modeling and simulation of the capacitive acceleration sensor

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1.3 MEMS Modeling and Simulation
2.2.1 Position Measurement with Capacitance
3.1 Overview o f SUGAR
3.2.1 A simple example of the MEMS structure
3.2.5 Gap Model with Contact Forces
3.3 Simulation Program based on SUGAR
3.4.2 Differential Capacitive Accelerometer with a Single Beam
3.4.3 Differential Capacitive Accelerometer with Two Symmetric Beams
3.4.4 Two Parallel Beams Accelerometer
3.4.5 Four Symmetric Beams Accelerometer
3.5 Experimental Calibration Set-up and Experimental Results
3.5.1 Fabricated Sensor and Calibration Set-up
3.6 Comparison o f the simulation and experimental results

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