantum-Functional Semiconductor Research Center, Dongguk University, Seoul 10 0-7 15, South ... silicon nanowires (Si-NWs) on Si (0 0 1) and (1 1 1) substrates
synthesized using nanoscale Au–Si island-catalyzed rapid thermal chemical vapor deposition. The Au–Si islands...
... 2008
PACS:
71.35.Ee
78.55.Ae
78.67.Àn
Keywords:
Nanowires
Silicon
Photoluminescence
Exciton
Electron-hole -plasma
abstract
We have carried out photoluminescence measurements of silicon nanowires (SiNWs) obtained by the
chemical vapor deposition method with a copper-catalyzed vapor liquid–solid ... obtained by epitaxial
chemical vapor deposition
O. Demichel
a,
Ã
, F. Oehler
a
, V...
... small size [1,2]. Gas sensors based
on SnO
2
materials have been commercially available [3,4]. Thin-
film gas sensors have improved the gas- sensing properties from
bulk or thick- film ones. They ... candidate of
gas- sensing applications [15–17]. For the gas- sensing materials,
there are various approaches using CNTs as the solution such as
CNTs for dispersion, CNTs for compos...