... Yoshitomi, Y Ebuchi, H Kimijama, T Ohguro, E Morifuji, H S Momose, K Kasai, K Ishimaru, F Matsuoka, Y Katsumata, M Kinugawa, and H Iwai, High performance MIM capacitor for RF BiCMOS LSIs,” in Proc ... method, and a high capacitance density of 17 fF/µm2 has been achieved for AlTaOx MIM capacitor [41] In particular, the RF performance of high- κ MIM capacitors have been studied for Al2O3 based dielectrics ... investigation of high- κ materials for gate oxides applications The reliability assessments for high- κ MIM capacitors could be found for HfO2 based high- κ dielectrics in [46, 47] and for Ta2O5 in...