Mục lục

  • Cover

  • Frontmatter

    • Half Title Page

    • Title Page

    • Copyright

    • Table of Contents

    • Foreword

    • Preface

    • Acknowledgments

    • Thin Films - A Historical Perspective

    • Chapter 1: A Review of Materials Science

      • 1.1. Introduction

      • 1.2. Structure

      • 1.3. Defects in Solids

      • 1.4. Bonding of Materials

      • 1.5. Thermodynamics of Materials

      • 1.6. Kinetics

      • 1.7. Nucleation

      • 1.8. Conclusion

      • Chapter 2: Vacuum Science and Technology

        • 2.1. Kinetic Theory of Gases

        • 2.2. Gas Transport and Pumping

        • 2.3. Vacuum Pumps and Systems

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