... semiconductor wafers, and so are repeat-Si SiO2GaAsSemiconductors for Micro and Nanotechnology— An Introduction for EngineersObserved Lattice Property DataSemiconductors for Micro and Nanosystem ... to finish, and for believing in us.Jan G. Korvink and Andreas Greiner,Freiburg im Breisgau,February 2002HafizovicSemiconductors for Micro and Nanosystem Technology 15Chapter 1 Introduction Semiconductors ... text.There are many people to thank for their contributions, and for their helpor support. To the Albert Ludwig University for creating a healthyresearch environment, and for granting one of...