... 01 020 304050 -2 .00E-013 -1 .00E-0130.00E+0001.00E-013 2. 00E-013Signal(A)Sampling Points Without-Chip With-RF-Without-Shield With-RF-With-Shield Without-RF-Without-Shield Without-RF-With-Shield ... sapphire Y,Z -1 ,986 0, 324 -0 ,004 0,0 12 0,008 0,081 Z,X -3 ,23 5 0, 528 -0 ,007 0, 020 0,013 0,1 32 Y,X -3 ,467 0,566 -0 ,007 0, 021 0,014 0,1 42 lithium niobate X,Y -3 ,21 3 0, 525 -0 ,007 0, 020 0,013 0,131 ... No.13, ( July 20 06), pp. 455 3-4 563, ISSN 000 3 -2 700 FAIMS Detection Technology Based on MEMS 25 01 020 304050 -3 .00E-013 -2 .00E-013 -1 .00E-0130.00E+0001.00E-013 2. 00E-0133.00E-013Signal(A)Sampling...