1 utm 1 and smart 1 appliances
Microsensors, MEMS and Smart Devices - Gardner Varadhan and Awadelkarim Part 1 pdf
... Projection Method 7.6 .1 Mask-Projection MSL 7.6.2 Dynamic Mask-Projection MSL 17 3 17 3 17 4 17 8 17 9 18 1 18 1 18 2 18 4 18 6 18 9 19 2 19 3 19 3 19 6 15 5 15 6 15 6 15 7 15 8 16 2 16 6 17 0 17 2 17 2 viii CONTENTS 7.7 ... INTRODUCTION 10 0k 1M ,9 Clock rate (Hz) 10 M 1G 10 G 10 Pentium IV y 10 - Pentium I 10 '•a 10 °- 80386 Pentium ID 486 80286 jj 10 4 H £ z 10 3 4004, 10 2 19 70 19 75 8086 19 80 19 85 19 90 Year 19 95 2000 2005 ... Figure 1. 1 Moore's law for integrated circuits: exponential growth in the number of transistors in an 1C during the past 30 years 10 ' 10 ' I 10 01 a 10 7 E 10 o 10 10 5 10 ' 10 J 19 70 19 75 19 80 19 85 19 90...
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Tài liệu Firewall and Smart Defense Administration Guide Version NGX R65 pdf
... VPN -1, VPN -1 Accelerator Card, VPN -1 Edge, VPN -1 Express, VPN -1 Express CI, VPN1 Power, VPN -1 Power VSX, VPN -1 Pro, VPN -1 SecureClient, VPN -1 SecuRemote, VPN -1 SecureServer, VPN -1 UTM, VPN -1 UTM ... 10 9 Port Translation 11 1 NAT and Anti-Spoofing 11 1 Routing Issues 11 1 Disabling NAT in a VPN Tunnel 11 3 Planning Considerations for NAT 11 4 ... SiteManager -1, SmartCenter, SmartCenter Express, SmartCenter Power, SmartCenter Pro, SmartCenter UTM, SmartConsole, SmartDashboard, SmartDefense, SmartDefense Advisor, Smarter Security, SmartLSM, SmartMap,...
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Interactive Technology and Smart Education ppt
... PhD-thesis in the field of Semantics and Modularization of Learning Objects in Cooperative Knowledge Spaces 18 1 Interactive Technology and Smart Education (2007) 18 2 19 1 © Emerald Group Publishing Limited ... Learning in Tertiary Education (ASCILITE), Auckland, New Zealand, December 2002, Vol 2, pp.749-58 19 1 Interactive Technology and Smart Education (2007) 19 2 19 9 © Emerald Group Publishing Limited Authoring ... Bavaria, Germany, pp 11 5 -11 8 Turban, G and Mühlhäuser, M (2006), “An open architecture for face-to-face learning and its benefits”, Proceedings of the INTERACTIVE TECHNOLOGY AND SMART EDUCATION Turban:...
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Microsensors, MEMS, and Smart Devices pdf
... Projection Method 7.6 .1 Mask-Projection MSL 7.6.2 Dynamic Mask-Projection MSL 17 3 17 3 17 4 17 8 17 9 18 1 18 1 18 2 18 4 18 6 18 9 19 2 19 3 19 3 19 6 15 5 15 6 15 6 15 7 15 8 16 2 16 6 17 0 17 2 17 2 viii CONTENTS 7.7 ... INTRODUCTION 10 0k 1M ,9 Clock rate (Hz) 10 M 1G 10 G 10 Pentium IV y 10 - Pentium I 10 '•a 10 °- 80386 Pentium ID 486 80286 jj 10 4 H £ z 10 3 4004, 10 2 19 70 19 75 8086 19 80 19 85 19 90 Year 19 95 2000 2005 ... Figure 1. 1 Moore's law for integrated circuits: exponential growth in the number of transistors in an 1C during the past 30 years 10 ' 10 ' I 10 01 a 10 7 E 10 o 10 10 5 10 ' 10 J 19 70 19 75 19 80 19 85 19 90...
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microsensors mems and smart devices gardner varadhan and awadelkarim pot
... Projection Method 7.6 .1 Mask-Projection MSL 7.6.2 Dynamic Mask-Projection MSL 17 3 17 3 17 4 17 8 17 9 18 1 18 1 18 2 18 4 18 6 18 9 19 2 19 3 19 3 19 6 15 5 15 6 15 6 15 7 15 8 16 2 16 6 17 0 17 2 17 2 viii CONTENTS 7.7 ... INTRODUCTION 10 0k 1M ,9 Clock rate (Hz) 10 M 1G 10 G 10 Pentium IV y 10 - Pentium I 10 '•a 10 °- 80386 Pentium ID 486 80286 jj 10 4 H £ z 10 3 4004, 10 2 19 70 19 75 8086 19 80 19 85 19 90 Year 19 95 2000 2005 ... Figure 1. 1 Moore's law for integrated circuits: exponential growth in the number of transistors in an 1C during the past 30 years 10 ' 10 ' I 10 01 a 10 7 E 10 o 10 10 5 10 ' 10 J 19 70 19 75 19 80 19 85 19 90...
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Microsensors, MEMS and Smart Devices - Gardner Varadhan and Awadelkarim Part 2 ppt
... 15 P 16 S 17 Cl He 1. 5 1. 8 2 .1 2.5 32 Ge 33 As 34 Se 35 Br 18 Ar 3.0 31 Ga 10 Ne 0.8 1. 0 1. 3 1. 5 1. 6 1. 6 1. 5 1. 8 1. 8 1. 8 1. 9 1. 6 1. 6 1. 8 2.0 2.4 2.8 37 Rb 38 Sr 39 Y 40 Zr 41 Nb 42 Mo 43 Tc 44 ... 2330 5 316 15 44 3440 2699 19 320 4508 Melting point (°C) 14 10 15 10 19 00 - 660 10 64 16 60 10 18 80 - 377 488 26 Electrical conductivity" (10 3 W -1 c m - ) x 10 -5 -11 Thermal conductivity (W/m/K) 16 8 ... 81 TI 82 Pb 83 Bi 84 Po 85 At 1. 1 1. 2 1. 3 1. 5 1. 7 1. 9 2.2 2.2 2.2 2.4 1. 9 1. 8 1. 8 1. 9 2.0 2.2 54 Xe 0.7 0.9 87 Fr 88 Ra 89 -10 3 10 4 Ac-Lr (Rf) 0.7 0.9 1. 1 10 5 (Ha) 1. 7 Figure 3.3 Periodic table...
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Microsensors, MEMS and Smart Devices - Gardner Varadhan and Awadelkarim Part 3 pdf
... orientation 0.50-0.55 30-35 0.60-0.65 40-45 0.65-0.70 55-60 16 -20 25-30 35-40 70 65 60 50 (10 0) or (11 1) (10 0) or (11 1) (10 0) or (11 1) "Wafer flats are defined in Section 4.2 from crystal growth ... STANDARD MICROELECTRONIC TECHNOLOGIES 10 0 ECL 10 TTL GaAs 10 .1 - CMOS 0. 01 0.0 01 1,000 Figure 4.9 processes 10 0 10 0 .1 Gate-switching speed (ns) 0. 01 Relative power dissipation (per gate) and ... Thermal x 10 N/m 1. 9 x 10 11 N/m2 2.3 g/cm3
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Microsensors, MEMS and Smart Devices - Gardner Varadhan and Awadelkarim Part 4 pdf
... nitride Table 4.5 Element \/D at 11 00°C (um 7xl 019 a 1. 8 x 10 21 Phosphorus 0.329 1. 4X10 21 p-type: a 80 -12 0 20-30 18 0-220 20-30 350-500 20-30 200-600 20-40 5-7.5 16 0 -17 5 State Use Antimony trioxide ... Ceramic/plastic 11 0-80 /13 0 -10 5 Up to 6500 Plastic 95-60 Up to 17 000 Ceramic 70-45 Up to 25 000 30 Plastic 65-50 Up to 17 000 Ceramic/plastic 40 -19 /46-38 Up to 75000 Ceramic 60 Plastic 12 Surface mount ... optical and electron-beam lithography4 Figure 4 .11 shows the lithographic patterning of a substrate with a negative resist and chrome mask plate (mask 1) , and subsequent soft-baking and developing...
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Microsensors, MEMS and Smart Devices - Gardner Varadhan and Awadelkarim Part 5 pdf
... 4.00 2 .15 2.30 1. 38 3.40 1. 53 - 0.65 3.00 kV/mm % 79 0 .15 79 0.3 79 0.25 5.9 0.20 15 .4 0.30 10 –3 12 0.7 7.0 10 % g MPa Q-cm 40 500 16 5 10 6 200 200 17 10 7 90 800 13 8 - 15 17 00 34 10 5 28 10 6 Units ... 75 11 0 11 8 75 Etch-rate (jim/hour) of Si (10 0) Si (11 0) Si (11 1) 84 25-42 51 176 24 12 6 39-66 57 99 ' Appendix M provides a list of all the worked examples provided in this book 0. 21 0.5 1. 25 11 ... 7 .1 3.7 9.5 99.5 White 9.0 3. 01 6.5 98-99.8 Dark grey 4.4 3.255 8.8-8.9 10 –3 0 .1 0.4 0.4 0.7-2.0 24 400 10 14 20-35 26 250 10 14 20-35 9.5 17 0-240 10 15 250-260 10 -14 280-320 >10 13 0.74 80-260 10 -...
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Microsensors, MEMS and Smart Devices - Gardner Varadhan and Awadelkarim Part 9 ppt
... antenna " Pyroelectric Energy increasing L.2GeV -1. 2MeV(x ray) 1. 2MeV- 1. 2keV(;r ray) Figure 8 .13 1. 2keV -1. 2eV 1. 2eV -1. 2MeV 1. 2MeV- 1. 2 1. 2jieV -1. 2MeV(RW) Classification of radiation sensors according ... 7, 411 – 415 Maruo, S and Kawata, S (19 97) "Two-photon-absorbed photopolymerisation for threedimensional microfabrication," Proc IEEE MEMS, 16 9 17 4 Monneret, S., Loubere, V and Corbel, S (19 99) ... 8, 2 51 262 Varadan, V K., Varadan, V V and Motojima, S (19 96) "Three-dimensional polymeric and ceramic MEMS and their applications," Proc SPIE, 2722, 15 6 16 4 Wayne, R P (19 88) Principles and Applications...
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Microsensors, MEMS and Smart Devices - Gardner Varadhan and Awadelkarim Part 10 docx
... (19 90) Application 19 91 1992 19 93 19 94 19 95 19 96 19 97 19 98 19 99 2000 Air bag-cars and vans ABSa Suspension Total 21 55 89 88 15 1 12 7 12 9 13 1 13 3 13 5 0 21 69 13 11 0 16 18 12 2 24 26 2 01 31 19 17 7 ... Sullivan (19 93) Year Revenue0 (MEuro) Growthrate (%) Year Revenue (MEuro) Growthrate (%) 19 89 19 90 19 91 1992 19 93 19 94 17 5 283 323 3 21 285 312 _ 62 14 -1 -11 10 19 95 19 96 19 97 19 98 19 99 376 463 ... Pressure range (kPa) Year introduced 9 30 10 0 3.3 0 -10 5 50 -10 5 0 -10 5 Current Current 19 89 n/a 97 455 14 0 -10 5 500 20000 19 94 19 94 -19 95 19 94 -19 95 19 50 -10 5 Current Manifold pressure Barometric...
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Microsensors, MEMS and Smart Devices - Gardner Varadhan and Awadelkarim Part 12 pps
... strain Equations (10 .12 ) and (10 .14 ) are often referred to as piezoelectric constitutive equations In matrix notation, Equations (10 .12 ) and (10 .14 ) can be written as (Auld 19 73b): [T] = [c][S]–[e ... Tournois, P and Lardat, C (19 69) "Love wave dispersive delay lines for wide band pulse compression," Trans Sonics Ultrasonics, SU -16 , 10 7 11 7 Varadan, V K and Varadan, V V (19 97) "IDT, SAW and MEMS ... demonstrated (Du et al 19 96) PMMA has a density of about 1. 18 kg/m3 and has a shear acoustic velocity of 11 00 m/s (Kovacs et al 19 93; Jakoby and Vellekoop 19 98; Du et al 19 96), whereas sputtered...
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Microsensors, MEMS and Smart Devices - Gardner Varadhan and Awadelkarim Part 13 pdf
... amplitudes and time delays t\ and t2, respectively These may be written as Si(0 = A1 cos(w0 + V>t/2)(t - fi) (13 .10 ) and S2(t) = A2cos(o)0 + l^t/2)(t -t2) (13 .11 ) with + Te (13 .12 ) + re (13 .13 ) where ... Sample holder with SAW device T1 01 T1 01 1 Figure 11 .6 Schematic of measurement setup H S 21 i s 11 S22 S12 Figure 11 .7 Signal flow of a two-port network 11 .9 CALIBRATION Calibration of any measurement ... 0.000 -0.0 01 -0.002 Ml ' M M M M 10 12 Time (s) Figure 13 .12 14 16 18 20 Measured strain on the surface of a vibrating beam 13 .4.2 Temperature Sensor An IDT and two reflectors are patterned onto...
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Microsensors, MEMS and Smart Devices - Gardner Varadhan and Awadelkarim Part 14 doc
... time delay t\ and a different amplitude (13 .50) 01( 0 = [w0 + u(t — t ) / ] ( t - t1) + 00 (13 . 51) The IF corresponding to S ( t ) is expressed as ut 21/ I1(0 = B1 cos[ut1t + w0t1 - 2] (13 .52) Both ... geometry and material data is well documented by Cross and Schmidt (19 77), Haus and Wright (19 80), and Campbell (19 98) Figures 13 .20 and 13 . 21 show a modeling example of an IDT—IDT pair and a two-port ... fit M 18 0
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Microsensors, MEMS and Smart Devices - Gardner Varadhan and Awadelkarim Part 15 pps
... shown that b1 = a1S 11 + a2S12 and b2 = a1S 21 + a2S22 (14 .1) and, therefore, S 11 = b /a , S 21 = b2/a1 when a2 = 0; S12 = b /a , S22 = b2/a2 when a1 = (14 .2) where S 11 and S 21 (S12 and S22) are ... architecture of (a) a smart actuator and (b) a smart microsystem (or MEMS) Table 15 .1 Description Smart material Smart structure Smart sensor Smart actuator Smart controller Smart electronics Smart microsystem ... characterization and testing of wireless MEMS-IDT based microaccelerometers," Sensors and Actuators A, 90, 7 19 15 Smart Sensors and MEMS 15 .1 INTRODUCTION The adjective 'smart' is widely used in science and...
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Microsensors, MEMS and Smart Devices - Gardner Varadhan and Awadelkarim Part 16 doc
... Yacto- (10 –24) Zepto- (10 – 21 ) Atto- (10 18 ) Femto- (10 15 ) Pico- (10 12 ) Nano- (10 9) Micro- (10 –6) Milli- (10 –3 ) Centi- (10 –2 ) Deca- (10 – ) Deca- (10 +1) Hecto- (10 +2) Kilo- (10 +3) Mega- (10 +6) ... pm (kg/m3) 7860 8902 11 ,34 12 ,02 21, 45 6684 19 ,35 Melting point, 15 35 14 53 328 15 52 17 72 6 31 3, 410 Boiling point, 2750 2732 17 40 314 0 3827 17 50 5,660 11 2 14 6 48 10 0 94 26 18 3 Temperature coefficient ... N m =1 W s eV= 1. 60 21 × 10 19 J Pa s = 10 g/cm/s = 10 poise cd = 0.982 int candles 1x = 0.09290 In/ft2 or fc cd = Im/sr 1x = 1m/m2 1bf s/in2 = 6, 895 Pa s candle = 1. 018 cd fc = 10 .764 1x Appendix...
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Microsensors, MEMS and Smart Devices - Gardner Varadhan and Awadelkarim Part 17 pot
... working point, ^max Nylon Polyimide Polythene2 11 20 -11 70 10 00 -16 00 926-9 41 100 - 71- 93 PTFE1 PVC PVDF 210 0-2300 13 00 -14 00 17 50 -17 80 260 70-74 15 0 0 .16 0 .1 (°C) Thermal conductivity, k (W/m/K) Specific ... (J/K/kg) Temperature expansivity, al (10 –5/K) Dielectric constant, 0.25-0.27 0 .15 0.33-0.42 0.24-0.25 16 00 -19 00 11 00 19 00 10 50 840 -11 70 28 - 14 -16 10 5 -18 8 -14 3.7-5.5 - 3.0-4.0 2.9 2.3 £r Young's ... capacity1, cp(J/K/kg) 730 730 Temperature expansivity, a l (10 –6 /K) - — 85 Dielectric constant, 1. 4 3.8 12 730 6.7 730 6.8 12 .2 4.4 44 - - 11 0 20 710 - 600-800 3.3 — — — er Energy band gap, 18 -23...
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Microsensors, MEMS and Smart Devices - Gardner Varadhan and Awadelkarim Part 18 docx
... 16 6-70 pillar, 18 5 pipe, 18 5, 18 7, 210 polymer, 19 1 shuttles, 2 51- 4 spiral, 19 1 spring, 19 8, 210 INDEX titerplate, 442 tube, 19 1, 19 3 wire, 216 Microtechnologies, standard, 71 see also Bipolar, CMOS ... two-photon, 18 9-92 techniques, Microstructure, axle, 214 ceramic, 19 7-2 01 coil, 18 5 cone, 19 3 cup, 19 3, 19 8 flexural, 2 51- 4 funnel, 19 1 gear, 214 metallic, 202-5 nickel, 210 nozzle, 16 6-70 pillar, 18 5 ... Microspiral, 19 1 Microspring, 19 8, 210 Microstereolithography, 17 3-226, ceramic, 19 7-2 01 classical, 18 1 IH process, 18 2-4 mass-IH process, 18 4-8 projection, 18 0, 19 3-7 scanning, 18 0 super-IH process, 18 6-9...
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Smart Material Systems and MEMS - Vijay K. Varadan Part 1 pot
... formulation References 14 5 14 5 14 7 14 7 14 8 14 9 15 1 15 3 15 3 15 4 15 4 15 4 15 5 15 6 15 6 15 8 15 9 16 2 16 4 16 7 16 8 17 1 17 2 17 3 17 4 17 8 17 9 18 2 18 4 Modeling of Smart Sensors and Actuators 8 .1 Introduction 8.2 ... characteristics in 1- D waveguides References 10 9 11 3 11 4 11 7 11 9 12 0 12 0 12 1 12 3 12 6 12 8 12 9 13 4 14 4 Introduction to the Finite Element Method 7 .1 Introduction 7.2 Variational principles 7.2 .1 Work and complimentary ... broadband wave control References 19 2 19 4 19 6 19 6 19 9 2 01 202 204 204 205 209 212 215 216 218 219 222 229 2 31 2 31 232 232 234 237 239 239 240 2 41 242 246 247 248 253 PART 4: FABRICATION METHODS AND...
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