... shows the rim of the mirror, which raises the mirror’s center of mass. The lower mass increases resonance frequency. The mass of the circular mirror is about twice the mass of the perforated ... widths, number of comb arrays, diameter of the mirror, number of holes in perforated beams, etc. Conversely, other CAD packages may require hours to modify such designs. An SEM of the micromirror ... tools are borrowed from the electronics industry. The available layout tools are typically geared toward the circuit designer, leaving the MEMS designer the arduous task of creating MEMS-related...