Fabrication of micro and nano fluidic lab on a chip devices utilizing proton beam writing technique

... great advancements in the area of lab- on- a- chip devices In this chapter, a variety of micro and nano -fabrication techniques are discussed This discussion starts from an array of conventional ... development of proton beam writing for the fabrication of lab- on- a- chip devices Chapter introduces alternative micro- and nano -fabrication technologies, including mainstream lithographic techniques and ... Potential applications of the technique are the fabrication of microand nano uidic devices and biochips by both fast prototyping and batch fabrication methods to fulﬁll the need for lab- on- a- chip...

Micromachining Techniques for Fabrication of Micro and Nano Structures Part 1 ppt

... beam lithography and the Micromachining Techniques for Fabrication of Micro and Nano Structures minimal feature size accessible by these techniques is typically limited to tens of nanometers, thus ... 3-D sensor structures (Kim, 2008, 19 99) 2 Micromachining Techniques for Fabrication of Micro and Nano Structures In this chapter, the focused ion beam (FIB) based three-dimensional nano- machining ... recognized at 10 0s of µm Thus, the present situation is particularly advantageous for the industry that develops/fabricates nano/ micron scale components 2 .1 Various techniques of micromachining Micromachining...

Micromachining Techniques for Fabrication of Micro and Nano Structures Part 3 doc

... Techniques for Fabrication of Micro and Nano Structures Fig Depth profiles for 35 5 nm Nd:YAG laser micromachining of sapphire with fluence of 9.27 J/cm2 and virious scan speeds 3. 2 Laser micromachining ... which emits at 30 8 nm, is prototypical of these in which a pulsed electric discharge ionizes the Xe into a Xe+ state and 38 Micromachining Techniques for Fabrication of Micro and Nano Structures ... Tip Grating for Refractive Index Sensing IEEE Photonics Technology Letters, Vol 23, No 22, (2011), pp 1712-1714 ,(2011b), 34 Micromachining Techniques for Fabrication of Micro and Nano Structures...

Micromachining Techniques for Fabrication of Micro and Nano Structures Part 4 pot

... 50 Micromachining Techniques for Fabrication of Micro and Nano Structures Fig The ablation rates for laser micromachining versus laser fluences for Pyrex with different ... 64 Micromachining Techniques for Fabrication of Micro and Nano Structures and (c), respectively There is a frequency interval, in which one effective parameter is negative ε′ for OCSRRs, μ′ for ... -11 .4 -5.0 -12.5 -6.6 -13.3 -9 .4 -13.2 -13.2 -13.8 -17.6 Table The summary of the simulated results for the unit cells array 68 Micromachining Techniques for Fabrication of Micro and Nano Structures...

Micromachining Techniques for Fabrication of Micro and Nano Structures Part 6 docx

... applications of this laser micromachining technique will also be discussed 96 Micromachining Techniques for Fabrication of Micro and Nano Structures 3.1 Trench micromachining in air The laser micromachining ... subsection 100 Micromachining Techniques for Fabrication of Micro and Nano Structures 3.2 Trench micromachining in DI water The characteristics of liquid-immersion laser micromachining for GaN were ... laser micromachining in DI water 98 Micromachining Techniques for Fabrication of Micro and Nano Structures Fig 15 SEM images of trenches under different pulse energy: (a) higher pulse energy of...

Micromachining Techniques for Fabrication of Micro and Nano Structures Part 7 docx

... Zeng, et al., 2003] A threshold of 33.8 mJ/cm2 is reported for PMMA at 193 nm by Chen, Y-T, et al (2005) 114 Micromachining Techniques for Fabrication of Micro and Nano Structures Group C=C C=O Si-Si, ... led in the microvia technology, are also key figures in the OI 116 Micromachining Techniques for Fabrication of Micro and Nano Structures deployment [Holden, 2003; Lau, 2000; Shioda, 20 07] Undoubtedly, ... the optical link required for OI is 118 Micromachining Techniques for Fabrication of Micro and Nano Structures relatively short, loss due to multimode is acceptable and that alignment between...

Micromachining Techniques for Fabrication of Micro and Nano Structures Part 9 docx

... compositions of coatings are known 168 Micromachining Techniques for Fabrication of Micro and Nano Structures Fig 14 Faults of adhesion and uniformity of coatings It is obvious that the price for micro ... 156 Micromachining Techniques for Fabrication of Micro and Nano Structures Conclusion Micro ED milling is shown as a potential fabrication technique for functional microcomponents Influences of ... Development and scale effects of small swissroll combustors Proceedings of Combustion Institute, doi :10.1016/ j.proci.2006.08.043 158 Micromachining Techniques for Fabrication of Micro and Nano Structures...

Micromachining Techniques for Fabrication of Micro and Nano Structures Part 10 docx

... Machining of only a few trenches to the final depth led to cold work hardening Subsequently, bending of narrow walls and 176 Micromachining Techniques for Fabrication of Micro and Nano Structures ... { 110} plane, etching will stop at the moment when faces with {111} planes coincide, i.e in the vertex formed by a {100 } plane 188 Micromachining Techniques for Fabrication of Micro and Nano Structures ... Micromachining Techniques for Fabrication of Micro and Nano Structures Fig 19 Micro gearwheel top of teeth diameter: 800 µm, depth: 300 µm, diameter of column: 160 µm, height of the cone: 140...

Micromachining Techniques for Fabrication of Micro and Nano Structures Part 11 pot

... Published: 30 Aug 2005 (www.frost.com) 206 Micromachining Techniques for Fabrication of Micro and Nano Structures range of capabilities from macro- to micromachining in most materials, which is ... processed in TMAH and photographs were taken at the prescribed times Fig 19 shows how rapidly the flat bottom formed 198 Micromachining Techniques for Fabrication of Micro and Nano Structures Fig ... arms are first released exposing {110 } planes, that have, as commented before, a high etching rate 200 Micromachining Techniques for Fabrication of Micro and Nano Structures 50 minutes: Here it...

Micromachining Techniques for Fabrication of Micro and Nano Structures Part 12 docx

... machining precision and cut quality For example, the kerf width of a slot and/ or the 222 Micromachining Techniques for Fabrication of Micro and Nano Structures minimum diameter of a circle are usually ... (Olsen, 2009) 217 218 Micromachining Techniques for Fabrication of Micro and Nano Structures 2.3 Fatigue performance Current specifications require that AWJ-cut aluminum and titanium parts that will ... 2011) 216 Micromachining Techniques for Fabrication of Micro and Nano Structures beginning of the tool path The nozzle moves relatively fast along straight sections of the tool path and decelerates...

Micromachining Techniques for Fabrication of Micro and Nano Structures Part 13 potx

... 230 Micromachining Techniques for Fabrication of Micro and Nano Structures 4.7 Multi-nozzle platform The downsizing of an AWJ nozzle results in a reduction in the flow rate of the waterjet ... -20% concentration range for NaOH electrolyte is 238 Micromachining Techniques for Fabrication of Micro and Nano Structures arrived at Moreover use of low concentration of NaOH as electrolyte makes ... glass pellet micromachining 244 Micromachining Techniques for Fabrication of Micro and Nano Structures The spark energy can be estimated by taking Vs = 45 V, iinstantaneous = 0.2 A and time =...

Micromachining Techniques for Fabrication of Micro and Nano Structures Part 14 ppt

... feature of this process is that the deposition of the micromechanical structures is performed before the gate oxidation 268 Micromachining Techniques for Fabrication of Micro and Nano Structures ... Figure 14 264 Micromachining Techniques for Fabrication of Micro and Nano Structures Fig 14 (a) multi-chip approach using wire bonding, (b) multichip approach using throughwafer-interconnect and ... 250 Micromachining Techniques for Fabrication of Micro and Nano Structures Close control for gap adjustment is must Research efforts must be made to reduce the low energy sparks due to partial...

Micromachining Techniques for Fabrication of Micro and Nano Structures Part 16 pptx

... Electromechanical Modeling and Simulation of RF MEMS Switches Proceedings of the 4th International Symposium on MEMS and 300 Micromachining Techniques for Fabrication of Micro and Nano Structures Nanotechnology, ... software tools based on these techniques and specifically targeted to MEMS modeling and simulation 298 Micromachining Techniques for Fabrication of Micro and Nano Structures References Ali, I ... short arm of the resistor, the drop in temperature level is even more sharp reaching 67% at 10 μm, and 33% at 105 μm 294 Micromachining Techniques for Fabrication of Micro and Nano Structures...

Tài liệu Colchero, J. et al. “Friction on an Atomic Scale”Handbook of Micro and Nano Tribology P6 Handbook of Micro/Nanotribology. Ed. Bharat ppt

... Films and Boundary Lubrication • Nanocontacts • Quartz Microbalance Experiments in Tribology 6.4 Modeling of an SFFM Resolution in SFFM • Deformation of Tip and Sample • Modeling of SFM and SFFM: ... Akamine et al., 1990; Wolter et al., 1991) and, on the other hand, to new detection schemes, in particular to the optical beam deﬂection method (Meyer and Amer, 1988, 1990b; Alexander et al., 1989; ... aspects of friction on an atomic scale (Zhong and Tománek, 1990; Tománek et al., 1991; Colchero and Marti, 1995; Colchero et al., 1996b; Gyalog et al., 1995) These models can be considered an extension...

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