... 54.7Њ< ;11 1>< ;10 0>SiO2 MaskφFIGURE 3.4 Directional etching of crystalline silicon. Osiander / MEMS and microstructures in Aerospace applications DK 318 1_c003 Final Proof page 42 1. 9.2005 ... such as electromagnetic or Osiander / MEMS and microstructures in Aerospace applications DK 318 1_c002 Final Proof page 28 1. 9.2005 11 :50am28 MEMS and Microstructures in Aerospace Applications © 2006 ... 8 13 20 01, Institute of Electrical and Electronics Engineers, Inc., Boston (20 01) . 16 . Graeffe, J., et al. , Scanning micromechanical mirror for fine-pointing units of intersa-tellite optical...