... comparison of the growth of Ge nanocrystals in silicon oxide and HfAlO matrices - 1 02 - Chapter 5 .2 Results & Discussions II Ge nanocrystals in HfAlO matrix In order to synthesize the Ge nanocrystals in ... almost insoluble in silicon oxide [20 ,21 ], whereas it has been found that thermal processing of HfO + Ge systems can lead to the formation of hafnium germinate (HfGeOx) [22 ,23 ] The formation of the ... 20 04 [ 12] Q C Zhang, N Wu, L K Bera, and C X Zhu, “Study of Germanium Out-Diffusion in HfO2 Gate Dielectric of MOS Device on Germanium Substrate”, Mater Res Soc Symp Proc., vol 829 , pp 449, 20 04...