ECE6450L6 rapid thermal processing

Structural, electrical and optical studies on the effects of rapid thermal processing on silicon germanium carbon films

Structural, electrical and optical studies on the effects of rapid thermal processing on silicon germanium carbon films
... STRUCTURAL, ELECTRICAL AND OPTICAL STUDIES ON THE EFFECTS OF RAPID THERMAL PROCESSING ON SILICONGERMANIUM -CARBON FILMS FENG WEI (M Eng, XJTU) A THESIS SUBMITTED FOR THE DEGREE OF DOCTOR OF ... was explained based on the theory of binary alloy oxidation and the consideration of large difference in the heat of formation of SiO2 and GeO2 Rapid thermal oxidation of SiGe films was examined ... activities The effect of rapid thermal processing (annealing and oxidation) on the structural, electrical and optical properties of strained Si1−xGex and Si1−x−yGexCy alloys is the main concern of this...
  • 242
  • 34
  • 0

Tài liệu Thermal Processing of Foods : Control and Automation ppt

Tài liệu Thermal Processing of Foods : Control and Automation ppt
... and processed at high sterilization temperatures (Larousse and Brown, 1997), and cans of 41 1:5 7:0 0 1:4 9:4 0 1:5 3:2 0 1:4 2:2 0 1:4 6:0 0 1:3 8:4 0 Process run time 2:0 8:0 0 2:0 4:2 0 2:0 0:4 0 1:3 5:0 0 1:3 1:2 0 ... 1:3 1:2 0 1:2 7:4 0 1:2 4:0 0 1:2 0:2 0 1:1 3:0 0 1:1 6:4 0 1:0 9:2 0 1:0 5:4 0 1:0 2:0 0 Figure 3.1 Pressure differential in a semi-rigid container in a retort 50 100 Come up time Pressure cool 2:3 0:0 0 2:2 2:4 0 2:2 6:2 0 ... proper control of thermal processes Thermal Processing of Foods: Control and Automation Edited by K.P Sandeep © 2011 Blackwell Publishing Ltd and the Institute of Food Technologists ISBN: 978-0-813-81007-2...
  • 220
  • 134
  • 0

Tailoring of amorphous siox nanowires grown by rapid thermal annealing

Tailoring of amorphous siox nanowires grown by rapid thermal annealing
... assisted SiOx nanowires grown after rapid thermal annealing at 900 °C for 60 s X-ray (EDS) analysis shows that the wire is mainly composed of Si and O, whereas the seed particle is constituted by Pt ... indicating the Si L23 ELNES of the nanowire and Si substrate In conclusion, SiOx nanowires have been successfully prepared by rapid thermal annealing with the use of Pt as catalysts, which initiate ... microscopy images of Pt/SiO2/Si structures after rapid thermal annealing at 900 °C for (a) 180 s, and (b) 300 s result indicates that the optimum heating time for the growth of SiOx nanowires is not...
  • 4
  • 118
  • 0

Báo cáo hóa học: " Direct Synthesis and Characterization of Optically Transparent Conformal Zinc Oxide Nanocrystalline Thin Films by Rapid Thermal Plasma CVD" pptx

Báo cáo hóa học:
... Thin Solid Films 1997, 295:104-106 doi:10.1186/1556-276X-6-568 Cite this article as: Pedersen et al.: Direct Synthesis and Characterization of Optically Transparent Conformal Zinc Oxide Nanocrystalline ... performance nanocrystalline ZnO:Ga films deposited by plasmaenhanced chemical vapor deposition Thin Solid Films 2005, 473:35-40 36 Cebulla R, Wendt R, Ellmer K: Al-doped zinc oxide films deposited by ... Loffler J, Sommeling PM, Lindend JL, Hamersa EAG, Schropp REI, van de Sandena MCM: Surface textured ZnO films for thin film solar cell applications by expanding thermal plasma CVD Thin Solid Films...
  • 12
  • 109
  • 0

Báo cáo hóa học: " Rapid thermal annealing and crystallization mechanisms study of silicon nanocrystal in silicon carbide matrix" doc

Báo cáo hóa học:
... co-sputtering Si and SiC targets Furnace annealing and RTA techniques were compared by studying the precipitation and crystallization of Si and SiC-NC with varying Si/SiC ratio after annealing Si and ... furnace annealing Page of Figure Si and SiC grain size from RTA and furnace annealing in different Si concentration concentration increases, higher degree of silicon crystallization and less ... positive annealing method in Si/ SiC nanocrystalline system compared with furnace annealing For the purpose of quantitative investigation, we calculate the degree of crystallization in all Si...
  • 7
  • 101
  • 0

CRITICAL DIMENSION AND TEMPERATURE CONTROL IN MULTI ZONE THERMAL PROCESSING 2

CRITICAL DIMENSION AND TEMPERATURE CONTROL IN MULTI ZONE THERMAL PROCESSING 2
... 133.7 128 .5 128 .5 128 .5 change to 129 .6 128 .5 change to 129 .5 2. 12 2. 12 1. 52 1.53 1.98 1.98 1.70 1.71 401 398 400 399 400 400 399 400 1 128 .2 128 .2 128 .2 128 .2 126 .6 126 .6 126 .6 126 .6 23 140 120 ... to 133.6 130 130 128 .5 128 .5 change to 129 .6 2. 13 1.54 2. 12 1.54 1.98 1.73 1.98 1.70 399 3 62 399 400 422 408 400 401 23 46 1 128 .1 125 .4 128 .2 128 .2 128 .0 126 .9 126 .6 126 .6 11 12 Flat Flat Warp ... Tp2 (∞) = Ra2 1 Tw1 (∞) − Tw2 (∞) RT Rw 12 1 Tw2 (∞) − Tw1 (∞) RT Rw 12 (2. 7) (2. 8) 19 where Rw1 Ra1 Rw 12 Ra1 Rw 12 + Rw1 Rw 12 + Rw1 Ra1 Rw2 Ra2 Rw 12 = Ra2 Rw 12 + Rw2 Rw 12 + Rw2 Ra2 RT = RT The thermal...
  • 99
  • 19
  • 0

Fabrication of ultra shallow junctions and advanced gate stacks for ULSI technologies using laser thermal processing

Fabrication of ultra shallow junctions and advanced gate stacks for ULSI technologies using laser thermal processing
... FABRICATION OF ULTRA- SHALLOW JUNCTIONS AND ADVANCED GATE STACKS FOR ULSI TECHNOLOGIES USING LASER THERMAL PROCESSING CHONG YUNG FU (B A Sc (First Class Hons.), NTU) A THESIS SUBMITTED FOR ... fabricate ultra- shallow p+/n junctions and advanced poly-Si gate stacks for ultra- large scale integration technologies LTP of ultra- shallow junctions typically involves the pre-amorphization of the silicon ... Interaction of Laser with Crystalline Silicon 43 4.3 Interaction of Laser with an a-Si Overlayer on c-Si 47 4.4 Summary 50 CHAPTER FORMATION OF ULTRA- SHALLOW JUNCTIONS USING LASER THERMAL PROCESSING...
  • 174
  • 29
  • 0

Temperature sensing and control in multi zone semiconductor thermal processing

Temperature sensing and control in multi zone semiconductor thermal processing
... very sensitive to thermal processing temperature, requirement is increasingly stringent on temperature sensing and control in multi- zone semiconductor thermal processing Resistance Temperature Detectors ... Estimation for Multi- Zone Semiconductor Thermal Processing 2.1 Introduction Thermal processing of semiconductor wafers is common and critical in semiconductor manufacturing [18, 19, 20] Temperature ... in Multi- Zone Semiconductor Thermal Processing and Estimator Performance Analysis As has been discussed in Section 1.1.1, an array of RTD’s are installed in the multizone bake-plate for semiconductor...
  • 126
  • 19
  • 0

Thermal processing in lithography equipment design, control and metrology

Thermal processing in lithography equipment design, control and metrology
... the prossing control system in lithography requires careful consideration, including advanced process control techniques, equipment design and process monitoring In this thesis we will investigate ... requires in- situ measurement CD metrology plays a key role enabling productivity gains made through APC in lithography The continuing decreasing of CD size has also led to smaller process control windows ... quench in lithography The system integrates the baking and chilling processes of the lithography sequence, and thus eliminates the undesirable and uncontrollable temperature fluctuations during the...
  • 148
  • 28
  • 0

Multiplexed MPC for mutli zone thermal processing in semiconductor manufacturing

Multiplexed MPC for mutli zone thermal processing in semiconductor manufacturing
... Chapter Introduction problem for SMPC to give fair basis for comparison with MMPC Appendix B derives stabilizing terminal weight for infinite horizon MMPC Chapter Bake Plate Thermal Modeling The ... Constraints for MMPC can be formulated following the same procedure with SMPC 3.3.2 MMPC Design for 3-zones Bake Plate Design of MMPC controller can be made following the same procedure with SMPC ... modeling In this chapter, a theoretical model of bake plate is constructed using heat transfer law In Chapter 3, standard formulation of SMPC and MMPC problems is given for both finite and infinite...
  • 78
  • 31
  • 0

11 thermal processing and nutritional quality

11  thermal processing and nutritional quality
... systems Thermal processing and nutritional quality 269 H OH HO HO HO H NHR OH H H 2-amino-2-desoxy-D-glucose Heyns rearranged product Fig 11. 3 O C C H2N + O HC R COOH O C C CH R NH2 OH Fig 11. 4 ... fragmented hexoses and amines could be unambiguously attributed to distinct reaction pathways via the intermediates A–C without involving the Thermal processing and nutritional quality Table 11. 1 271 Composition ... Physico-chemical properties of melanoidins other than colour may be Thermal processing and nutritional quality 277 protein N N protein Fig 11. 11 Structure of the radical cation CROSSPY important in foods...
  • 28
  • 60
  • 0

Báo cáo khoa học: "An Interface for Rapid Natural Language Processing Development in UIMA" potx

Báo cáo khoa học:
... Biomed Inform 2009 Oct;42(5):937-49 Christopher M Frenz 2007 Deafness mutation mining using regular expression based pattern matching BMC Med Inform Decis Mak 2007 Oct 25;7:32 Cyril Grouin, Louise ... clinical information retrieval using the automated retrieval console (ARC) J Am Med Inform Assoc 2010 Jul-Aug;17(4):375-82 Leonidas Fegaras 2005 Converting a Regular Expression into a Deterministic ... which concepts were found in the same sentence or finding all concepts in a certain section Methods in this set provide functionality to find annotations that covering the span of another annotations...
  • 6
  • 117
  • 0

báo cáo hóa học:" Research Article An Open Framework for Rapid Prototyping of Signal Processing Applications" pdf

báo cáo hóa học:
... through three transformation steps: the hierarchy flattening transformation, the HSDF transformation, and the DAG transformation (see Section 3.3.2) These transformations prepare the graph for the static ... description that can be used during the whole signal processing design cycle DIF is designed as an extensible repository of representation, analysis, transformation, and scheduling of data flow language ... algorithm and of an architecture, PREESM can find the right deployment, provide simulation information, and generate a framework code for the processor cores [2] These rapid prototyping tasks can be...
  • 13
  • 79
  • 0

Báo cáo hóa học: " Rapid VLIW Processor Customization for Signal Processing Applications Using Combinational Hardware Functions" potx

Báo cáo hóa học:
... FU FU FU FU FU Hardware function Hardware function Figure 3: The VLIW processor architecture with application-specific hardware functions then configured in a 4-wide VLIW processor using a shared ... 0.1 (3%) 2593 ALUT (1%) 16 Number of processors two read ports, one write port per processor Area∗ VLIW Performance VLIW ∗ Area VLIW + super CISC∗ Performance VLIW + super CISC∗∗ Figure 5: Scalability ... effectiveness of our approach for signal processing applications, we selected a set of core signal processing benchmarks We examine algorithms of interest in signal processing from three categories:...
  • 23
  • 78
  • 0

Xem thêm

Từ khóa: tiêt 37 - đọc văn - tỏ lòngtuyên ngôn độc lậpMạng Máy Tính & Các Khái Niệm Cơ BảnBài Giảng Đa HìnhTiểu luận cao học môn quản lý nhà nước trên các lĩnh vực trọng yếu công tác quản lỷ nhà nước đổi với hoạt động tôn giáo trên địa bàn huyện ninh sơn, tỉnh ninh thuậnCác Nguyên Tắc Căn Bản Của Truyền Thông Không DâyBài Giảng Sự Di ĐộngBài Giảng Ngắt Và Xử Lý NgắtBài Giảng Truy Cập Bộ Nhớ Trực Tiếp DMANghiên cứu phát hiện vi khuẩn lao kháng đa thuốc bằng kỹ thuật sinh học phân tửRèn luyện kĩ năng giúp học sinh lớp 9 giải thành thạo dạng bài tập lập công thức phân tử hợp chất hữu cơ”Win Word Các Chức Năng KhácBài Giảng Ngôn Ngữ Lập Trình CC++ - Con Trỏ Và Số Học Địa ChỉNghiên cứu giải pháp chống xói lở bờ sông và đê bao khu vực Đồng Tháp bằng vật liệu rơm cuộnTác động của các nhân tố cấu thành hệ thống kiểm soát nội bộ đến hiệu quả hoạt động của Tập đoàn Điện lực Việt Nam.HAY TÀI LIỆU ÔN THI THPT QUỐC GIA THPT QUỐC GIA MÔN GIÁO DỤC CÔNG DÂN LỚP 12 NĂM 2017 (CÓ ĐÁP ÁN)Bài đời sống kinh tế, văn hoá lịch sử 7Các nước đông bắc á lịch sử 12Cách mạng tư sản pháp cuối thế kỷ XVIII lịch sử 10Một số biện pháp hướng dẫn học sinh học tốt phân môn Luyện từ và câu lớp 4
Nạp tiền Tải lên
Đăng ký
Đăng nhập