[...]... Bibliography 17 2 17 4 17 4 17 6 18 0 18 2 18 3 18 5 18 5 18 6 18 7 CHAPTER 7 MEM Structures and Systems in RF Applications 18 9 Signal Integrity in RF MEMS Passive Electrical Components: Capacitors and Inductors Quality Factor and Parasitics in Passive Components Surface-Micromachined Variable Capacitors Bulk-Micromachined Variable Capacitors Micromachined Inductors Microelectromechanical Resonators Comb-Drive Resonators... Resonators Beam Resonators Coupled-Resonator Bandpass Filters Film Bulk Acoustic Resonators Microelectromechanical Switches Membrane Shunt Switch Cantilever Series Switch Summary References Selected Bibliography 18 9 19 0 19 0 19 2 19 5 19 7 200 2 01 203 206 208 211 213 213 214 214 216 CHAPTER 8 Packaging and Reliability Considerations for MEMS 217 Key Design and Packaging Considerations Wafer or Wafer-Stack Thickness... plays an important, essential role on the national stage Dr Nadim Maluf has put together one of the finest MEMS primers that you may find on the bookshelf today Written in a no-nonsense, clear style, the book brings the practicing engineer and student alike to an understanding of how MEMS are designed and fabricated Dr Maluf s book concentrates mostly on how to design and manufacture MEMS This is to be... Micro; and Stephen Durant and Christopher Eide of Morrison and Foerster Evan Green and Carter Hand of New Focus were kind enough to review portions of the manuscript Thanks go to our editor, Mark Walsh, for his unwavering support Kirt Williams further thanks his former graduate advisor, Professor Richard S Muller, for having such a profound effect on his life for introducing him to MEMS (Courtesy of: Engineering. .. and added an entirely new section on reliability and quality assurance We added several references to each chapter to direct the advanced reader to the source of the material We also expanded the glossary to assist the novice in understanding and relating to a new terminology Many people provided us technical information and materials specifically for the second edition of this book We thank Bardia... wireless and radio frequency (RF) as a new market for MEMS technology, we dedicated Chapter 7 to describe recent developments and introductions in this promising area In Chapters 4 through 7, we expanded where appropriate on the xv xvi Preface application and on the system that includes the MEMS product We also expanded the material in Chapter 8 on packaging to include packaging of optical MEMS products and. .. be expected of Dr Maluf, who has impeccable MEMS credentials Trained in MEMS for his Ph.D at Stanford University, Dr Maluf has spent his postdoctoral career as a practicing MEMS engineer and manager at Lucas NovaSensor, one of the early MEMS companies in the field His industrial career has been focused both on bringing MEMS products successfully to market and on defending his company’s market share... accelerometers, and yaw-rate sensors, and new emerging products in valving and pumping Chapter 5 now covers the applications of MEMS in photonics, including displays, optical sensors, and new products that are now common in fiber-optic telecommunications The focus of Chapter 6 is on applications in life sciences, with emphasis on new products and developments specific to biochemical analysis and microfluidics... For example, our hearty band constantly worried if any scholarly journal would publish the papers we wrote Sources of research funding were hard to find and difficult to maintain MEMS fabrication was itself a major issue Topics of conversation were frequently about the nature, properties, and standardization of the polysilicon that the pioneering band of researchers was using to demonstrate the early,... other, the 10 ,000 MEMS Designers.” For the field to fully take root and become ubiquitous, there must be an unprecedented training of tens of thousands of MEMS engineers Already, the demand for MEMS experts has far outstripped the ability of academia to train them The only hope is for existing engineers to learn the basics of MEMS and then go up the MEMS learning curve in the traditional way (i.e., . Capacitors 19 2 Bulk-Micromachined Variable Capacitors 19 5 Micromachined Inductors 19 7 Microelectromechanical Resonators 200 Comb-Drive Resonators 2 01 Beam Resonators 203 Coupled-Resonator Bandpass. Heads 11 6 Micromachined Valves 11 9 Micropumps 12 6 Summary 12 8 References 12 9 Selected Bibliography 13 1 CHAPTER 5 MEM Structures and Systems in Photonic Applications 13 3 Imaging and Displays 13 3 Infrared. affecting the validity of any trade - mark or service mark. International Standard Book Number: 1- 5 805 3-5 9 0-9 10 9876543 21 To our families Tanya, Ella, and Jad Erika, Gordon, Brynn, and Reed . Contents Foreword