B GIO DC V O TO TRNG I HC BCH KHOA H NI LU TH LAN ANH NGHIấN CU NH HNG CA LP CHC NNG NANO ZnO N HOT NG CA PIN MT TRI MNG MNG GLASS/TCO/NANO ZnO/CdS/CuInS2/Me Chuyờn ngnh: Vt lý k thut Mó s: 62520401 LUN N TIN S VT Lí K THUT H Ni - 2014 B GIO DC V O TO TRNG I HC BCH KHOA H NI LU TH LAN ANH NGHIấN CU NH HNG CA LP CHC NNG NANO ZnO N HOT NG CA PIN MT TRI MNG MNG GLASS/TCO/NANO ZnO/CdS/CuInS2/Me Chuyờn ngnh: Vt lý k thut Mó s: 62520401 LUN N TIN S VT Lí K THUT NGI HNG DN KHOA HC: GS.TS Vừ Thch Sn H Ni - 2014 Li cam oan Tụi xin cam oan õy l cụng trỡnh ca riờng tụi di s hng dn ca GS.TS Vừ Thch Sn Cỏc kt qu nờu lun ỏn l trung thc v cha tng cụng b bt k mt cụng trỡnh no Tỏc gi lun ỏn Lu Th Lan Anh Li cm n u tiờn, tụi xin by t lũng bit n sõu sc n Trng i Hc Bỏch khoa H Ni v Vin Vt lý K thut ó to iu kin cho tụi quỏ trỡnh hc v nghiờn cu Tụi xin by t li cỏm n chõn thnh v s kớnh trng i vi GS.TS Vừ Thch Sn ngi ó hng dn tụi thc hin bn Lun ỏn ny Thy ó tn tỡnh ch bo c v lnh vc khoa hc cng nh cuc sng Tụi ó hc c rt nhiu t nhng iu ch dn tn tỡnh v t nhõn cỏch nh giỏo ca Thy Tụi cm phc nhng hiu bit sõu sc v chuyờn mụn, kh nng s phm cng nh s tn tỡnh ca Thy Nhng kin thc m tụi tip nhn c t Thy khụng ch l bn Lun ỏn m trờn ht l cỏch nhỡn nhn, ỏnh giỏ cng nh phng thc gii quyt cỏc khoa hc v s tri nghim ca cuc sng Tụi xin by t s kớnh trng v bit n to ln i vi Thy Tụi xin trõn trng cm n PGS.TS Dng Ngc Huyn, PGS.TS Nguyn Ngc Trung, TS.Nguyn Tuyt Nga, TS.Nguyn Hong Thoan, TS.Lng Hu Bc, ThS Lờ Ngc Minh, ThS.Phm Vn Thng, ThS Phm Phi Hựng Vin Vt lý k thut, Trng i hc Bỏch khoa H Ni, TS Trn Thanh Thỏi- i hc Quy Nhn ó giỳp tụi rt nhiu sut quỏ trỡnh thc hin cỏc thc nghim ca Lun ỏn, ng thi cú nhng úng gúp gi m quý bỏu quỏ trỡnh tụi hon thin Lun ỏn Tụi xin trõn trng cm n ThS Cao Xuõn Quõn, Phũng o lng Quang hc, Vin o lng Vit Nam vỡ nhng giỳp vic o c cỏc thụng s c trng quang Tụi xin trõn trng cm n GS TS M Jouan, Phũng thớ nghim SPMS (Lab de Structures Propriộtộs et Modelisation des Solides), Trng ECP (Ecole Centrale Paris, France) ó giỳp tụi kho sỏt hỡnh thỏi b mt cỏc mu nano ZnO Tụi cng trõn trng cm n TS Nguyn Xuõn Sỏng, Trung tõm SMART (Singapore - MIT Alliance for Research and Technology), Trng i hc Quc gia Singapo vỡ nhng giỳp vic chp v phõn tớch hỡnh thỏi b mt v tớnh cht in cỏc mu nanoZnO,CdS v mng CuInS2 Tụi xin trõn trng cm n cỏc ng nghip ó ng h v to mi iu kin thun li giỳp tụi hon thnh lun ỏn Cui cựng, tụi mun ginh li cm n cho nhng ngi thõn yờu nht ca tụi Bn Lun ỏn ny l mún qu quý giỏ tụi xin c tng cho cha m thõn yờu ca tụi H Ni, ngy 06 thỏng 05 nm 2014 Tỏc gi lun ỏn Lu Th Lan Anh Danh mc ký hiu v ch vit tt Danh mc cỏc ký hiu Ký hiu Tờn ting Anh Tờn ting Vit A Quality factor H s phm cht D Average crystallite size Kớch thc tinh th trung bỡnh E Energy Nng lng e Electron in t EA Ionization energy Nng lng ion húa EC Conduction band energy Nng lng vựng dn EF Fermi energy Nng lng Fermi Eg Optical band gap energy rng vựng cm quang EV Valence band energy Nng lng nh vựng hoỏ tr ff fill factor H s lp y h Hole L trng J Current density Mt dũng Jmax Current density at maximum power output Mt dũng cụng sut cc i JSC Short circuit current density Mt dũng ngn mch R Resistance between the contacts in tr tip xỳc RS Serial resistance in tr ni tip Rsh Shunt resistance in tr ngn mch Rsheet Sheet resistance in tr b mt t Time Thi gian T Transmitance truyn qua TA Absolute temperature Nhit tuyt i TC Calcined temperature Nhit Te Enviromental temperature Nhit lm vic, nhit mụi trng TS Substrate temperature Nhit V Voltage in ỏp Vmax Voltage at maximum power output in ỏp cụng sut cc i VOC Open circuit voltage in ỏp h mch Absorption coefficient H s hp th Thickness Chiu dy Conversion efficiency of the solar cell Hiu sut chuyn i ca pin mt tri Wavelength Bc súng ex Excitation wavelength Bc súng kớch thớch e Electron mobility linh ng in t p Hole mobility linh ng l trng Resistivity in tr sut Danh mc cỏc ch vit tt Ký hiu Tờn ting Anh Tờn ting Vit AFM Atomic Force Microscope Hin vi lc nguyờn t CBD Chemical Bath Deposition Lng ng b húa hc CH Chacopyrite structure Cu trỳc Chacopyrite CIS Complex Impedance Spectroscopy Ph tr khỏng phc CVD Chemical vapour deposition Lng ng t pha hi húa hc EDX Energy Dispersive X-ray Tỏn sc nng lng tia X ETA Extremely thin absorber Cht hp th chiu dy rt mng FESEM FTO Field Emission Scanning Electron Hin vi in t quột phỏt x trng Microscope Tin oxide doped Fluorine ễxit thic pha Flo FWHM Full width at half maximum rng bỏn cc i ILGAR Ion Layer Gas Reaction Phn ng pha khớ lp ion ITO Tin oxide doped Indium ễxit thic pha Indi IZO Zinc oxide doped Indium ễxit km pha Indi PV Photovoltaic Effect Hiu ng quang in Solar cells T bo mt tri PMT SCAPS1D Solar Cell CAPacitance Simulator in CAP-mụ phng mt chiu pin mt Dimension tri SEM Scanning Electron Microscope Hin vi in t quột SPD Spray Pyolysis Deposition Phun ph nhit phõn TCO Transparent conducting oxide ễxớt dn in sut USPD Ultrasonic Spray Pyolysis Deposition Phun ph nhit phõn h tr siờu õm UV-VIS XRD UV-VIS Spectrophotometer Mỏy quang ph hp th UV-VIS X-ray diffraction Nhiu x tia X Danh mc cỏc bng Bng 1.1 D bỏo cụng sut nng lng tỏi to nm 2030-2035 v nm 2050 [143] 15 Bng 1.2 Cỏc thụng s c trng ca PMT CuInS2 lý tng v PMT CuInS2 thc t hiu sut cao nht hin [71],[153] 29 Bng 1.3 Mt s tớnh cht vt lý ca vt liu ZnO 36 Bng 2.1 Bng túm tt cỏc phng phỏp s dng kho sỏt cỏc lp chc nng 44 Bng 2.2 Danh mc cỏc húa cht s dng 45 Bng 2.3 Tr s ng kớnh aerosol ph thuc loi dung mụi 46 Bng 2.4 Cỏc kiu dao ng ca mng nano ZnO 49 Bng 2.5 Cỏc thụng s kớch thc mng ZnO ph thuc nhit lng ng 57 Bng 2.6 Danh mc húa cht s dng 67 Bng 2.7 Cỏc thụng s cu trỳc v kớch thc tinh th ca cỏc mu CuInS2 69 Bng 2.8 Thnh phn cỏc nguyờn t cỏc mu CIS-06, CIS-08, CIS-12, CIS-21, CIS-26 69 Bng 2.9 Cỏc thụng s in ca mu lng ng vi chiu dy khỏc 72 Bng 2.10 Danh mc húa cht s dng 73 Bng 2.11 Cỏc thụng s in ca cỏc mu CdS lng ng 76 Bng 3.1 S liu mụ phng theo s tng ng ca h vt liu Glass/ITO/nanoZnO/CdS/CuInS2/Ag 85 Bng 4.1 Cỏc thụng s u vo mụ phng nh hng ca nhit Te 100 Bng 4.2 Kt qu mụ phng theo nhit Te 101 Bng 4.3 Thụng s c bn u vo mụ phng 103 Bng 4.4 Cỏc thụng s ca PMT mụ phng bng SCAPS-1D chiu dy lp hp th thay i 105 Bng 4.5 Cỏc thụng s quang in ca pin mt tri mụ phng bng SCAPS-1D 106 Bng 4.6 Cỏc thụng s quang in ca pin mt tri vi chiu dy lp hp th khỏc 110 Bng 4.7 Cỏc thụng s u vo mụ phng s dng trng hp so sỏnh vi mu thc nghim 110 Bng 4.8 So sỏnh thụng s ca mu thc nghim PMT -10 v mu mụ phng M05 112 Bng 4.9 Cỏc thụng s quang in ca pin mt tri vi nng mui km acetat khỏc 113 Danh mc cỏc hỡnh v, th Hỡnh 1.1 Xu hng tiờu th nng lng ton cu t 1990 n 2040 [2] 13 Hỡnh 1.2 Cụng sut cỏc ngun nng lng tỏi to nhng nm gn õy (1) Nng lng tỏi to hydro, (2) nng lng giú, (3) nng lng sinh khi, (4) nng lng mt tri, (5) nng lng a nhit [6] 14 Hỡnh 1.3 S phỏt trin ca cỏc th h pin mt tri [10] 17 Hỡnh 1.4 S minh nguyờn lý hot ng ca pin mt tri 18 Hỡnh 1.5 Cu trỳc mt chiu ca PMT chuyn tip PN ng cht 19 Hỡnh 1.6 th mt dũng ngn mch Jsc ph thuc vo rng vựng cm Eg [14], [18] 21 Hỡnh 1.7 th in ỏp h mch Voc ph thuc vo rng vựng cm Eg [18] 22 Hỡnh 1.8 th hiu sut quang in ph thuc vo rng vựng cm Eg [18] 23 Hỡnh 1.9 c trng J-V ca PMT iu kin ti v chiu sỏng [22] 23 Hỡnh 1.10 S tng ng ca PMT thc [23], [24] 24 Hỡnh1.11 th ph thuc nh hng ca cỏc in tr lờn c trng J-V sỏng [24],[23],[22] a)nh hng ca RS b) nh hng ca Rsh 24 Hỡnh 1.12 Cu trỳc PMT mng mng chalcopyrite [11] 27 Hỡnh 1.13 Trng thỏi in t ca bỏn dn khi(a), tinh th nh(b) v phõn t(c) 31 Hỡnh 1.14 Gin nng lng ca cỏc bỏn dn 31 Hỡnh 1.15 Gin nng lng hai trng hp (gi thit rng nng lng vựng cm ca bỏn dn A ln hn bỏn dn B v cỏc photon c hp th B) 33 Hỡnh 1.16 Gin nng lng ca pin mt tri cu trỳc nano 34 Hỡnh 1.17 S cỏc dng cu trỳc ca pin mt tri cu trỳc nano 34 Hỡnh 1.18 Cu trỳc tinh th Wurtzite ca vt liu ZnO 36 Hỡnh 1.19 Cu trỳc vựng nng lng ca hp cht AIIBVI (a) v ca ZnO (b) 38 Hỡnh 1.20 S nguyờn lý ca phng phỏp phun ph nhit phõn [69], [70] 39 Hỡnh 1.21 S h phun ph nhit phõn h tr siờu õm 40 Hỡnh 1.22 H thit b USPD kt hp ILGAR 42 Hỡnh 2.1 Cu trỳc pin mt tri mng mng cu trỳc nano 44 Hỡnh 2.2 nh FESEM ca cỏc mu mng nano ZnO lng ng TS=420oC vi cỏc t l th tớch ca C3H7OH v nc (nh trỏi l phúng i 100k, nh phi l phúng i 25k 47 Hỡnh 2.3 S va chm ca cỏc aerosol lờn trờn b mt núng [77] 48 Hỡnh Ph tỏn x Raman ca cỏc mu mng nano ZnO lng ng TS=420oC 50 Hỡnh 2.5 Kt qu tỏch ph Raman thu c di s súng 300 ữ 500 cm-1 bng k thut tỏch ph trờn c s phõn b Lorenzt 51 Hỡnh 2.6 nh FESEM ca cỏc mu mng nano ZnO lng ng vi cỏc ngun mui km (nh trỏi l phúng i 100k, nh phi l phúng i 25k) 52 Hỡnh 2.7 Ph tỏn x Raman ca cỏc mu mng nano ZnO lng ng vi cỏc ngun mui km52 Hỡnh 2.8 Kt qu tỏch ph Raman di s súng 300 ữ 500 cm- ca cỏc mu mng nanoZnO 53 Hỡnh 2.9 Ph truyn qua ca cỏc mu nano ZnO lng ng vi cỏc ngun mui km (a) Z-A (b) Z-N v (c) Z-C 54 Hỡnh 2.10 th quan h gia (h)2 v h ca mu mng nano ZnO lng ng vi cỏc ngun mui (a) Z-A (b) Z-N v (c) Z-C 55 Hỡnh 2.11 nh FESEM ca cỏc mu mng nano ZnO lng ng nhit TS = 400ữ500oC (a) Z-400, (b) Z-420, (c) Z-450 v (d) Z-500 56 Hỡnh 2.12 Gin nhiu x tia X ca cỏc mu mng nano ZnO lng ng nhit TS = 400ữ500oC 56 Hỡnh 2.13 Ph tỏn x Raman ca cỏc mu mng nano ZnO lng ng nhit TS = 400ữ500oC 58 Hỡnh 2.14 Kt qu tỏch ph Raman di s súng 300 ữ 500 cm-1 cỏc mu mng nano ZnO (a) Z-400 (b) Z-420 (c) Z-450 v (d) Z-5058 Hỡnh2.15 Ph truyn qua ca mu mng nano ZnO lng ng nhit TS = 400ữ500oC 59 Hỡnh 2.16 th quan h gia (h)2 vi h ca mu lng ng nhit TS = 400ữ500oC 60 Hỡnh 2.17 nh FESEM ca cỏc mu mng nano ZnO lng ng trờn cỏc (a) Z-G (b) Z-I v (c) Z-F 61 Hỡnh 2.18 Gin nhiu x tia X ca cỏc mu mng nano ZnO lng ng trờn cỏc (a) Z-G, (b) Z-I v (c) Z-F 62 Hỡnh 2.19 Ph truyn qua cỏc mu mng nano ZnO lng ng trờn cỏc (a) Z-G, (b) Z-I v (c) Z-F 62 Hỡnh 2.20 th quan h gia (h)2 vi h ca cỏc mu mng nano ZnO lng ng trờn cỏc (a) Z-G, (b) Z-I v (c) Z-F 63 Hỡnh 2.21 Gin nhiu x tia X ca cỏc mu mng nano ZnO lng ng cỏc tc lng ng (a) Z-05, (b) Z-1 v (c) Z-4 63 Hỡnh 2.22 nh FESEM ca cỏc mu mng nano ZnO lng ng cỏc tc lng ng (a) Z-05, (b) Z-1 v (c) Z-4 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Trung v Vừ Thch Sn, nh hng ca s pha nhụm lờn vi cu trỳc v tớnh cht quang ca mng ZnO nano Hi ngh Vt lý cht rn v Khoa hc vt liu ton quc ln th 8, Thỏi Nguyờn 4-6/11/2013 12) Luu Thi Lan Anh, Luong Huu Bac, Pham Phi Hung, Nguyen uc Hieu, Tran Thanh Thai, Mateus Manuel Neto and Vo Thach Son, Influence of spray rate on structural and optical properties of sprayed ZnO films International Symposium on Frontiers in Materials Science 17-19 Nov 2013, Hanoi, Vietnam 130 Ph lc Cỏc thụng s pin mt tri trờn c s lp hp th CuInS2 ch to bng phng phỏp phun ph nhit phõn ca mt s nghiờn cu ó cụng b Thụng s Cu trỳc Nm TL VOC mV JSC mA/cm2 ff % % S cm2 cụng b trớch dn CuInS2/Cd(Zn)S 440 2,34 43 2,66 0,38 1985 [142] Glass/SnO2:F/CuInS2/Al 330 16,1 38 3,0 0,03 1987 [3] Glass/ZnO:In/CuInS2/Al 280 13,1 38 2,0 0,03 1987 [174] Glass/ITO/CuIn(S0,5Se0,5)/ CdZnS:In/Al 325 10,3 33 1,1 0,2 1994 [156] Glass/ZnO/InS(CBD)/CuInS2 456 14,6 43 2,9 - Glass/ZnO/CdS/CuInS2 443 6,7 37 1,0 - 2004 [102] Glass/ITO/CdS/CuInS2 205 10,4 30 0,65 - 2005 [176] Glass/ITO/TiO2/In2S3/CIS Glass/ITO/ZnOrod/TiO2/In2S3/CIS 425 445 5,5 12 41 43 2,2 - 2008 [177] Glass/ITO/CuInS2/In2S3/Ag (b gi húa sau 12h) 550 55,9 26,4 16,5 0,01 2009 [149] ZnO/In2S3/CuInS2/CuInS2:Al 300 0,52.10-3 - - - 2010 [178] Glass/TCO/ZnOrod/In2S3/CuInS2 441 15,7 60,4 4,17 0,015 2010 [179] Glass/FTO/TiO2/In2S3/CuInS2/Mo 480 4,1 27 0,53 - 2011 [180] Glass/FTO/TiO2/In2S3/CuInS2/Mo 370 11,2 35 1,7 0,5 2011 [181] Glass/FTO/ZnO/CdS coreshell nanorod 578 5,42 - 1,07 - 2012 [182] Glass/ZnO/CdS/CuInS2 425 14,02 28,75 1,71 - 2012 [126] Glass/FTO/ZnOrod/CdS/CuInS2 425 8,7 49,5 1,84 0,031 2014 LA 131 Mc lc Danh mc ký hiu v ch vit tt Danh mc cỏc bng Danh mc cỏc hỡnh v, th M U CHNG I - TNG QUAN TI LIU 13 1.1 Nng lng mt tri - ngun nng lng ca tng lai 13 1.2 Hiu ng PV (PhotoVoltaic Effect) v linh kin quang in s dng hiu ng PV 16 1.3 C s vt lý ca pin mt tri 18 1.3.1 Nguyờn lý hot ng 18 1.3.2 c trng J-V 18 1.3.2.1 Dũng ngn mch Jsc 19 1.3.2.2 in ỏp h mch Voc 21 1.3.2.3 H s lp y ff (fill factor) v hiu sut quang in (Conversion Efficiency) 22 1.3.2.4 c trng J-V ca pin mt tri lý tng 23 1.3.2.5 c trng J-V ca pin mt tri thc 24 1.3.2.6 S mt mỏt hiu sut ca pin mt tri 25 1.4 Pin mt tri mng mng chalcopyrite 26 1.4.1 Cu trỳc ca pin mt tri mng mng chalcopyrite 27 1.4.2 Vt liu chalcopyrite 28 1.5 Pin mt tri mng mng cu trỳc nano 29 1.5.1 Cỏc tớnh cht c bn ca vt liu cu trỳc nano 30 1.5.1.1 Hiu ng kớch thc tinh th 30 1.5.1.2 Cu trỳc nng lng 31 1.5.1.3 Quỏ trỡnh phõn chia ht ti 32 1.5.1.4 Quỏ trỡnh gúp ht ti 33 1.5.2 Gin nng lng ca pin mt tri cu trỳc nano 34 1.5.3 Cỏc cu hỡnh pin mt tri cu trỳc nano 34 1.6 Vt liu km oxide (ZnO) 35 1.6.1 Vt liu ZnO 35 132 1.6.1.1 Cu trỳc tinh th ca ZnO 35 1.6.1.2 Tớnh cht in v quang ca mng ZnO 37 1.6.2 Cụng ngh lng ng cỏc lp chc nng ca pin mt tri 38 1.6.2.1 Phng phỏp phun ph nhit phõn SPD 38 1.6.2.2 Phng phỏp ILGAR (Ion Layer Gas Reaction) 41 Kt lun chng 42 CHNG 2-NGHIấN CU CễNG NGH LNG NG CC LP CHC NNG TRONG CU TRC PMT MNG MNG 43 2.1 Nghiờn cu lng ng mng nano ZnO bng phng phỏp USPD 45 2.1.1 Thc nghim 45 2.1.1.1 Chun b húa cht 45 2.1.1.2 Lng ng mng nano ZnO 45 2.1.2 Kt qu v tho lun 46 2.1.2.1 La chn dung mụi 46 2.1.2.2 nh hng ca cỏc anion 51 2.1.2.3 nh hng ca nhit lng ng 55 2.1.2.4 nh hng ca loi 60 2.1.2.5 nh hng ca tc lng ng 63 2.1.2.6 nh hng ca nng mui km 65 2.2 Nghiờn cu lng ng lp hp th CuInS2 bng phng phỏp USPD 67 2.2.1 Chun b húa cht 67 2.2.2 Lng ng mng CuInS2 68 2.2.3 Kt qu v tho lun 68 2.3 Nghiờn cu lng ng lp m CdS bng phng phỏp USPD-ILGAR 73 2.3.1 Ti li cn lp m pin mt tri mng mng 73 2.3.2 Mng CdS 73 2.3.3 Lng ng lp m nano CdS bng phng phỏp USPD-ILGAR 73 2.3.3.1 Chun b húa cht 73 2.3.3.2 Thc nghim 74 2.3.4 Kt qu v Tho lun 74 CHNG 3-KHO ST CC PHN BIấN ZnO/CdS V CdS/CuInS2 BNG PHNG PHP PH TR KHNG PHC CIS 78 3.1 Phng phỏp ph tr khỏng phc CIS 78 133 3.2 ng dng phng phỏp ph tr khỏng phc nghiờn cu cỏc linh kin cu trỳc lp 80 3.3 Thc nghim 82 3.3.1 Chun b mu 82 3.3.2 Kho sỏt cỏc phõn biờn ZnO/CdS v CdS/CuInS2 82 3.4 Kt qu v tho lun 84 3.4.1 Kho sỏt ph CIS ca h vt liu Glass/ITO/nanoZnO/CdS/CuInS2/Ag 84 3.4.2 Mụ hỡnh húa h vt liu Ag/ITO/ZnO/CdS/CuInS2/Ag 84 Kt lun chng 94 CHNG 4-THIT K V CH TO TH NGHIM PIN MT TRI CU TRC NANO H GLASS/ITO/nanoZnO/CdS/CuInS2 95 4.1 Thit k pin mt tri cu trỳc lp kiu Glass/ITO/nanoZnO/CdS/CuInS2 95 4.1.1 Mụ hỡnh s 95 4.1.2 Chng trỡnh mụ phng SCAPS 96 4.1.3 Thit k pin mt tri mng mng cu trỳc nano 98 4.1.3.1 La chn cu trỳc 98 4.1.3.2 iu kin mụi trng 99 4.2 Ch to pin mt tri mng mng cu trỳc Glass/ ITO/nanoZnO/CdS/CuInS2/Me .108 4.2.1 c trng quang in ca pin mt tri mng mng h Glass/ITO/nanoZnO/CdS/CuInS2 109 4.2.1.1 nh hng ca chiu dy lp hp th CuInS2 109 4.2.1.2 nh hng ca lp ca s nano ZnO 112 Kt lun chng 113 KT LUN 115 TI LIU THAM KHO 116 Danh mc cỏc cụng trỡnh ó cụng b ca Lun ỏn 128 Ph lc 130 ... nano ZnO n hot ng ca pin mt tri mng mng glass/TCO/nanoZnO/CdS/CuInS2/Me lng ng bng phng phỏp USPD-ILGAR Mc ớch nghiờn cu ca lun ỏn 1) Nghiờn cu v phỏt trin cụng ngh lng ng khụng chõn khụng: USPD-ILGAR. .. 3.3 Cu trỳc pin mt tri mng mng CuInS2 (a) v gin nng lng (b) 81 Hỡnh 3.4 S tng ng ca pin mt tri mng mng Glass/ITO/nanoZnO/CdS/CuInS2/Me (a) v ph CIS ca h vt liu Glass/ITO/nanoZnO/CdS/CuInS2/Me... cỏc mu mng nano ZnO lng ng vi cỏc ngun mui km52 Hỡnh 2.8 Kt qu tỏch ph Raman di s súng 300 ữ 500 cm- ca cỏc mu mng nanoZnO 53 Hỡnh 2.9 Ph truyn qua ca cỏc mu nano ZnO lng ng vi