... overall heading of reducing manufacturing cost, several important subtasks have beenidentified. These include increasing chip fabrication yield, reducing product cycle time, maintainingconsistent ... assisting IC-CIM systems in performing variousprocess monitoring, modeling, control, and diagnostic functions. The following is an introduction tovarious computational intelligence tools in preparation ... and controller networks continuouslyon-line. In this indirect adaptive control (IAC) structure, the plant emulator is trained off-line with experi-mental data, whereas the controller is trained...