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A CRC title, part of the Taylor & Francis imprint, a member of the
Taylor & Francis Group, the academic division of T&F Informa plc.
MEMS and
Microstructures
in
Aerospace
Applications
Edited by
Robert Osiander
M. Ann Garrison Darrin
John L. Champion
Boca Raton London New York
© 2006 by Taylor & Francis Group, LLC
Published in 2006 by
CRC Press
Taylor & Francis Group
6000 Broken Sound Parkway NW, Suite 300
Boca Raton, FL 33487-2742
© 2006 by Taylor & Francis Group, LLC
CRC Press is an imprint of Taylor & Francis Group
No claim to original U.S. Government works
Printed in the United States of America on acid-free paper
10987654321
International Standard Book Number-10: 0-8247-2637-5 (Hardcover)
International Standard Book Number-13: 978-0-8247-2637-9 (Hardcover)
Library of Congress Card Number 2005010800
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Library of Congress Cataloging-in-Publication Data
Osiander, Robert.
MEMS and microstructures in aerospace applications / Robert Osiander, M. Ann Garrison Darrin,
John Champion.
p. cm.
ISBN 0-8247-2637-5
1. Aeronautical instruments. 2. Aerospace engineering Equipment and supplies. 3.
Microelectromechanical systems. I. Darrin, M. Ann Garrison. II. Champion, John. III. Title.
TL589.O85 2005
629.135 dc22 2005010800
Visit the Taylor & Francis Web site at
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and the CRC Press Web site at
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is the Academic Division of T&F Informa plc.
© 2006 by Taylor & Francis Group, LLC
Preface
MEMS and Microstructures in Aerospace Applications is written from a program-
matic requirements perspective. MEMS is an interdisciplinary field requiring
knowledge in electronics, micromechanisms, processing, physics, fluidics, pack-
aging, and materials, just to name a few of the skills. As a corollary, space missions
require an even broader range of disciplines. It is for this broad group and especially
for the system engineer that this book is written. The material is designed for the
systems engineer, flight assurance manager, project lead, technologist, program
management, subsystem leads and others, including the scientist searching for
new instrumentation capabilities, as a practical guide to MEMS in aerospace
applications. The objective of this book is to provide the reader with enough
background and specific information to envision and support the insertion of
MEMS in future flight missions. In order to nurture the vision of using MEMS in
microspacecraft — or even in spacecraft — we try to give an overview of some of
the applications of MEMS in space to date, as well as the different applications
which have been developed so far to support space missions. Most of these
applications are at low-technology readiness levels, and the expected next step is
to develop space qualified hardware. However, the field is still lacking a heritage
database to solicit prescriptive requirements for the next generation of MEMS
demonstrations. (Some may argue that that is a benefit.) The second objective of
this book is to provide guidelines and materials for the end user to draw upon to
integrate and qualify MEMS devices and instruments for future space missions.
Osiander / MEMS and microstructures in Aerospace applications DK3181_prelims Final Proof page iii 1.9.2005 8:59pm
© 2006 by Taylor & Francis Group, LLC
Editors
Robert Osiander received his Ph.D. at the Technical University in Munich,
Germany, in 1991. Since then he has worked at JHU/APL’s Research and Tech-
nology Development Center, where he became assistant supervisor for the sensor
science group in 2003, and a member of the principal professional staff in 2004.
Dr. Osiander’s current research interests include microelectromechanical systems
(MEMS), nanotechnology, and Terahertz imaging and technology for applications
in sensors, communications, thermal control, and space. He is the principal inves-
tigator on ‘‘MEMS Shutters for Spacecraft Thermal Control,’’ which is one of
NASA’s New Millenium Space Technology Missions, to be launched in 2005.
Dr. Osiander has also developed a research program to develop carbon nanotube
(CNT)-based thermal control coatings.
M. Ann Garrison Darrin is a member of the principal professional staff and is a
program manager for the Research and Technology Development Center at The
Johns Hopkins University Applied Physics Laboratory. She has over 20 years
experience in both government (NASA, DoD) and private industry in particular
with technology development, application, transfer, and insertion into space flight
missions. She holds an M.S. in technology management and has authored several
papers on technology insertion along with coauthoring several patents. Ms. Darrin
was the division chief at NASA’s GSFC for Electronic Parts, Packaging and
Material Sciences from 1993 to 1998. She has extensive background in aerospace
engineering management, microelectronics and semiconductors, packaging, and
advanced miniaturization. Ms. Darrin co-chairs the MEMS Alliance of the Mid
Atlantic.
John L. Champion is a program manager at The Johns Hopkins University Applied
Physics Laboratory (JHU/APL) in the Research and Technology Development
Center (RTDC). He received his Ph.D. from The Johns Hopkins University, De-
partment of Materials Science, in 1996. Dr. Champion’s research interests include
design, fabrication, and characterization of MEMS systems for defense and space
applications. He was involved in the development of the JHU/APL Lorentz force
xylophone bar magnetometer and the design of the MEMS-based variable reflect-
ivity concept for spacecraft thermal control. This collaboration with NASA–GSFC
was selected as a demonstration technique on one of the three nanosatellites for the
New Millennium Program’s Space Technology-5 (ST5) mission. Dr. Champion’s
graduate research investigated thermally induced deformations in layered struc-
tures. He has published and presented numerous papers in his field.
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© 2006 by Taylor & Francis Group, LLC
Contributors
James J. Allen
Sandia National Laboratory
Albuquerque, New Mexico
Bradley G. Boone
The Johns Hopkins University Applied
Physics Laboratory
Laurel, Maryland
Stephen P. Buchner
NASA Goddard Space Flight Center
Greenbelt, Maryland
Philip T. Chen
NASA Goddard Space Flight Center
Greenbelt, Maryland
M. Ann Garrison Darrin
The Johns Hopkins University Applied
Physics Laboratory
Laurel, Maryland
Cornelius J. Dennehy
NASA Goddard Space Flight Center
Greenbelt, Maryland
Dawnielle Farrar
The Johns Hopkins University Applied
Physics Laboratory
Laurel, Maryland
Samara L. Firebaugh
United States Naval Academy
Annapolis, Maryland
Thomas George
Jet Propulsion Laboratory
Pasadena, California
R. David Gerke
Jet Propulsion Laboratory
Pasadena, California
Brian Jamieson
NASA Goddard Space Flight Center
Greenbelt, Maryland
Robert Osiander
The Johns Hopkins University Applied
Physics Laboratory
Laurel, Maryland
Robert Powers
Jet Propulsion Laboratory
Pasadena, California
Keith J. Rebello
The Johns Hopkins University Applied
Physics Laboratory
Laurel, Maryland
Jochen Schein
Lawrence Livermore National
Laboratory
Livermore, California
Theodore D. Swanson
NASA Goddard Space Flight Center
Greenbelt, Maryland
Danielle M. Wesolek
The Johns Hopkins University Applied
Physics Laboratory
Laurel, Maryland
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© 2006 by Taylor & Francis Group, LLC
Acknowledgments
Without technology champions, the hurdles of uncertainty and risk vie with cer-
tainty and programmatic pressure to prevent new technology insertions in space-
craft. A key role for these champions is to prevent obstacles from bringing
development and innovation to a sheer halt.
The editors have been fortunate to work with the New Millennium Program
(NMP) Team for Space Technology 5 (ST5) at the NASA Goddard Space Flight
Center (GSFC). In particular, Ted Swanson, as technology champion, and Donya
Douglas, as technology leader, created an environment that balanced certainty,
uncertainties, risks and pressures for ST5, micron-scale machines open and close
to vary the emissivity on the surface of a microsatellite radiator. These ‘‘VARI-E’’
microelectromechanical systems (MEMS) are a result of collaboration between
NASA, Sandia National Laboratories, and The Johns Hopkins University Applied
Physics Laboratory (JHU/APL). Special thanks also to other NASA ‘‘tech cham-
pions’’ Matt Moran (Glenn Research Center) and Fred Herrera (GSFC) to name a
few! Working with technology champions inspired us to realize the vast potential of
‘‘small’’ in space applications.
A debt of gratitude goes to our management team Dick Benson, Bill D’Amico,
John Sommerer, and Joe Suter and to the Johns Hopkins University Applied Physics
Laboratory for its support through the Janney Program. Our thanks are due to all the
authors and reviewers, especially Phil Chen, NASA, in residency for a year at the
laboratory. Thanks for sharing in the pain.
There is one person for whom we are indentured servants for life, Patricia M.
Prettyman, whose skills and abilities were and are invaluable.
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© 2006 by Taylor & Francis Group, LLC
Contents
Chapter 1
Overview of Microelectromechanical Systems and Microstructures
in Aerospace Applications 1
Robert Osiander and M. Ann Garrison Darrin
Chapter 2
Vision for Microtechnology Space Missions 13
Cornelius J. Dennehy
Chapter 3
MEMS Fabrication 35
James J. Allen
Chapter 4
Impact of Space Environmental Factors on Microtechnologies 67
M. Ann Garrison Darrin
Chapter 5
Space Radiation Effects and Microelectromechanical Systems 83
Stephen P. Buchner
Chapter 6
Microtechnologies for Space Systems 111
Thomas George and Robert Powers
Chapter 7
Microtechnologies for Science Instrumentation Applications 127
Brian Jamieson and Robert Osiander
Chapter 8
Microelectromechanical Systems for Spacecraft Communications 149
Bradley Gilbert Boone and Samara Firebaugh
Chapter 9
Microsystems in Spacecraft Thermal Control 183
Theodore D. Swanson and Philip T. Chen
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© 2006 by Taylor & Francis Group, LLC
Chapter 10
Microsystems in Spacecraft Guidance, Navigation, and Control 203
Cornelius J. Dennehy and Robert Osiander
Chapter 11
Micropropulsion Technologies 229
Jochen Schein
Chapter 12
MEMS Packaging for Space Applications 269
R. David Gerke and Danielle M. Wesolek
Chapter 13
Handling and Contamination Control Considerations
for Critical Space Applications 289
Philip T. Chen and R. David Gerke
Chapter 14
Material Selection for Applications of MEMS 309
Keith J. Rebello
Chapter 15
Reliability Practices for Design and Application of Space-Based MEMS 327
Robert Osiander and M. Ann Garrison Darrin
Chapter 16
Assurance Practices for Microelectromechanical Systems
and Microstructures in Aerospace 347
M. Ann Garrison Darrin and Dawnielle Farrar
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© 2006 by Taylor & Francis Group, LLC
1
Overview of
Microelectromechanical
Systems and
Microstructures in
Aerospace Applications
Robert Osiander and M. Ann Garrison Darrin
CONTENTS
1.1 Introduction 1
1.2 Implications of MEMS and Microsystems in Aerospace 2
1.3 MEMS in Space 4
1.3.1 Digital Micro-Propulsion Program STS-93 4
1.3.2 Picosatellite Mission 5
1.3.3 Scorpius Sub-Orbital Demonstration 5
1.3.4 MEPSI 5
1.3.5 Missiles and Munitions — Inertial Measurement Units 6
1.3.6 OPAL, SAPPHIRE, and Emerald 6
1.3.7 International Examples 6
1.4 Microelectromechanical Systems and Microstructures
in Aerospace Applications 6
1.4.1 An Understanding of MEMS and the MEMS Vision 7
1.4.2 MEMS in Space Systems and Instrumentation 8
1.4.3 MEMS in Satellite Subsystems 9
1.4.4 Technical Insertion of MEMS in Aerospace Applications 10
1.5 Conclusion 11
References 12
The machine does not isolate man from the great problems of nature but plunges him
more deeply into them.
Saint-Exupe
´
ry, Wind, Sand, and Stars, 1939
1.1 INTRODUCTION
To piece together a book on microelectromechanical systems (MEMS) and micro-
structures for aerospace applications is perhaps foolhardy as we are still in the
Osiander / MEMS and microstructures in Aerospace applications DK3181_c001 Final Proof page 1 1.9.2005 11:41am
1
© 2006 by Taylor & Francis Group, LLC
infancy of micron-scale machines in space flight. To move from the infancy of a
technology to maturity takes years and many awkward periods. For example, we did
not truly attain the age of flight until the late 1940s, when flying became accessible to
many individuals. The insertion or adoption period, from the infancy of flight, began
with the Wright Brothers in 1903 and took more than 50 years until it was popularized.
Similarly, the birth of MEMS began in 1969 with a resonant gate field-effect transistor
designed by Westinghouse. During the next decade, manufacturers began using bulk-
etched silicon wafers to produce pressure sensors, and experimentation continued into
the early 1980s to create surface-micromachined polysilicon actuators that were used in
disc drive heads. By the late 1980s, the potential of MEMS devices was embraced, and
widespread design and implementation grew in the microelectronics and biomedical
industries. In 25 years, MEMS moved from the technical curiosity realm to the
commercial potential world. In the 1990s, the U.S. Government and relevant agencies
had large-scale MEMS support and projects underway. The Air Force Office of
Scientific Research (AFOSR) was supporting basic research in materials while the
Defense Advanced Research Projects Agency (DARPA) initiated its foundry service in
1993. Additionally, the National Institute of Standards and Technology (NIST) began
supporting commercial foundries.
In the late 1990s, early demonstrations of MEMS in aerospace applications began
to be presented. Insertions have included Mighty Sat 1, Shuttle Orbiter STS-93, the
DARPA-led consortium of the flight of OPAL, and the suborbital ride on Scorpius
1
(Microcosm). These early entry points will be discussed as a foundation for the next
generation of MEMS in space. Several early applications emerged in the academic
and amateur satellite fields. In less than a 10-year time frame, MEMS advanced to a
full, regimented, space-grade technology. Quick insertion into aerospace systems
from this point can be predicted to become widespread in the next 10 years.
This book is presented to assist in ushering in the next generation of MEMS that
will be fully integrated into critical space-flight systems. It is designed to be used by
the systems engineer presented with the ever-daunting task of assuring the mitiga-
tion of risk when inserting new technologies into space systems.
To return to the quote above from Saint Exupe
´
ry, the application of MEMS and
microsystems to space travel takes us deeper into the realm of interactions with
environments. Three environments to be specific: on Earth, at launch, and in orbit.
Understanding theimpacts of theseenvironments on micron-scale devices isessential,
and this topic is covered at length in order to present a springboard for future gener-
ations.
1.2 IMPLICATIONS OF MEMS AND MICROSYSTEMS
IN AEROSPACE
The starting point for microengineering could be set, depending on the standards,
sometime in the 15th century, when the first watchmakers started to make pocket
watches, devices micromachined after their macroscopic counterparts. With the
introduction of quartz for timekeeping purposes around 1960, watches became the
first true MEMS device.
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2 MEMS and Microstructures in Aerospace Applications
© 2006 by Taylor & Francis Group, LLC
[...]... devoted to handling and contamination controls for MEMS in space applications due to the importance of the topic area © 2006 by Taylor & Francis Group, LLC Osiander / MEMS and microstructures in Aerospace applications DK3181_c001 Final Proof page 11 1.9.2005 11:41am Microelectromechanical Systems and Microstructures in Aerospace Applications 11 to final mission success Handling and contamination control... Group, LLC Osiander / MEMS and microstructures in Aerospace applications DK3181_c002 Final Proof page 14 1.9.2005 11:49am 14 MEMS and Microstructures in Aerospace Applications Recently dramatic progress has been occurring in the development of ultraminiature, ultralow power, and highly integrated MEMS- based microsystems that can sense their environment, process incoming information, and respond in a precisely... in the NASA Technology Inventory, this is over a 40% increase in MEMS tasks It is almost a 90% increase relative to GFY01 where 59 MEMS R&D tasks were identified The MEMS technologies included in the NASA inventory are: © 2006 by Taylor & Francis Group, LLC Osiander / MEMS and microstructures in Aerospace applications DK3181_c002 Final Proof page 24 1.9.2005 11:49am 24 MEMS and Microstructures in Aerospace. .. introduction, and should be used in conjunction with the sections of this book covering reliability, packaging, contamination, and handling concerns © 2006 by Taylor & Francis Group, LLC Osiander / MEMS and microstructures in Aerospace applications DK3181_c001 Final Proof page 8 1.9.2005 11:41am 8 MEMS and Microstructures in Aerospace Applications An entire chapter, Chapter 5, deals with radiation-induced.. .Osiander / MEMS and microstructures in Aerospace applications DK3181_c001 Final Proof page 3 1.9.2005 11:41am Microelectromechanical Systems and Microstructures in Aerospace Applications 3 When we think of MEMS or micromachining, wrist and pocket watches do not necessarily come to our mind While these devices often are a watchmaker’s piece of art, they are a piece of their own, handcrafted in single... into the following four sections: © 2006 by Taylor & Francis Group, LLC Osiander / MEMS and microstructures in Aerospace applications DK3181_c001 Final Proof page 7 1.9.2005 11:41am Microelectromechanical Systems and Microstructures in Aerospace Applications 7 1.4.1 AN UNDERSTANDING OF MEMS AND THE MEMS VISION It is exciting to contemplate the various space mission applications that MEMS technology... LLC Osiander / MEMS and microstructures in Aerospace applications DK3181_c001 Final Proof page 12 1.9.2005 11:41am 12 MEMS and Microstructures in Aerospace Applications As for the future, your task is not to foresee it, but to enable it ´ Antoine de Saint-Exupery, The Wisdom of the Sands REFERENCES 1 Implications of Emerging Micro- and Nanotechnologies Committee on Implications of Emerging Micro- and. .. as described in the following section on exploration applications for MEMS © 2006 by Taylor & Francis Group, LLC Osiander / MEMS and microstructures in Aerospace applications DK3181_c002 Final Proof page 28 1.9.2005 11:50am 28 MEMS and Microstructures in Aerospace Applications 2.3.4 EXPLORATION APPLICATIONS There are a vast number of potential application areas for MEMS technology within the context... extremes, and be insensitive to significant electrical or magnetic fields In the remainder of this chapter, recent examples of MEMS technologies being developed for space mission applications are discussed The purpose of © 2006 by Taylor & Francis Group, LLC Osiander / MEMS and microstructures in Aerospace applications DK3181_c002 Final Proof page 16 1.9.2005 11:49am 16 MEMS and Microstructures in Aerospace. .. ways in which MEMS technology can be exploited to perform GN&C attitude sensing and control functions are highlighted, in particular, for microsatellite missions where volume, mass, and power requirements © 2006 by Taylor & Francis Group, LLC Osiander / MEMS and microstructures in Aerospace applications DK3181_c001 Final Proof page 10 1.9.2005 11:41am 10 MEMS and Microstructures in Aerospace Applications . demonstrate
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4 MEMS and Microstructures in Aerospace Applications
©. AND
MICROSTRUCTURES IN AEROSPACE APPLICATIONS
MEMS and Microstructures in Aerospace Applications is loosely divided into the
following four sections:
Osiander
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