... fabricated on a glass substrate with a metal organic chemical vapor deposition (MOCVD)-grown undoped zincoxide (ZnO) film as a channel layer and plasma-enhanced chemical vapor deposition (PECVD)-grown ... Yeom2, Seong-Ju Park1, and Jae-Hyung JangÃDepartment of Information and Communications and Department of Nanobio Materials and Electronics,Gwangju Institute of Science and Technology, Gwangju ... layer deposition,16–21) and metal organic chemical vapor deposition (MOCVD).22–24)In principle, MOCVD offers the advantages of goodreproducibility from run to run and high-quality film withbetter...