[...]... about 1 US dollar INTRODUCTION 10 0k 1M ,9 Clock rate (Hz) 10 M 1G 10 G 10 Pentium IV y 10 - Pentium I 10 '•a 10 - 80386 Pentium ID 486 80286 jj 10 4 H £ z 10 3 4004, 10 2 19 70 19 75 8086 19 80 19 85 19 90 Year 19 95 2000 2005 Figure 1. 1 Moore's law for integrated circuits: exponential growth in the number of transistors in an 1C during the past 30 years 10 ' 10 ' I 10 01 1 a 10 7 5 E 10 o 10 10 5 10 ' 10 J 19 70 19 75 19 80... 40 0-5 00 Pressure sensors: automotive, medical, and industrial 39 0-7 60 35 0-5 40 Accelerometers and gyroscopes: automotive and aerospace 2 5-4 0 Optical switches and displays: photonics and communications 51 0 -1 050 Other devices such as microrelays, sensors, disk heads TOTAL IN MILLION € 16 7 5-2 890 2003 300 0-4 450 11 0 0-2 15 0 70 0 -1 400 44 0-9 50 12 3 0-2 470 6470 11 420 developments in methods to fabricate true three-dimensional... Sensor 13 .4.3 Pressure Sensor 13 .4.4 Humidity Sensor 13 .4.5 SAW-Based Gyroscope 13 .5 Concluding Remarks References 347 348 349 350 352 353 353 354 358 358 13 IDT 13 .1 13.2 13 .3 13 .4 359 359 360 364 367 367 3 71 375 376 380 395 395 14 MEMS- IDT Microsensors 14 .1 Introduction 14 .2 Principles of a MEMS- IDT Accelerometer 14 .3 Fabrication of a MEMS- IDT Accelerometer 14 .3 .1 Fabrication of the SAW Device 14 .3.2... Device and Seismic Mass 14 .4 Testing of a MEMS- IDT Accelerometer 14 .4 .1 Measurement Setup 14 .4.2 Calibration Procedure 14 .4.3 Time Domain Measurement 14 .4.4 Experimental 14 .4.5 Fabrication of Seismic Mass 14 .5 Wireless Readout 14 .6 Hybrid Accelerometers and Gyroscopes 14 .7 Concluding Remarks References 397 397 398 399 4 01 402 402 403 404 405 406 408 412 414 416 416 15 Smart Sensors and MEMS 15 .1 Introduction... certain acoustic microsensors, and INTRODUCTION -1 0 -9 -8 Dimension of object – 7 - 6 - 5 - 4 -3 -2 A Urn IR Visible -1 0 mm cm m Radio waves • H Ultrasound H Sensors Nano- Micromachines k Inm k, 1mm 1m Figure 1. 10 Dimensions of microsensors, MEMS, and micromachines; they are compared with some everyday objects The horizontal axis has a logarithmic scale Modified from Gardner (19 94) MEMS devices are described...x CONTENTS 12 .2 .1 Mask Generation 12 .2.2 Wafer Preparation 12 .2.3 Metallisation 12 .2.4 Photolithography 12 .2.5 Wafer Dicing 12 .3 Deposition of Waveguide Layer 12 .3 .1 Introduction 12 .3.2 TMS PECVD Process and Conditions 12 .4 Concluding Remarks References Microsensors Introduction Saw Device Modeling via Coupled-mode Theory Wireless SAW-based Microsensors Applications 13 .4 .1 Strain Sensor 13 .4.2 Temperature... microfluidics and photonics and communications However, there have been some exciting EMERGENCE OF MICROMACHINES Figure 1. 9 Pie chart showing the relative size of the current world MEMS market The units shown are billions of euros Table 1. 1 Sales in millions of euros of MEMS devices according to the System Planning Corporation Market Survey (19 99) Devices and applications 19 96 Ink-jet printers, mass-flow sensors,... currently automotive; in 19 97, the sales of pressure Figure 1. 6 Sensor market by application for the United Kingdom From Gardner (19 94) 3 These figures relate to the sensor market and hence exclude the larger markets for disk and ink-jet printer heads EVOLUTION OF MEMS 5 sensors was about 700 million euros and that for accelerometers was about 200 million euros (see Tables 8 .10 and 8 .11 ) As the market for... extremely small parts (i.e microparts).' Early efforts focused upon silicon technology and resulted in a number of successful micromechanical devices, such as pressure sensors and ink-jet printer nozzles Yet, these are, perhaps, more accurately described as devices rather than as MEMS The reason Figure 1. 7 Overview of microsystems technology and the elements of a MEMS chip From Fatikow and Rembold (19 97) INTRODUCTION... materials and substrates, and electronically steerable antennas He is the Editor of the Journal of Wave-Material Interaction and the Editor-in-Chief of the Journal of Smart Materials and Structures published by the Institute of Physics, UK He has authored more than 400 technical papers and six books He has eight patents pertinent to conducting polymers, smart structures and smart antennas, and phase . past 30 years 10 ' 10 ' I 10 01 1 10 7 a E 10 5 o 10 10 5 10 ' 10 J 19 70 19 75 19 80 19 85 19 90 19 95 2000 2005 Year introduced Figure 1. 2 Size of memory chips (DRAM) and minimum. 408 14 .5 Wireless Readout 412 14 .6 Hybrid Accelerometers and Gyroscopes 414 14 .7 Concluding Remarks 416 References 416 15 Smart Sensors and MEMS 417 15 .1 Introduction 417 15 .2 Smart. speed in hertz. 1 euro (€) is currently worth about 1 US dollar. INTRODUCTION 10 10 0k ,9 Clock rate (Hz) 1M 10 M 1G 10 G y 10 - 10 &apos ;- •a 10 - jj 10 4 H £ z 10 3 10 2 80386 Pentium