Micromachining Techniques for Fabrication of Micro and Nano Structures Part 1 ppt
Handbook of Micro and Nano Tribology P4
... dimension is increased from 1. 1 to 1. 9, the value of ac*= ac/Aadecreases from 10 16 to 10 16 , respectively, for the above values of G* and φ. Therefore, for D = 1. 1, all thecontact spots ... evaluated for experimentally observed values of D = 1. 38(Majumdar and Bhushan, 19 90) and φ = 0.05 (Bhushan and Doerner, 19 89) for disk type C, and anassumed value for G* = 10 10 for curve ... a power law of the form (Mandelbrot, 19 82;Voss, 19 88; Majumdar and Tien, 19 90; Majumdar and Bhushan, 19 90):(4.3 .16 )where 1 < D < 2 is the fractal dimension of the profile and C is a scaling...
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Handbook of Micro and Nano Tribology P8
... c Si (10 0) 0 .12 0.03 0 .18 SiO 2 /Si 0. 21 0.03 0 .19 C 18 single-grafted/SiO 2 /Si 0 .16 0.04 0.23C 18 double-grafted/SiO 2 /Si 0 .16 0. 018 0.07Au/Si 1. 16 0.04 0 .13 ODT/Au/Si ... M., Ogletree, D. F., and Sautet, P. (19 93), “Viscoelastic and Electrical Properties of Self-Assembled Monolayers on Au (11 1) Films,” Langmuir 9, 3600–3 611 .Ulman, A. (19 91) , An Introduction ... function of the number of cycles for virgin silicon and silicon surfaces lubricated with Z -15 and Z-Dol lubricants, Figure 8.8. An area of 1 × 1 µm was scanned at a normal force of 300 nN....
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Handbook of Micro and Nano Tribology P14
... directionsin Figures 14 .13 and 14 .15 ).TABLE 14 .2 Surface Roughness (σ and P-V distance), Micro- and Macroscale Friction, Microscratching/Wear, and Nano- and Microhardness Data for Various SamplesSurface ... graphite on a microscale have been measured by Kaneko et al. (19 88, 19 91a), Miyamoto et al. (19 90, 19 91a,c), Mate (19 93a,b), Bhushan et al. (19 94a–c,e, 19 95a–g, 19 97c, 19 98), Ruan and Bhushan (19 94a–c), ... Bhushan (19 94a–c), Koinkar and Bhushan (19 96a,b, 19 97a,b), and Sundararajan and Bhushan (19 98).Koinkar and Bhushan (19 96a,b) and Poon and Bhushan (19 95a,b) reported that rms roughness and friction force increase...
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Handbook of Micro and Nano Tribology P16
... —Polysilicon 1. 07 0.04 18 — —Polysilicon (lapped) 0 .16 0.05 18 25 12 .5PECVD-oxide coated Si (11 1) 1. 50 0. 01 8 5 18 .0Dry-oxidized Si (11 1) 0 .11 0.04 16 14 17 .0Wet-oxidized Si (11 1) 0.25 0.04 17 18 14 .4C ... Coefficient of Macroscale Friction b Si (11 1) 0 .11 0.03 0 .18 C + -implanted Si (11 1) 0.33 0.02 0 .18 a Versus Si 3 N 4 tip, tip radius of 50 nm in the load range of 10 15 0 nN(2.5–6 .1 ... of Friction b Scratch Depth c at 40 µN (nm)Wear Depth c at 40 µN (nm)Nanohardness c at 10 0 µN (GPa) Si (11 1) 0 .11 0.03 20 27 11 .7Si (11 0) 0.09 0.04 20 — —Si (10 0) 0 .12 ...
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Handbook of Micro and Nano Tribology P5
... force upon separation of thetip and sample is often referred to as the pull-off force. Unfortunately, measuring the pull-off force doesnot directly give the work of adhesion. The pull-off force ... equationsHertzDMTBCPJKRSMaugisPAA==32∆PAA=−=322∆PA AAA=− −=−3232 1 1∆PA A AAA=−=−326263∆ 1 2 12 1 43 11 1 11 43 1 222 2222322 2 222=−+− −+−+− −=− −+ −=− −()[][][][]λλλλAmm ... manuscript.ReferencesBhushan, B. (19 97), Micro/ Nanotribology and Its Applications, Vol. E330, Kluwer Academic, Dordrecht.Bowden, F. P., and Tabor D. (19 50, 19 64), The Friction and Lubrication of Solids, Parts I &...
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Tài liệu Handbook of Micro and Nano Tribology P9 pptx
... solvation force atsurface separations below a few molecular diameters (Snook and van Megan, 19 79, 19 80, 19 81; vanMegan and Snook, 19 79, 19 81; Kjellander and Marcelja, 19 85a,b; Tarazona and Vincente, ... (Marcelja and Radic, 19 76; Marcelja et al., 19 77; Gruen and Marcelja, 19 83;Jönsson and Wennerström, 19 83; Schiby and Ruckenstein, 19 83; Luzar et al., 19 87; Attard and Batchelor, 19 88; Marcelja, 19 97) ... NaCl for 1: 2 or 2 :1 electrolytes such as CaCl for 2:2 electrolytes such as MgSO24σψψ=()++()−0 11 7 51 4 2 011 2225 7 12 0. sinh . ,::.MM eE mV J m for monovalent salts= 0.0 211 M...
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Tài liệu Colchero, J. et al. “Friction on an Atomic Scale”Handbook of Micro and Nano Tribology P6 Handbook of Micro/Nanotribology. Ed. Bharat ppt
... scale.Figure 6 .16 shows two images of the friction force corresponding to the (10 0) and the (11 1) surfacetaken at an estimated loading force of 15 nN. Both images show stick-slip-like variations of the ... 1/ R 1 + 1/ R2 and E* is an effective modulus of elasticitysuch that 1/ E* = (1 ν2 1 )/E 1 + (1 ν22)/E2, with E the modulus of elasticity and ν Poisson’s ratio. In the case of SFM and SFFM, ... solids of radii R 1 and R2 pressed against each other with a loading force Fn deform elastically and touch on a circle of radius(6 .16 )where R* is an effective radius such that 1/ R* = 1/ R 1 ...
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Tài liệu Handbook of Micro and Nano Tribology P10 pptx
... Perry, 19 81, 19 83; Jacobson et al., 19 83; Valli, 19 86; Bhushan, 19 87; Steinmann et al., 19 87; Stone et al., 19 88;Wu et al., 19 89, 19 90b; Wu, 19 90, 19 91; Bhushan et al., 19 95, 19 96, 19 97; Bhushan and ... Townsend et al., 19 93; Bhushan et al., 19 95, 19 96, 19 97; Bhushan and Gupta, 19 95; Gupta and Bhushan ,19 95a, b; Bhushan, 19 96; Patton and Bhushan, 19 96; Bhushan and Li, 19 97; Li and Bhushan, 19 98b,c). ... al., 19 91) , creep (West-brook, 19 57; Mulhearn and Tabor, 19 60/ 61; Atkins et al., 19 66; Walker, 19 73; Chu and Li, 19 77; Hooper and Brookes, 19 84; Li et al., 19 91) , stress relaxation (Hart and...
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Tài liệu Handbook of Micro and Nano Tribology P1 ppt
... al., 19 91, 19 93; Bhushan, 19 95; Bhushan et al., 19 94b–e, 19 95a–f, 19 96, 19 97a,b; Koinkar and Bhushan, 19 96a,b, 19 97b,c; Kulkarni and Bhushan, 19 96a,b, 19 97; DeVecchio and Bhushan, 19 97).AFMs ... dedicatedissues of the Journal of Vacuum Science Technolology (B9, 19 91, pp. 4 01 12 11) and Ultramicroscopy (Vol.42–44, 19 92).TABLE 1. 1 Comparison of Various Conventional Microscopes with SPMsOptical ... (19 91) ,Sarid and Elings (19 91) , Binnig (19 92), Durig et al. (19 92), Frommer (19 92), Meyer (19 92), Marti and Amrein (19 93), and Guntherodt et al. (19 95) and dedicated issues of Journal of Vacuum...
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Tài liệu Handbook of Micro and Nano Tribology P2 ppt
... 1. 9E-05 10 0 nm 0.78 0.05 0.003 7.63E-04 1. 91E-04 1 µm 7. 81 0.49 0.0 31 0.008 0.002 10 µm 78 .13 4.88 0. 31 0.08 0.02 10 0 µm 7 81. 25 48.83 3.05 0.76 0 .19 250 µm 19 53 .13 12 2.07 7.63 1. 91 0.48© 19 99 by ... (in nanometers) as a Function of the Scan Range and the Converter Resolution8 Bit 12 Bit 16 Bit 18 Bit 20 Bit 1 nm 0.008 4.9E-04 3.1E-05 7.6E-06 1. 9E-06 10 nm 0.078 4.9E-03 3.1E-04 7.6E-05 1. 9E-05 10 0 ... to 310 ), a single square pulse of width 12 between 310 and 356, a triangle of period 40 between 356 and 396,a triangle of period 20 between 400 and 420, a triangle of period 12 between 430 and...
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